Focused Ion Beam Scanning Electron Microscope (FIB-SEM) Instrument

Closed Solicitation Posted

Solicitation number
1333ND26QNB030053
Agency
Responses due
Set-aside
No set-aside

Opportunity facts

Place of performance
Gaithersburg, Maryland 20899, United States

Notice details come from SAM.gov. Updated .

About this opportunity

The National Institute of Standards and Technology (NIST) is soliciting quotations for a Focused Ion Beam/Scanning Electron Microscope (FIB-SEM) instrument system under Solicitation Number 1333ND26QNB030053. The procurement is for a complete analytical instrument capable of performing both traditional and advanced measurement workflows to support NIST's CHIPS Metrology program in semiconductor manufacturing metrology. Vendors must demonstrate compliance with detailed technical specifications including a gallium ion column with spatial resolution better than 5 nanometers, an electron column with spatial resolution better than 0.6 nanometers, multiple specialized detectors, automated systems, and comprehensive software capabilities. Award will be made on a best-value basis where non-priced factors are significantly more important than price, with additional preference given to equipment exceeding minimum specifications in ion column resolution, electron column capabilities, detector systems, and other advanced functionalities. Quotations must be submitted by February 23, 2026, at 4:30 p.m. Eastern Time to the Contract Specialist and Contracting Officer via email, with pre-quote inquiries due within four calendar days of solicitation issuance.

This is an unrestricted solicitation with no set-aside designations, using firm-fixed-price quotations for three contract line items covering the FIB-SEM system with delivery and installation, a five-year warranty, and transportation charges. No incumbent contractor or specific award value is identified in the solicitation. The system must be delivered within 32 weeks of award, with installation and training required within 12 weeks of delivery, including three days of onsite training and six days of remote training. The contractor's place of performance for manufacturing is its own facility, while installation and training will occur at NIST's Gaithersburg, Maryland campus during normal business hours (Monday-Friday, 8:30 a.m. to 5:00 p.m. Eastern Time), with the system warranted for 60 months from acceptance and payment made Net 30 following successful performance testing.

Notice text

This National Institute of Standards and Technology (NIST) has a requirement for a Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) instrument capable of performing a suite of customized measurements. See attached Solicitation#  1333ND26QNB030053, and associated Attachments 1 (SOW) and 2 (Applicable Provisions and Clauses) for full details.

Files

File Type Posted
Attachment 2 - Applicable Provisions and Clauses.docx DOCX document
Solicitation 1333ND26QNB030053 FIB-SEM.docx DOCX document
Attachment 1- Statement of Work FIB-SEM.docx DOCX document

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