Two semiconductor-process compatible dry pumps
Closed Solicitation Posted
- Solicitation number
- 80NSSC26938324Q
- Agency
- Shared Services Center National Aeronautics and Space Administration
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Points of contact
-
- Tiffany Neal tiffany.neal@nasa.gov (228) 342-1775
- Cody Guidry cody.d.guidry@nasa.gov
Notice details come from SAM.gov. Updated .
About this opportunity
NASA's Shared Services Center seeks to procure two semiconductor-process compatible dry pumps (EBARA Model EV-S20P) with a sole source intent to EBARA Technologies Inc., with interested parties required to submit capabilities and qualifications by July 20, 2026 at 3:00 p.m. Central Standard Time to contest the sole source determination.
Place of performance is NASA Goddard Space Flight Center, Building 11, Room E041, Greenbelt, Maryland. The procurement is designated as NAICS 334516, Analytical Laboratory Instrument Manufacturing, and PSC 6640, Laboratory Equipment and Supplies. The solicitation invokes FAR Part 12 commercial acquisition procedures and is not restricted by set-aside.
The two pumps (Part Number 202179, Model EV-S20P, specifications 1670 L/min, 200–220V, 50/60Hz, NW50 connection) must be new, unused, and in original factory packaging, meeting manufacturer specifications and quality standards. Equipment must deliver a pumping speed range of 58 to 710 CFM and ultimate pressure capability as low as 3 mTorr. The pumps will replace malfunctioning equipment in semiconductor etching tools performing fluorine-based reactive ion etching, vapor hydrofluoric acid etching, and chlorine-based reactive ion etching processes. Two Power Cable Assemblies (Part Number 210516, 6 feet, open end) are included. The contractor shall provide EBARA Standard Warranty coverage for 12 months from shipment date, with lead time of 2–4 weeks after order receipt. Delivery is required to the specified Goddard location. NASA FAR Supplement Clause 1852.215-84, Ombudsman, applies. The point of contact is Cody Guidry, Procurement Specialist II, at Cody.d.guidry@nasa.gov.
Notice text
Synopsis:
NASA/NSSC has a requirement for two semiconductor-process compatible dry pumps.
NASA/NSSC intends to issue a sole source contract to EBARA TECHNOLOGIES INC: 51 MAIN AVE | SACRAMENTO, CA 95838 under the authority of FAR 12.102(a). It has been determined that EBARA TECHNOLOGIES INC is the sole provider of two semiconductor-process compatible dry pumps
NASA/NSSC will be the procuring center for this effort. Performance will be located at NASA/ Goddard Space Flight Center (GSFC).
The Government intends to acquire Commercial items or services using the provisions, clauses and procedures prescribed in FAR Part 12 for Commercial
The NAICS Code for this procurement is 334516.
Interested organizations may submit their capabilities and qualifications to perform the effort in writing to the identified point of contact not later than 3:00 p.m. Central Standard Time on 7/20/2026. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this procurement on a competitive basis. A determination by the Government not to compete this proposed effort on a full and open competition basis, based upon responses to this notice, is solely within the discretion of the government.
Oral communications are not acceptable in response to this notice.
NASA FAR Supplement Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at https://www.hq.nasa.gov/office/procurement/regs/Procurement-Ombuds-Comp-Advocate-Listing.pdf .
Primary Point of Contact:
Cody Guidry
Procurement Specialist II
Cody.d.guidry@nasa.gov
Attachments
| File | Type | Posted |
|---|---|---|
| SATPC0041809 TAB 07 SOW PRINTED.pdf |
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