SATPC0041809 TAB 07 SOW PRINTED.pdf
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- Attached to
- Two semiconductor-process compatible dry pumps Federal contract opportunity
- Solicitation number
- 80NSSC26938324Q
About this file
This is a Statement of Work (SOW) for the acquisition of two Ebara EV-S20P dry pumps by the Detector Development Laboratory at NASA Goddard Space Flight Center. The contractor shall provide two EBARA Vacuum Pumps (Model EV-S20P, Part Number 202179) with specifications of 1670L/M, 200-220V, 50/60Hz, and NW50 connection, along with two Power Cable Assemblies (Part Number 210516, 6FT, Open End). The pumps are intended to replace malfunctioning equipment used in semiconductor etching tools for fluorine-based reactive ion etching and vapor hydrofluoric acid etching processes, as well as chlorine-based reactive ion etching processes.
The equipment must meet specified technical requirements including a pumping speed range of 58 to 710 CFM and an ultimate pressure capability as low as 3 mTorr. All equipment shall be new, unused, and in original factory packaging while meeting manufacturer specifications and quality standards. The contractor must provide EBARA Standard Warranty coverage for 12 months from the date of shipment. Delivery is required to NASA Goddard Space Flight Center, Building 11, Room E041, Greenbelt, Maryland 20771, with a lead time of 2-4 weeks after receipt of order. The equipment is currently in stock, with the total delivery timeline including standard shipping time.
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Text version
STATEMENT OF WORK
Ebara Dry Pump Acquisition
BACKGROUND
The Detector Development Laboratory is procuring two Ebara EV-S20P dry pumps to replace malfunctioning and failing pumps for semiconductor etching tools running fluorine (reactive ion etching or vapor hydrofluoric acid etching) and chlorine chemistry (reactive ion etching) processes.
SCOPE OF WORK
The contractor shall provide the following items
2.1 Equipment to be Provided
Item 1: EBARA Vacuum Pumps Quantity: 2 each Model: EV-S20P Part Number: 202179 Specifications: 1670L/M, 200-220V, 50/60Hz, NW50
Item 2: Power Cables Quantity: 2 each Part Number: 210516 Description: Cable Assembly, Power, EV-A10-3, VOS100, EV-S20, 6FT, Open End
TECHNICAL REQUIREMENTS
3.1 Product Specifications
Pumping Speed Range: 58 to 710 CFM Ultimate Pressure: As low as 3 mTorr Application: Suitable for vapor HF tools and semiconductor processing equipment Features: Energy efficient operation for laboratory environments
3.2 Quality Standards
All equipment shall:
Be new, unused, and in original factory packaging Meet manufacturer's specifications and quality standards Include EBARA Standard Warranty (12 months from date of shipment) Be suitable for installation in semiconductor processing equipment
DELIVERY REQUIREMENTS
4.1 Delivery Schedule
Lead Time: 2-4 weeks After Receipt of Order (ARO) Status: Equipment currently in stock, plus shipping time
4.2 Delivery Location
NASA Goddard Space Flight Center 8800 Greenbelt Road Building 11, Room E041 Greenbelt, Maryland 20771 United States
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