Combined Synopsis/Solicitation for In-Vacuum Extreme-Ultraviolet (EUV) Camera
Closed Solicitation Posted
This opportunity was awarded. See the award notice from .
- Solicitation number
- 1333ND26QNB030238
- Agency
-
National Institute of Standards and Technology
Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Gaithersburg, Maryland 20899, United States
- Points of contact
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology seeks quotations for an in-vacuum extreme-ultraviolet camera system and related equipment to support semiconductor metrology research at its Gaithersburg, Maryland campus, with quotations due June 18 at 3:00 p.m. Eastern Time. This is a full and open acquisition using simplified acquisition procedures for commercial products and services under NAICS 334516 (Analytical Laboratory Instrument Manufacturing).
The procurement comprises five mandatory line items and two optional line items: an in-vacuum four-megapixel CCD camera with minimum 2048x2048 pixel resolution, sensitivity across the 10–150 nm wavelength range with specified quantum efficiency thresholds, and dark current not exceeding 0.015 electrons per pixel per second; a liquid chiller capable of cooling to −55°C or lower; a 6-inch Conflat vacuum feedthrough with electrical and cooling connections; LabView VI SDK and Windows GUI software with image capture and camera control capabilities; an optional Python SDK (exercisable at award); and shipping and handling as firm-fixed-price line items. All equipment must be new, ultra-high vacuum rated below 10−9 Torr, cleaned and bagged for UHV service with original manufacturer packaging and documentation.
Delivery is FOB Destination to NIST Gaithersburg within 20 weeks of order receipt. Payment is 100% upon installation, acceptance, and successful completion of performance testing. The Government reserves the right to conduct performance tests including vacuum operation, image collection, and optional synchrotron-based quantum efficiency validation. Warranty minimum is one year from acceptance. Contractors must comply with cybersecurity and privacy requirements including security plans, multi-factor authentication, TLS 1.2 or better encryption, FIPS 140–2/140–3 validated encryption algorithms, vulnerability scanning, and incident response protocols. Quotations must remain valid for 90 days. Award will be on a best value basis, with technical capability weighted more heavily than price.
Notice text
The National Institute of Standards and Technology (NIST) has a requirement at its Gaithersburg, MD campus for an in-vacuum EUV camera. Please see attached Solicitation# 1333ND26QNB030238 and related attachments 1 (Statement of Work) and 2 (Applicable Provisons and Clauses) for full details.
Files
| File | Type | Posted |
|---|---|---|
| Attachment 1 Statement of Work.docx | DOCX document | |
| Attachment 2 Applicable Provisions and Clauses.docx | DOCX document | |
| Solicitation 1333ND26QNB030238.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| Award Notice: In-Vacuum Extreme-Ultraviolet (EUV) Camera | Award Notice | |
| This notice | Solicitation | |
| Camera for Vacuum- and Extreme-Ultraviolet light | Pre-Solicitation |
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