NIST NB686090-26-01960 Nitrogen RF Plasma Source

The National Institute of Standards and Technology intends to procure a nitrogen RF plasma source system, with a sources-sought response deadline of July 24, 2026. This is market research to determine whether at least two qualified small businesses can meet the requirement, which may trigger a small business set-aside; NIST is seeking responses from all responsible sources regardless of size. Small business size standard under NAICS 334413 is 1,250 employees.

The procurement comprises three line items: one RF plasma source compatible with a Veeco Gen 10 molecular beam epitaxy system, one 600-watt maximum RF power supply, and one autotuner unit. All equipment must be new (not used or remanufactured). The RF source must feature a 4.5" CF flange, water cooling on the RF feedthrough and coil, pyrolytic boron nitride construction, field-replaceable aperture, in-vacuum length of 12.5 inches, in-vacuum diameter of 2.09 inches or less, proven GaN growth rate of 0.2 to 2 micrometers per hour, Molly Software Control compatibility, and ultrahigh vacuum construction. The aperture design must provide high uniformity over a 76-millimeter diameter substrate at 8.75 inches source-to-substrate distance. The RF power supply must include cables and an interlock circuit to cut power on water-flow failure. The autotuner must provide RF load matching over normal operating range.

Delivery is FOB Destination to NIST Shipping & Receiving in Boulder, Colorado, with 18-week lead time after receipt of order. Payment is Net 30 days upon receipt and acceptance following successful installation and testing. Contractor must confirm shipment with the Designated Government Official and Contracting Officer prior to delivery. Equipment must ship in original manufacturer packaging with complete documentation. Minimum one-year warranty covering manufacturing defects is required, commencing upon government acceptance. NIST reserves the right to conduct performance testing and quality assurance verification within ten working days of receipt.

Capability statements limited to four pages must be submitted to Contract Specialist Matthew M. Delgado at matthew.delgado@nist.gov by July 24, 2026, including company and manufacturing names, country of origin, specification sheets demonstrating experience, typical lead time, and relevant information for specification development. No quotes will be accepted at this stage.