Technical Specifications for Optical Interference Microscopy Mod.pdf
PDF 126 KB Posted
- Attached to
- Quantitative Phase Microscopy Optical Module
- Solicitation number
- 5-B139-Q-00567-00
- Issued by
-
Department of Energy Office of Science
About this file
The document is a detailed Technical Specification for an Optical Interference Microscopy Module, outlining precise hardware and software requirements for a specialized scientific instrument. The module is designed for high-speed, non-contact 3D surface profiling of planar samples in semiconductor and advanced material inspection, with specific performance criteria including vertical resolution better than 1.2 nm, horizontal resolution better than 1.2 µm, and a Z measurement range of ±3 µm using a 10× lens.
The specification mandates critical technical and integration parameters, including a frame rate up to 200 fps, a compact unit body under 2000g, and dimensions less than 155x90x85 mm. Software requirements are particularly stringent, demanding a comprehensive Software Development Kit (SDK) with API/DLL access, documentation for custom integration, and compatibility with Windows 11 and/or Redhat 9. The document explicitly rejects proprietary systems without developer access, emphasizing the need for open, configurable solutions that allow for custom software environment integration.
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Technical Specifications for Optical Interference
Microscopy Module Application
• In-line high-speed optical interference microscopy for surface feature detection.
• Designed for use with planar samples supported on rigid or semi-rigid substrates (e.g., wafers, glass, ceramics).
• Suitable for real-time, non-contact 3D surface profiling in semiconductor and advanced material inspection.
Hardware Specification and Requirements
• Vertical resolution:
- Better than 1.2 nm using a 10× objective lens
- Reproducibility confirmed using height-standard test charts
• Horizontal resolution:
- Better than 1.2 µm using a 10× objective lens
• Z measurement range:
- At least ±3 µm with a 10× lens
- Up to ±15 µm with lower magnification lenses
• Working distance (W.D.):
- Range: >= 3 mm for 10x lens
• Frame rate:
- Up to 200 frames per second (fps) acquisition
• Built-in light source and interferometry module
• Weight < 2000g
• Unit body + lens dimension: <155x90x85 (LxHxW mm)
Software and Integration Requirements
• A Software Development Kit (SDK) must be provided, including:
- API or DLL access for control and data extraction
- Documentation for integration into custom software environments
- Support Operating system: Windows 11 and/or Redhat 9
• Proprietary systems without development capability will not be accepted.
- Solutions limited to closed GUIs or lacking developer access are disqualified
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