Notice of Intent to Award a Sole Source Contract

The U.S. Department of Navy, Naval Research Laboratory Contracting Division, proposes to enter into a sole source contract with SPTS Technologies Company for the procurement of a Primaxx® uEtch Hydrofluoric Acid (HF) Vapor Micro Electro Mechanical Systems (MEMS) Etch Release System. The HF Vapor MEMS Etch System is to be installed within a Class 100 clean room at NSI, etch silicon oxide and to assist in the fabrication of freely suspended MEMS and Nano Electro Mechanical Systems (NEMS) devices, and is computer controlled via menu-driven Windows 10TM-based environment software for multiple users. The system must comprise of the following components:

a. A nickel-plated aluminum vacuum chamber;

b. Vacuum chamber must hold a 4-inch wafer;

c. System must use Anhydrous HF as the etchant and alcohol as the catalyst;

d. System must have a remote enable/disable feature using only a two-wire connection to enable/disable the tool for safety;

e. System control must have touch-screen operation;

f. Vacuum Pump System;

g. Water-cooled;

h. The system should have a Passive Dry Bed Chemisorber Gas Scrubber;

i. Possess an integrated hazardous gas detection system.

The contemplated contract type will be Firm Fixed Price (FFP). This notice is NOT a request for the receipt of proposals or competitive offers.

A determination by the Government to compete, or not, will be based on the responses received, and is solely within the discretion of the Government. Information received will normally be considered only for the purpose of determining whether to conduct a competitive procurement.

The PSC is 3693 and the NAICS is 333999.

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