Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- 1333ND26QNB030119
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 333242 Semiconductor Machinery Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Gaithersburg, Maryland 20899, United States
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology seeks procurement of two dry roughing pumps (Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent) with quotations due March 25, 2026 at 4:00 PM Eastern Time and questions due March 23, 2026. This is full and open competition with no set-aside.
Place of performance is Gaithersburg, Maryland. The pumps will support the Material Measurement Laboratory's Chemical Sciences Division CHIPS R&D Metrology program for thin film growth characterization and process data acquisition. Equipment specifications require multi-stage roots dry pumps rated for medium duty corrosive semiconductor service with an ultimate pressure of 9.75 mTorr or lower without purge. All items must be new (used or remanufactured equipment is not acceptable), shipped in original manufacturer's packaging with complete original documentation and software, and delivered FOB Destination or equivalent INCOTERM. Gray market components and experimental, prototype, or custom items are prohibited.
The NAICS code is 333242, Semiconductor Machinery Manufacturing, with a small business size standard of 1,500 employees. The PSC is 6640, Laboratory Equipment and Supplies. Award will be made to the responsible quoter whose quotation is lowest priced and technically acceptable. Evaluation requires technical acceptability be determined by whether proposed equipment meets or exceeds all minimum requirements per the Statement of Work, with price as the deciding factor among acceptable quotations. All quoters must maintain active SAM.gov registration at quotation submission and throughout contract performance. Quotations must be submitted electronically as three volumes: Technical Quotation, Price Quotation, and Terms and Conditions. Acceptance occurs at NIST's Gaithersburg location (100 Bureau Drive, Gaithersburg, MD 20899). Contact Contract Specialist Ranae Armstrong at ranae.armstrong@nist.gov or Contracting Officer Don Collie at Donald.collie@nist.gov.
Notice text
SEE ATTACHED DOCUMENTS FOR RESPONSE INSTRUCTIONS AND PERTINENT DETAILS
Files
| File | Type | Posted |
|---|---|---|
| CSS Dry Pumps 1333ND26QNB030119.docx | DOCX document | |
| Statement of Work_Final.docx | DOCX document | |
| Provisions_Clauses 1333ND26QNB030119.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent | Award Notice | |
| This notice | Solicitation |
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