Statement of Work_Final.docx

STATEMENT OF WORK

Title: Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent (Dry Roughing Pump) Lab: National Institute of Standards & Technology (NIST) Material Measurement Laboratory (MML), Chemical Sciences Division (CSD)

BACKGROUND & PURPOSE INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The Chemical Process and Nuclear Measurements Group is seeking two semiconductor-grade dry process pumps for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. This program focuses on developing digital twin technology for semiconductor manufacturing equipment. The flow systems, equipped with in situ and inline sensors, are used to acquire process data on thin film growth characterization. The dry pumps must be compatible with organometallic and metal halide precursors and process gases. The data and models generated by this project will lead to improvements in process optimization and control, ultimately resulting in cost savings for the US semiconductor industry.

SCOPE

The contractor shall deliver a quantity of two (2) pumps, Kashiyama MU100GP, Ebara ESR20N, or equivalent (Dry Roughing Pump) inclusive of warranty and FOB Destination delivery terms (or equivalent INCOTERM such as DDP).

BRAND NAME OR EQUIVALENT

This is a brand name or equivalent requirement. Brand name or equivalent is intended to be descriptive, but not restrictive and is to indicate the quality and characteristic of products that will be considered satisfactory to meet the agency’s requirement.

MINIMUM REQUIREMENTS

The Contractor shall submit a firm fixed price contract which offers a supply/system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 001:

Description: Kashiyama MU100GP, Ebara ESR20N, or equivalent (Dry Roughing Pump) Quantity: Two (2) A. Technical Specifications

1. Pump type: Multi-stage roots dry pump

2. Process type: Medium duty corrosive semiconductor service

3. Ultimate pressure (without purge): 9.75 mTorr or lower (<1 bar)

4. Minimum pumping speed: 30 CFM (51 m3/min)

5. Water cooling:

i. Compression fittings for 3/8” tube connections

ii. Water supply temperature 10 °C to 25 °C

iii. Water flow rate 1-3 gal/min

6. Inert Purging:

i. Compression fittings for 1/4” pipe

ii. Pressure and flow regulation built-in

iii. Purge flow rate 0 SLM to 10 SLM N2

7. Inlet connection: NW40 or NW50

8. Outlet connection: NW40

9. Exhaust silencer included

10. Electrical requirements: 220 VAC 50-60 Hz

11. Power consumption at ultimate pressure: <1.0 kW

12. Chemical compatibility and internal construction:

i. Rated for pumping reactive and corrosive vapors:

1. Organometallics such as TMA, DEZ, TEMAH, TDMAT, PDMAT, etc.

2. Metal chlorides such as TiCl4, MoCl5, etc.

3. Metal oxychlorides such as MoOCl4, MoO2Cl2, etc.

4. Co-reactants such as H2O, <3% H2/Ar

5. Reaction byproducts such as HCl and amines

ii. Corrosion-resistant internal construction (casing, rotors, etc.) such as Ni alloys or Ni coatings over cast iron

13. Lubricants: PFPE or similar, only for gears and bearings

14. Power cord included: 5 m long, flying leads

15. Dimensions: 32” x 16” x 18” (D x W x H) or smaller

16. Weight: <100 kg

17. Casters and adjustable legs included

18. User interface:

i. Hand-held or built-in control panel/display

ii. Full local control of pump functions including operating status display, startup, standby, shutdown, purge control, temperature control, alarm/interlock display

iii. Remote analog or digital interface for pump control, status signals, sensor readings, interlocks, EMO, and alarms/faults

19. Compliant with CE/SEMI/NRTL

DELIVERABLES

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 C/O TBD Building 221, Room A111 Gaithersburg, MD 20899

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Pump operation will be tested under inert gas flow

2. Pump ultimate pressure will be measured to match or exceed spec

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall be transferred to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 15 working days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warrant the entire system for a period of a minimum of one year after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4.

PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.