BZ-2025-11.pdf

LBNL Request for Information No. BZ-2025-11 Page 1

August 15, 2025

Subject: Request for Information (RFI) Number BZ-2025-11 Response Due Date: August 25, 2025

Introduction The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to deliver an Interference Lithography Stage System.

The Center for X-Ray Optics (CXRO) is procuring a stage system for use in a new scientific instrument.

The stage system consists of two separate stage assemblies: one will carry standard size silicon wafers, the other will carry a tray of optical gratings. Light will pass through the gratings from above and reach the wafer, which will require the grating mount to be offset from the stage body or to have an open frame stage assembly.

The stage system will be enclosed in a vacuum chamber with an operating pressure of 1E-7 Torr. The stages must be built to withstand the vacuum environment with low particle generation and also have minimal outgassing when the chamber is at operating pressure.

The most critical aspect of the stage system is that the two stages are able to maintain the relative stability of their payloads to <0.5 nm RMS over 100 seconds in the X-Y directions while the stages are maintaining a static position (during the data gathering process).

The following specifications are preliminary and subject to change.

Wafer Stage The wafer stage is a two-axis (X and Y) linear stage that will carry standard size silicon wafers, ranging from 4 to 12 inches in diameter. The mount for the wafer will be designed in collaboration with the vendor and supplied by CXRO.

LBNL Request for Information No. BZ-2025-11 Page 2

Wafer Stage Key Specifications:

Specification Value X axis minimum travel 63 mm Y axis minimum travel 63 mm

Payload 600 g Encoder resolution 1 nm

Unidirectional repeatability <+-50 nm

Grating Stage The grating stage is a three-axis (X, Y, and Z) linear stage that will carry a tray of optical gratings. The tray will be designed in collaboration with the vendor and supplied by CXRO.

Grating Stage Key Specifications:

Specification Value X axis minimum travel 50 mm Y axis minimum travel 30 mm Z axis minimum travel 20 mm

Payload 250 g Encoder resolution 1 nm

Unidirectional repeatability <+-50 nm

NAICS Code and Size Standard The North American Industry Classification System (NAICS) Code for this acquisition will be 334516 (Analytical Laboratory Instrument Manufacturing). The corresponding small business size standard is 1,000 or fewer employees.

Instructions Respondents who can demonstrate a proven record of delivering stage systems of similar scope to the preliminary specifications above should email the LBNL Procurement Representative at bzatkow@lbl.gov with relevant company information. A list of similar previous jobs should be included, but contact information for previous customers is not required. Attachments or hyperlinks are both acceptable. Budgetary estimates are welcome but not necessary.

All responses must be submitted by email no later than 3:00pm Pacific on Monday August 25, 2025.

Request for Information Only This RFI is for informational and planning purposes only. This is not a request for quote or proposal. It does not constitute a solicitation and shall not be construed as a commitment by the University. Responses in any form are not offers and no subcontract will be awarded as a result of this announcement. No inquiries regarding a bid package or solicitation will be answered, because there is no bid package or solicitation yet available. Any information submitted by respondents to this RFI is strictly voluntary.

mailto:bzatkow@lbl.gov

LBNL Request for Information No. BZ-2025-11 Page 3

In order to protect the procurement integrity of any future procurement that may arise from this RFI, information regarding the technical point of contact will not be given and no appointments for presentations will be made. No funds are available to pay for preparation of responses to this announcement, and no reimbursement will be made for any costs associated with providing information in response to this RFI or any follow-up information requests related to this RFI. Responding to this RFI does not provide any advantage or disadvantage to potential offerors if LBNL chooses to issue a formal solicitation at a later date.

This Request for Information is governed by procurement policies and procedures established under the University's Prime Contract with the U.S. Government, represented by the Department of Energy, for management and operation of LBNL.

Proprietary Information Because information received in response to this RFI may be used to structure future programs and may be made available to the public, respondents must not include any information in their responses that might be considered business sensitive, proprietary, or otherwise confidential. Responses must be submitted with the understanding that their contents may be publicly disclosed and, in the event of a public disclosure, LBNL will not notify respondents or provide any opportunity to revise or redact submitted information.

Brian Zatkow LBNL Procurement Representative

(510) 495-2547 bzatkow@lbl.gov

(End of RFI document) mailto:bzatkow@lbl.gov

NAICS Code and Size Standard