Autonomous Sputtering Tool – Main Chamber

The National Renewable Energy Laboratory (NREL), operating under the Department of Energy Office of Science, is soliciting proposals for an Autonomous Sputtering Tool - Main Chamber to support their Minerals to Materials Supply Chain Research Facility (METALLIC) and enable autonomous experimentation synthesis of nitride and oxide materials for semiconductor development. The procurement seeks a sophisticated plasma deposition chamber with stringent technical requirements including substrate temperature capability of 800°C, base pressure of 1E-7 Torr, four 3-inch confocal magnetron sputtering sources, and full automation capabilities without human intervention. Key qualifications include vacuum chamber specifications, substrate handling for 4-inch diameter substrates, robotics integration with external robotic arms, in-situ instrumentation capabilities, and open-source Python-based control software. The evaluation will utilize a Best Value Selection method with technical specifications and price considered, weighting 40% for strongly preferred technical specifications, 20% for preferred specifications, and the remaining 40% distributed across service responsiveness, demonstration capabilities, reference letters, and acceptance criteria. Technical questions were due by June 23, 2025, with proposals due July 3, 2025, at 5:00 PM Mountain Time.

This solicitation does not utilize any set-aside designations and no incumbent contractors are identified in the documentation. While specific award values or budget ranges are not disclosed, the procurement involves a single purchase order for one autonomous sputtering tool with delivery milestones requiring finalized design drawings by August 31, 2025, complete tool delivery and installation by September 30, 2026, and full operational capability by January 1, 2027. The technical specifications emphasize advanced automation features including automatic misalignment detection, transfer system positioning repeatability of 0.02 mm, and compatibility with various materials processing requirements. Performance will occur in Golden, Colorado, at NREL's facilities, supporting their autonomous semiconductor development research objectives. The tool must integrate seamlessly with NREL's existing autonomous experimentation infrastructure and demonstrate capabilities for high-precision materials synthesis operations.