Electron Beam Evaporator System

The Naval Research Laboratory (NRL) through the Office of Naval Research is seeking to procure an Electron Beam Evaporator System for automated deposition of metallic thin films onto semiconductor device wafers. This sophisticated system must be capable of evaporating multiple metals including Cr, Ti, Ni, Al, Au, Pt, Ag, Cu, and V, while achieving 5% or better metal thickness uniformity on wafers up to 150 mm in diameter. The system requires a fully-automated process with recipe-driven control, Windows-based interface, and comprehensive features including a 304L stainless steel process chamber, 8-pocket electron beam source, cryogenic pumping system, and load lock for wafer transfer. The solicitation is structured as a Request for Quote under FAR Subpart 13.5 with a Firm Fixed-Price contract type, and will be awarded based on a price/technical tradeoff analysis where technical capability is the most important evaluation factor, followed by past performance and price reasonableness. The solicitation was posted on July 17, 2025, with responses due by August 15, 2025.

This procurement does not utilize any set-aside designations and no incumbent contractors are identified in the solicitation documents. The contract requires a 38-week delivery timeline after award, with the contractor responsible for on-site installation, demonstration of system specifications, and training of at least two NRL personnel. The system must include a minimum 36-month warranty, complete set of spare parts for maintenance, and user manuals in digital format. Performance will take place in Washington, DC 20375, with the critical requirement that all system components must fit through a 42" x 82" laboratory door and a freight elevator with 6' x 7' door dimensions. While specific contract values are not disclosed in the available documents, the solicitation falls under NAICS code 334516 for Analytical Laboratory Instrument Manufacturing and PSC code 6640 for Laboratory Equipment and Supplies.