Attachment 1 Statement of Work.docx

STATEMENT OF WORK

Title: In-vacuum EUV Camera Lab: PML, 685

I. BACKGROUND INFORMATION

The National Institute of Standards and Technology’s (NIST) Sensor Science Division (SSD) within the Physical Measurement Laboratory is developing a novel facility for Extreme Ultraviolet (EUV) Scatterometry located at the Synchrotron Ultraviolet Research facility (SURF III) as part of the CHIPS mission of developing new metrology techniques for enabling the manufacture of advanced semiconductor devices. Realization of the technique will provide semiconductor manufacturers access to new techniques for evaluating printed patterns on device wafers as well as evaluating the performance of materials in the EUV and Vacuum Ultraviolet (VUV) wavelength ranges. The problem being solved by these EUV techniques is the non-destructive measurement of nanoscale patterned features in support of the American semiconductor industry.

To meet mission requirements, the SSD needs to procure a camera for vacuum- and extreme-ultraviolet (VUV and EUV) light as a component for a new experimental apparatus. This acquisition will allow the SSD to expand its measurement capabilities using VUV and EUV diffractometry in support of the CHIPS R&D Metrology Program's Grand Challenge 2 to advance metrology for future microelectronics manufacturing and project 2.07, “EUV Scatterometry.” The application of the required camera is in the accurate reconstruction of dimensional information from the nondestructive reflection and diffraction off a sample under test.

Specifically, for VUV and EUV diffractometry, the apparatus will require a four-megapixel charge-coupled device (CCD) camera that can be placed within an ultra-high vacuum chamber. In our diffractometry, the distribution of intensities among diffraction orders can be utilized to determine the dimensions of periodic structures such as semiconductor transistors.

To meet this objective there are several functional requirements upon the camera. As the EUV requires a vacuum for meaningful transmission, this necessitates in-vacuum operation of the camera sensor. Also, diffraction angles will be varied thus the camera must be able to be positioned within the vacuum chamber; a flange-founded camera will not suffice. The camera must be sensitive to VUV and EUV light in the 10 nm to 150 nm wavelength range, and quantum efficiency (QE) specifications are provided below. Other considerations include noise reduction (using cooling), the shot noise of the camera sensor, and the size of the camera sensor and its number of pixels to adequately capture these higher order diffraction patterns.

II. PURPOSE

The SSD is developing a new, NIST patented capability to perform non-destructive optical measurements of the sizes of smallest features in computer chips (its transistors) for industrial process control. The SSD is using extreme-ultraviolet (EUV) wavelengths, 10x shorter than those used by the industry today, as current optical approaches using visible and UV wavelengths cannot adequately measure future semiconductor transistors. The SSD’s CHIPS project is building this EUV instrumentation, requiring the acquisition of an in-vacuum EUV camera that will capture diffracted intensity patterns with low noise, thus reducing sources of uncertainties in these dimensional measurements.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

TECHNICAL REQUIREMENTS:

A. Vacuum requirements:

a. Components exposed to vacuum (The in-vacuum EUV camera, its cabling, its water hoses, its vacuum feedthrough) shall be compatible with an ultra-high vacuum system, defined here as having a base pressure below 10^(-9) Torr. No greases of any kind are allowed.

b. The camera shall be able to connect electrically to external electronics and power supplies through its vacuum feedthrough. The vacuum feedthrough is addressed as Line Item 0003.

B. Electronics requirements:

a. The camera shall have vacuum-compatible cabling and hoses at least 60 cm (24 inches) long (extensions OK) with connectors compatible with the vacuum feedthrough.

b. Cabling shall be provided between external electronics and the feedthrough.

c. The power supply shall accept 120 VAC, 60 Hz.

d. Cabling shall be provided between the external electronics and a NIST-provided computer (e.g., USB, ethernet, etc.) for the electronic capture of images and computerized control of the camera.

C. Software requirements:

a. LabView VI’s SDK and generic GUI (Windows) required.

b. Python SDK requested as an option, Line Item 0005.

D. Condition and packaging:

a. Camera and in-vacuum accessories must be cleaned and bagged for ultra-high-vacuum service.

Line Item 0001:

Description: In-vacuum EUV Camera Quantity: 1 A. Technical Specifications

a. The sensor of the camera will be a charged-coupled device (CCD).

b. The CCD sensor of the camera will have a minimum of 2048 pixels x 2048 pixels.

c. Captured images will show no more than 1000 pixels in the 2048 pixel by 2048 pixel array that deviate more than 6 standard deviations from the mean intensity (e.g., “white pixels,” “black pixels”, etc.)

d. The typical dark current of the camera must be no greater than 0.015 electrons per pixel per second. Dark current is rate of generation of thermal electrons at a given CCD temperature.

e. The quantum efficiency of the CCD Sensor of the Camera is known to be dependent upon the energy of the photon and minimum values per wavelength (energy) are tabulated below denoted as specifications A.e.1, A.e.2, etc. Quantum efficiency (QE) is the measure of the effectiveness of an imaging device to convert incident photons into electrons (QE = 1 is conversion of one photon to one electron).

f. Any electronics external to the vacuum chamber required for the operation of the in-vacuum camera (e.g., communications, control, power) shall be considered part of the camera and included in this line item.

g. Vendor shall also supply all required in-vacuum and atmospheric electronic cabling for operating and controlling this camera using a NIST-supplied computer and software in Line Item 0004.

h. The camera shall be in-vacuum and not flange-mounted.

Line Item 0002:

Description: Chiller Quantity: 1 A. Technical Specifications

a. A chiller shall be provided to allow the in-vacuum EUV camera to meet Line Item 0001 specification A.d for typical dark current.

b. Chiller shall provide liquid cooling at a temperature no greater than -55°C.

b. The chiller power supply shall accept 120 VAC, 60 Hz.

c. Hoses shall be provided to connect the chiller to the vacuum feedthrough Line Item 0003.

Line Item 0003:

Description: Feedthrough Quantity: 1 A. Technical Specifications

a. The feedthrough shall be a 6” Conflat (DN100CF) flange with UHV compatible feedthroughs for both

i. Electrical (data and power) connections to and from the in-vacuum camera Line Item 0001, and

ii. Liquid cooling from the chiller (Line Item 0002) to the in-vacuum camera (Line Item 0001).

Line Item 0004:

Description: Software Quantity: 1 A. Technical Specifications

a. Software shall include at minimum

i. A software development kit (SDK) for LabView VI’s, and

ii. A generic GUI for the Windows operating system

b. Software shall be installable on a NIST-furnished computer.

c. Software shall allow

i. Capture of images from the in-vacuum camera

ii. Control of settings within the in-vacuum camera (e.g., binning, frame rate, etc.)

OPTION Line Item 0005 (exercisable at time of award):

Description: Python SDK Quantity: 1 A. Technical Specifications

a. Software option shall include at minimum software development kit (SDK) for Python.

b. Software shall be installable on a NIST-furnished computer.

c. Software shall allow

i. Capture of images from the in-vacuum camera

ii. Control of settings within the in-vacuum camera (e.g., binning, frame rate, etc.)

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

C/O/ TPOC: TBD

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in FAR clause 52.212-4 that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

Performance test consists of successful operation of the camera system as placed in a NIST-owned vacuum system with image collection recorded using on a NIST-provided computer after installation by NIST Staff and Associates per supplier directions. Specification S5 may be tested using visible light. Specification S6 is to be tested in the absence of light sources within the chamber. Specification S7 is to be tested at each energy if the synchrotron is available during the inspection period.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST Technical Point of Contact (TPOC) to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 10 business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year after acceptance of the equipment and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

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