STATEMENT OF WORK

Title: Ultra-high vacuum sample backout chamber

Lab: Physical Measurement Lab

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The National Institute of Standards and Technology (NIST), Sources and Detectors Group in the Physical Measurement Laboratory performs precision radiometry across the electromagnetic spectrum. We develop novel, built-for-purpose optical power detectors. In support of a CHIPS-funded project, we are developing a radiometer for the extreme ultraviolet wavelength regime that must also operate under ultra-high vacuum (UHV) conditions. Therefore, it is necessary to assess new detector materials for their UHV compatibility. Our lab seeks a UHV sample bakeout chamber that can be used to assess material outgassing during heating. This chamber will be operated in a typical laboratory environment and will be a standalone apparatus for materials testing. In addition to reaching UHV conditions (1e-8 Torr), the system will also be capable of heating samples to at least 300°C. Additional ports are requested to enable future additions to the system. The system will also contain all pumping and pressure monitoring equipment necessary to achieve the required base pressure.

II. PURPOSE

We are seeking an ultrahigh vacuum (UHV) chamber for testing materials for UHV compatibility. The primary deliverable of our CHIPS R&D project is a radiometer that will operate under industrial extreme ultraviolet lithography conditions, and this UHV chamber will allow us to ensure our detectors can meet this criterion. Since state-of-the-art semiconductor lithography occurs under UHV, this equipment will ensure that our detectors can meet the needs of the U.S.A. semiconductor industry.

This equipment is critical for achieving the project’s mission of developing metrology equipment needed by, and useful to, the U.S.A. semiconductor industry. As UHV compatibility is a crucial criterion for our detector, the delivery of this equipment in fiscal year 2025 is necessary so that we can determine quickly if our primary designs will function under industrial conditions. We expect this procurement to allow us to determine suitable materials that we will use to develop our industrially capable detector.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be

2 | P a g e considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Ultra-high vacuum bakeout system Description: This is a stand-alone system capable of reaching ultra-high vacuum conditions and sample heating for testing material compatibility with a UHV environment.

Quantity: 1

A. Technical Specifications

a. Base pressure: 1e-8 Torr

b. Partial pressure for masses >44 AMU: <5e-11 Torr

c. Integrated turbo pump system with roughing pump, vent valve, ion pressure gauge, controller and cable, power supply, gate valve to bakeout chamber

d. Nitrogen backfill capability with pressure relief valve

e. Achieve base pressure in 24 hours

f. Bakeout chamber either 12” cube or 12” diameter sphere (minimum) with minimum of six (6) conflat ports

g. One (1) conflat viewport minimum 600 CF, necessary blank-off flanges, gaskets, and hardware

h. Minimum one (1) 2-3/4” conflat flange

i. One (1) sample holder (minimum) with infrared heater able to hold 3” diameter (or larger) sample. Holder mounted on a CF flange

j. Infrared heater able to achieve temperatures of at least 300 degrees C.

k. Temperature control system for sample, including, for example, temperature controller w/software, cables, appropriate electrical feedthroughs, temperature sensor, etc.

l. Wheeled support stand

m. 120 V (Operate from NEMA 5-20R outlet)

n. CAD drawings of assembled chamber and stand

o. All user manuals for electronics and components

p. Supply a system operating manual which will provide a basic set of instructions for this type of system.

IV. SCHEDULE OF DELIVERABLES

Deliverable Number Description Quantity Due Date

Place of Delivery

1 Draft plan of the system contractor is building to meet the specifications.

(See below)

1 2 weeks after receipt of order

NIST Boulder

3 | P a g e

2 UHV bakeout system

No later than 16 weeks after receipt of order.

NIST Boulder

Standards of Acceptance: The NIST TPOC shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.)

We request a draft deliverable within 2 weeks of the award of the contract for the Government to review. The Government will then provide a written response to the contractor with comments, after which the contractor must submit a revised deliverable that addresses the written comments.

V. DELIVERY TERMS

Delivery shall be F.O.B. Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology

Shipping and Receiving

325 Broadway, Mail Stop 686.01

Boulder, CO 80305-3337

C/O TBD (rm 1-3310)

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Achieve base pressure (1e-8 Torr) within 24 hours of use.

2. Demonstrate partial pressures for masses >44 AMU below 5e-11 Torr

3. Achieve heating temperatures of at least 300 degrees Celsius.

4 | P a g e

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the POC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the

RFQ for consideration.

VIII. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards

5 | P a g e

(e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to

NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.