Tab 04 SOW Redacted_Redacted.pdf
PDF 346 KB Posted
- Solicitation number
- 80NSSC26931764Q
About this file
This is a Statement of Work (SOW) for preventative maintenance services on a Canon 5x i-Line Stepper Photolithography system located at NASA's Goddard Space Flight Center (GSFC) in Greenbelt, Maryland. The contract period runs from September 15, 2026, through September 14, 2027.
The contractor shall provide preventative maintenance support including four quarterly preventative maintenance visits annually during standard business hours (Monday–Friday, 9 a.m.–5 p.m., excluding Canon holidays). Core service features include Field Service Engineer (FSE) support with standard labor hours for scheduled preventative maintenance visits, application support available at a discounted hourly rate (excluding optimization and methodology consulting), guaranteed call response within 4 hours with a 2-hour target, and guaranteed on-site response within 72 hours with a 48-hour target. The contractor must provide same or next-day parts shipment if orders are received by noon, maintain parts returns within 30 days, and offer quarterly spare parts usage reviews. Additional services available include application and software support, extended coverage hours (M-F after-hours, weekends day shift), and special tools with a 25% fee discount. Consumable parts including mercury and halogen lamps are included in the base contract. Parts carry a 30-day warranty when replaced by the customer and a 90-day warranty when replaced by Canon, with large units and assemblies eligible for up to 360 days extended warranty. The contractor shall provide both general and urgent service update notices. The eligible equipment for coverage is FPA-303015a Serial No. 1063105.
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| File | Type | Posted |
|---|---|---|
| Tab 07 Capability Statement.pdf |
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Text version
Stepper Lithography System Preventative Maintenance Contract
Statement of Work
PR: ______________
Background The GSFC Detector Development Laboratory (DDL) has a requirement for a maintenance contract for a Canon 5x i-Line Stepper Photolithography system (Stepper). The system is used to define submicron scale geometry structures in polymer based photoresists. The stepper aligns and exposes patterns through a reticle transferring it onto the wafer under fabrication. The exposure is completed using a step and repeat pattern where a subset of the wafer is exposed followed by a new exposure at the next position of the wafer. This patterning process is continued to cover the entire wafer. The stepper is suitable for patterning wafers of 100, 150 and 200 mm diameter and has high resolution accuracy, repeatability of feature geometry, and nanoscale registration accuracy. The stepper is an essential tool for the production of nearly all device fabrication projects in the Integrated Detector and Electronics Systems Branch Detector Development Laboratory at GSFC including the technology development and production of detectors for Cosmic Microwave Background Polarization technology, Microwave Kinetic Inductance Detectors, Far- Infrared Detectors, X-Ray Calorimeters, Large Format Magnetic Calorimeters, and Microfluidic Components, EUV and Far-IR/Sub-mm optical components, superconducting amplifiers, and MicroElectroMechanical (MEMS) devices which are important to Goddard’s strategic focus areas including Planetary Defense, National Security and Moon to Mars Missions.
Requirements and Deliverables
The requirements and deliverables of the preventive maintenance agreement is shown in the table below:
Lindsey McLellan Highlight
Lindsey McLellan Highlight
Lindsey McLellan Highlight
Government-Furnished Equipment and Government-Furnished Information none
Place of Performance
NASA Goddard Space Flight Center Greenbelt MD USA.
Period of Performance
Period of performance is September 15, 2026, to September 14, 2027.
File details come from the government source that posted it. Updated .