BMF HF Vapor Etcher
Cancelled Pre-Solicitation Posted
A newer special notice was posted. See the latest special notice from .
- Solicitation number
- NB680000-26-01364
- Agency
- National Institute of Standards and Technology Department of Commerce
- Responses due
- Set-aside
- No set-aside
Opportunity facts
- NAICS code
- 334516 Analytical Laboratory Instrument Manufacturing
- PSC
- 6640 Laboratory Equipment And Supplies
- Place of performance
- Boulder, Colorado 80305, United States
- Points of contact
-
- Angela Hitt angela.hitt@nist.gov (303) 497-7305
Notice details come from SAM.gov. Updated .
About this opportunity
The National Institute of Standards and Technology (NIST) is conducting market research to identify vendors capable of supplying a BMF HF Vapor Etcher system for its Boulder Micro-Fabrication Facility. This pre-solicitation notice seeks information from both large and small businesses that manufacture this specialized laboratory equipment, with particular emphasis on identifying U.S.-based manufacturers. The primary contract requirement is the procurement of one new hydrofluoric acid vapor etching unit capable of processing substrates up to 150 mm in diameter, meeting strict safety standards for HF handling, and achieving specific etch rate performance of 3-30 mm/hour with 90% typical uniformity. The system must be a tabletop unit compatible with ISO Class 5 cleanroom environments, operate on standard 120V electrical power, and include a minimum one-year warranty covering labor, parts, and equipment. Interested vendors must submit responses by May 8, 2026, and should clearly indicate the country where the BMF HF Vapor Etcher is manufactured. This market research announcement is not a formal Request for Proposals or Quotes, and the Government is not obligated to make any payments for information received or to award a contract in the future.
This procurement carries no set-aside designation at the current stage, though NIST will consider all Small Business Set-aside categories if at least two qualified small businesses are identified during the market research phase. The notice references a potential trade-in credit for the existing Idonus VPE 100 system, suggesting some awareness of current incumbent equipment, though no specific budget or award value is disclosed in this pre-solicitation notice. The required delivery timeline is approximately one year After Receipt of Order (ARO) to NIST's Boulder, Colorado facility on an F.O.B. Destination basis. Payment terms specify 100% upon successful installation, acceptance, and demonstration of technical compliance following Government performance testing and visual inspection within 30 days of receipt. The procurement requires new equipment only in original manufacturer packaging with complete documentation, explicitly excluding used, remanufactured, prototype, or gray market components. All responses must specify the manufacturing country and be submitted through the Systems for Award Management (sam.gov) upon issuance of the formal solicitation.
Notice text
THIS SOURCES SOUGHT IS NOT A REQUEST FOR QUOTATION.
It is a market research tool being used to determine potential and eligible business firms that can provide the product described herein prior todetermining the method of acquisition.
The National Institute of Standards & Technology (NIST) seeks information on vendors that can provide a BMF HF Vapor Etcher per the specifications attached herein.
This announcement is not a Request for Proposals or Quotes (RFP/RFQ) and does not commit the Government to award a contract now or in the future. The information contained in this notice is DRAFT only and, as such, is subject to change prior to the issuance of a solicitation. No solicitation is available currently. Additionally, the Government is not obligated to and will not pay for any information received from potential sources because of this Sources Sought announcement. The results of this Sources Sought will be utilized to determine if any Small Business Setaside opportunities exist. All Small Business Set-aside categories will be
considered. In addition, this market research tool is being used to identify potential and eligible firms, of all sizes, who manufacture the BMF HF Vapor Etcher in the U.S. prior to determining the method of acquisition and issuance of a solicitation. PLEASE INDICATE WHAT COUNTRY MANUFACTURES THIS PRODUCT.
After the results of this market research are obtained and analyzed, NIST may conduct a competitive or non-competitive procurement on the System for Award Management (sam.gov) and subsequently award a contract. If at least two qualified small businesses are identified during this market research stage that can fulfill the requirement, in accordance with the Specifications, then this acquisition shall be solicited as a small business set aside, however, NIST is seeking responses from ALL
responsible sources, including large and small businesses. Responses should include the country where the product is manufactured.
This requirement is assigned a NAICS code of 334516, Analytical Laboratory Instrument Manufacturing, with a small business size standard of 1,000 employees.
Interested business organizations that believe they can meet the requirements should submit electronic copies of their capability
statement. Please limit responses to four (4) pages or less. Responses should include the following information:
1. Name of the company that will provide the product(s).
2. Name of the company that will manufacture the product.
3. County of origin or manufacture of the product.
4. Spec/data sheets and examples of products that meet the
specifications that demonstrate experience in meeting the
requirements of this procurement.
5. Typical lead time to deliver the product after receipt of order
6. Any other relevant information that is not listed above that the
Government should consider in developing its minimum specifications and finalizing its market research.
(Company sales brochures or marketing packages will not be considered.)
Any proprietary information should be so marked. The written capability statement should be received by the Contracting Officer, Angela Hitt, via email at angela.hitt@nist.gov no later than the date and time posted in this notice. No quotes will be accepted at this time and will not be considered.
REQUIREMENTS OVERVIEW:
See the attached Requirements and Specifications document
Attachments
| File | Type | Posted |
|---|---|---|
| Statement of Requirements.docx | DOCX document |
Notice history
| Notice | Type | Posted |
|---|---|---|
| NOTICE OF INTENT-BMF HF Vapor Etcher | Special Notice | |
| BMF HF Vapor Etcher | Pre-Solicitation |
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