Interference Lithography Stage System

Lawrence Berkeley National Laboratory is conducting market research through the Department of Energy to identify sources capable of delivering an Interference Lithography Stage System for the Center for X-Ray Optics. The procurement involves a specialized dual-stage system consisting of two separate assemblies: one designed to carry standard silicon wafers and another to carry a tray of optical gratings, with the grating mount requiring offset positioning or an open frame design to allow light passage from above to the wafer below. The system must operate within a high-vacuum environment at 1E-7 Torr pressure, requiring stages built to withstand vacuum conditions with minimal particle generation and outgassing properties. Potential vendors must demonstrate capabilities and experience in delivering precision vacuum-compatible stage systems that meet the laboratory's stringent operational requirements. Interested parties must submit responses to this Request for Information by August 25, 2025, with preliminary specifications and submission instructions provided in the attached RFI documents.

This procurement does not utilize any set-aside designations, making it open to all qualified contractors regardless of size or socioeconomic status. The RFI documentation indicates the system requires two distinct stage assemblies with different axis configurations - a two-axis wafer stage and a three-axis grating stage - both requiring extremely precise stability performance in the high-vacuum operating environment. The opportunity falls under NAICS code 334516 for Analytical Laboratory Instrument Manufacturing, reflecting the specialized nature of the scientific instrumentation being procured. No incumbent contractors, specific award values, or delivery timelines are mentioned in the available documentation, as this represents the initial market research phase of the procurement process. The vacuum chamber operating pressure specification of 1E-7 Torr indicates the highly specialized technical requirements that will likely limit the pool of qualified vendors to those with extensive experience in ultra-high vacuum systems and precision positioning equipment.