Delivery of ANT Spatial Resolution Test Patterns

The Department of Energy Office of Science, through Brookhaven National Laboratory, is soliciting quotes for the delivery of ANT Spatial Resolution Test Patterns under RFQ 466177. The procurement requires 10 units of high-quality spatial resolution test patterns fabricated using E-beam lithography to create a Tungsten layer on a 200um thick Silicon substrate, with a 10x20mm die size and smallest feature of 100nm. The test patterns will be used at NSLS-II beamlines and must be manufactured through an 11-step processing sequence including Piranha clean, Chrome adhesion, Tungsten deposition, electron beam lithography, etching steps, and final dicing and packaging. Vendors must be registered in the System for Award Management (SAM) and maintain an effective quality system compliant with ISO 9001 standards. The award will be made to the responsive and responsible offeror submitting the lowest total price that meets all technical requirements, with questions accepted until July 16, 2025 at 5 pm EST and quotes due by August 4, 2025 at 5 pm EST.

This procurement is conducted under full and open competition with no set-aside designation, using a size standard of 1,250 employees to determine small or large business classification. The contract will be a firm-fixed price arrangement with delivery required within 30 days of contract award, though the specific contract value remains to be determined. The place of performance is Upton, New York 11973, specifically at Brookhaven National Laboratory. The solicitation is managed by Brookhaven Science Associates, LLC under their prime contract with the U.S. Department of Energy, and pricing must be all-inclusive in U.S. dollars, FOB Brookhaven National Laboratory. The contract incorporates Brookhaven Science Associates' General Terms and Conditions for Commercial Items and Services, with payment terms of Net 30 days and requirements for comprehensive documentation packages and first article acceptance testing.