Repair of Electrostatic Chuck

1. Contracting Activity:

National Institute of Standards and Technology
100 Bureau Drive Stop 1640
Building 301, Room B129
Gaithersburg, MD 20899-1640

2. Purchase Request Number: NB686020-12-00510
CONTRACT: SB1341-12-SU-0073

3. Authority for Action:

0 FAR 8.405-6(a), Restricting Consideration under GSA Federal Supply Schedules

1 FAR 13.106-1(b), Soliciting from a Single Source

4. Describe the supply or service to be acquired and the total estimated dollar value:

The NIST-Boulder Quantum Fabrication Facility requires a remanufactured electrostatic chuck for our PlasmaQuest ECR Vacuum Deposition System. The previous chuck's quartz dielectric has failed.

These chucks are prone to failure. If the current chuck would fail our PlasmaQuest ECR Vacuum Deposition System would be down for an extended period of time to have the failed chuck rebuilt. This time delay would prevent many researchers from continuing their work. A spare chuck would overcome the time delay problem.

We require that Electrogrip, the manufacture of our electrostatic chuck located in our PlasmaQuest ECR Vacuum Deposition System, resurface the failed quartz dielectric with a sapphire dielectric. The sapphire dielectric is more durable and has a better dielectric constant than the quartz dielectric.

Presently Electrogrip has the failed chuck that need to be rebuilt. They had to inspect it to develop the quote

5. List the proposed contractor (name, contact, and phone number) and describe the unique knowledge or capabilities of the proposed contractor:
We propose the rebuild of our spare electrostatic chuck be done by:
Electrogrip
6945 Lynn Way
Pittsburg, PA 15208

Elecrogrip is the manufacture of our electrostatic chucks and the only company that can rebuild them correctly, reliably and within a reasonable time frame.

6. Describe your market research efforts and efforts to ensure that offers are solicited from as many potential sources as is practicable:

The proprietary nature of these parts prevents any other vendor from offering us service.

7. State why you feel that the anticipated cost to the Government will be fair and reasonable:

Electrogrip has quoted a price based on their standard repair cost schedule.

8. Other:

The prompt requisition of a spare chuck is critical to prevent an extended research delay of dozens of scientists using the NIST-Boulder Fabrication facility if the current chuck fails. Only Electrogrip has the resources and knowledge to refurbish this part.