Prototype Silicon Membrane Grating Devices Fabrication
Closed Solicitation Posted
- Solicitation number
- 359676(MC)
- Agency
-
Office of Science
Department of Energy
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334413 Semiconductor and Related Device Manufacturing
- Place of performance
- Menlo Park, California 94025, United States
- Points of contact
-
- Marlene Curiel mcuriel@slac.stanford.edu
Notice details come from SAM.gov. Updated .
About this opportunity
SLAC National Accelerator Laboratory, operating under Stanford University for the Department of Energy, is seeking a contractor to fabricate prototype silicon membrane grating devices with highly specialized technical specifications. The procurement requires single crystal silicon frames measuring 7.5mm x 4.5mm with 200mm thickness (preferred) or 300mm thickness, containing 2x2 arrays of 0.05mm x 0.05mm silicon membranes with 90nm thickness and precise grating patterns etched to 45nm depth. The contractor must provide U.S. domestic end items and demonstrate compliance with Buy American Act requirements, as SLAC specifically requires domestic sourcing for this advanced semiconductor fabrication project. The award will be made using the Lowest Price Technically Acceptable evaluation method, prioritizing cost competitiveness among technically compliant proposals. Interested vendors must submit their proposals by September 11, 2025, with the solicitation having been posted on August 27, 2025.
This solicitation does not include any set-aside designations and is open to all qualified contractors capable of meeting the technical requirements. The contract calls for delivery of 10-20 prototype units, with each device containing four membranes where three will feature the specialized grating patterns and one will remain plain and unpatterned. No specific contract value range is disclosed in the solicitation materials, though the procurement falls under the Semiconductor and Related Device Manufacturing NAICS code 334413. The work will be performed in Menlo Park, California, where SLAC's facilities are located. The highly technical nature of the fabrication requirements, including precise tolerances and specialized silicon processing capabilities, indicates this opportunity targets contractors with advanced semiconductor manufacturing capabilities and cleanroom facilities.
Notice text
SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions.
SLAC has a requirement for a U.S. domestic end item source of the following:
Description of technical requirements:
Frame Type: Low-Res Single Crystal Silicon
Frame Dimensions: 7.5mm x 4.5mm (±0.2mm) or similar
Frame Thickness: 200μm (±10μm) or 300μm (±10μm) thick (200μm preferred)
Membrane Type: Single Crystal <100> Silicon
Membrane Dimensions: 0.05mm x 0.05mm (±0.01mm)
Membrane Array: 2 x 2 square, 0.1mm center-to-center pitch, centered to the frame.
Membrane Thickness: 90nm (±5nm)
Window Dimensions: Approximately 0.25mm x 0.25mm. Comprised of silicon oxynitride surrounding, above and below the membrane to keep it flat, approximately centered to the membrane.
Grating Pattern: Array of slots partially through the Silicon membrane with a nominal depth of 45nm, covering the central 35μm x 35μm area of the membrane. The grating critical dimensions will be 1.5μm (±0.3μm). Final designs will follow design files provided by SLAC and be confirmed at project kickoff. Sidewalls may not be perfectly vertical, and roughness will not be known until time of delivery. 3 of 4 membranes will be patterned with gratings on each chip, and one membrane will be plain, unpatterned.
Quantity Delivered
Prototype Silicon Membrane Grating Devices
Fabrication, Quality Control and Packaging
Quantity: 10-20 Units
The award will be made based upon Lowest Price Technically Acceptable method.
Marking of Proprietary/Confidential Information. Offerors shall properly mark and identify with a restrictive legend or information markings on pages of the proposal that contain Proprietary/confidential information.
For Offeror to be eligible for a subcontract award with the University and the U.S. Department of Energy (DOE), Offeror shall be registered with the System for Award Management (SAM). Entities may register at no cost directly at the SAM website: https://www.sam.gov.
The resulting purchase order shall be performed in accordance with SLAC National Accelerator Laboratory's Terms and Conditions for Fixed Price Commercial Supplies and Services dated August 2023.
NOTE: The following documents are attached in this solicitation.
- Buy American Act Certificate
- Terms & Conditions for Fixed Price Commercial Supplies and Services, August 2023
Please provide quoted price, delivery, technical compliance statement and certification to the attention of Marlene Curiel.
Payment Terms: Net 30 days
Files
| File | Type | Posted |
|---|---|---|
| FPSS_Terms_and_Conditions_Aug2023.pdf | ||
| BAA_Certification_08.29.2023.pdf |
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