One (1) Ultra-High Vacuum (UHV) thin metal film deposition system

This solicitation seeks proposals for one ultra-high vacuum thin metal film deposition system to support research efforts of the Army Research Laboratory located in Adelphi, Maryland. The Department of the Army Materiel Command Army Contracting Command Aberdeen Proving Ground will evaluate proposals using lowest price technically acceptable criteria. To be considered technically acceptable, an offer must meet the salient characteristics for the system, software, installation, training, and warranty support as described in the attachments. Proposals are due by the date specified in the Combination Synopsis-Solicitation for Commercial Purchases attachment.

This acquisition is set aside for small businesses under NAICS code 334516, Photographic and Photocopying Equipment Manufacturing, with an estimated value between $750,000 and $1,000,000. The place of performance is Adelphi, Maryland and proposals are due within five business days of posting. The system must be delivered by April 2023 and meet specifications including achieving base pressures below 5e-10 Torr and the ability to deposit thin metal films on semiconductor wafers up to 100mm in diameter via electron beam evaporation.