Electron Beam Evaporator System
Closed Pre-Solicitation Posted
This opportunity was awarded. See the award notice from , or the latest solicitation from .
- Solicitation number
- N00173-25-RFI-JD17
- Agency
-
Office of Naval Research
Secretary of the Navy, Department of Defense
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- District of Columbia 20375, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The Naval Research Laboratory (NRL) in Washington, DC has issued a Sources Sought Notice to identify potential contractors capable of providing an Electron Beam Evaporator System for semiconductor device manufacturing applications. This sophisticated thin film deposition system must accommodate wafers up to 150 mm in diameter and meet stringent technical specifications including a 304L stainless steel process chamber, cryogenic pumping system achieving minimum base pressure of 5x10-8 Torr, an 8-pocket electron beam source, and Windows-based computer control with recipe-driven functionality. The system must support deposition of multiple metals including chromium, titanium, nickel, aluminum, gold, platinum, silver, copper, and vanadium with metal thickness uniformity of 5% or better across 150 mm wafers. Evaluation will be conducted on a lowest priced technically acceptable basis using a go/no-go methodology for technical specifications. Interested contractors must submit capability statements by June 25, 2025, responding to specific requirements for contact information, technical capabilities, commerciality details, and product descriptions within a 10-page limit.
This procurement opportunity does not utilize any set-aside designations and is classified under NAICS code 334516 for Analytical Laboratory Instrument Manufacturing. No incumbent contractors or current service providers are identified in the notice, and no budget ranges or estimated award values are disclosed at this pre-solicitation stage. The specifications require the contractor to provide on-site installation services, training for two NRL personnel, and maintain a minimum 36-month warranty period for the delivered system. Transportation constraints specify that all system components must fit through existing elevator and laboratory door dimensions at the NRL facility. The government emphasizes this is solely for market research and procurement planning purposes, with no guarantee that a formal solicitation will be released or that any contractual commitments will result from this Sources Sought Notice.
Notice text
NOTE: THIS IS NOT A SOLICITATION OR AN INDICATION THAT A CONTRACTUAL COMMITMENT WILL EXIST AS A RESULT OF THIS RFI. This Sources Sought Notice (SSN) is in support of market research and procurement planning being conducted by the Naval Research Laboratory (NRL), Washington, DC. This SSN is for informational and planning purposes only and does not guarantee that this will be competed via SAM.gov. The Government assumes NO financial responsibility for any costs incurred. A solicitation package is not available at this time.
Contracting Office Address: NRL, 4555 Overlook Avenue, SW, Washington, DC 20375
OBJECTIVE: The intent of this RFI is to gauge industry interest and search for potential sources capable of fulfilling a requirement for an Electron Beam Evaporator System in accordance with the following technical requirements. The Government is currently in the planning stages for this procurement and may continue to modify the language within the requirement as necessary. These specifications do not necessarily represent the final specifications.
The Electron Beam Evaporator System must meet the specifications listed in the attached document titled “Draft_Specifications_for_Electron_Beam_Evaporator”.
CONTRACTOR RESPONSE FORMAT: Interested parties, at a minimum, shall supply all of the below required information in a Capability Statement. (Reference RFI N00173-25-RFI-JD17 in your response)
1. CONTACT INFORMATION:
- Company Name and Address
- Point of Contact for questions/clarification
- Telephone Number and e-mail address
- UEI Number, CAGE Code
- PSC Code of the proposed solution (SEE https://psctool.us)
- Business Size/Socioeconomic Categories
2. TECHNICAL INFORMATION:
a) List of capabilities/resources relevant to the above specification list.
3. COMMERCIALITY OF PROPOSED ITEM
a) Whether item(s) offered/proposed is a commercial item and is customarily used by the general public or non-government entities for the other than Government purposes.
b) Whether the item has been sold, leased, or licensed to the general public, and if so, identify one or more such sales, leases, or licenses to document the commerciality of the item.
4. PRODUCT DESCRIPTION
a) Provide a description of how the proposed product will meet or exceed each of the specifications as it is anticipated that ultimate evaluation will be lowest priced technically acceptable and a go/no go basis.
b) Provide a product brochure and highlight the areas that meet or exceed specifications.
ADDITIONAL REQUIREMENT DETAILS:
Responses should be no more than 10 pages.
Files
| File | Type | Posted |
|---|---|---|
| Draft_Specifications_for_Electron_Beam_Evaporator.pdf |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Electron Beam Evaporator System | Award Notice | |
| Electron Beam Evaporator System | Solicitation | |
| This notice | Pre-Solicitation |
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