Statement of Work.pdf

STATEMENT OF WORK

Title: High-Field Electromagnet System for MRAM Metrology

Lab: Physical Measurement Laboratory, 686.12

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. To address R&D ecosystem gaps, NIST will conduct measurement science, or metrology, critical to the development of new materials, devices, packaging, and production methods in chip manufacturing by US manufacturers.

This acquisition is for CHIPS project GC7.05: Assured Sanitization of Ultrahigh Density Magnetic Memory and Storage Devices. MRAM is an emerging memory that is already taking the place of embedded flash at advanced technology nodes. This project requires determination of the assured erasure (sanitization) of MRAM devices. The switching field probability distributions of MRAM devices will be measured to determine field values ensuring erasure of the entire distribution of devices. These values will inform NIST in the development of field-based sanitization protocols. The field may also be used to ensure the state of the device independent of electronic interface.

II. PURPOSE

The purpose of this acquisition is to procure a high-field electromagnet system, including a bipolar power supply system, to facilitate MRAM device metrology. This type of measurement requires magnetic fields to be applied in a wafer prober, in a direction perpendicular to the wafer, to be swept from negative to positive values. NIST will employ these measurements on many devices over the course of hours and days, so repeatability and thermal stability are critical.

PLACE OF PERFORMANCE

The place of performance shall be the contractor’s place of business. Delivery of the high-field electromagnet system, including remote installation and demonstration, shall take place at NIST, located in Boulder, CO.

PERIOD OF PERFORMANCE

The period of performance is for two (2) months, to be effective on the date of award.

III. SPECIFIC REQUIREMENTS

The Contractor shall provide a High-Field Electromagnet system that meets all minimum technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: High-field electromagnet system for integration into a commercial wafer probe station.

Quantity: 1

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A. Technical Specifications:

a. Field Strength: Must be capable of producing 0.5 T fields at approximately 5 mm from the pole face.

b. Field Orientation: Capable of applying fields in the direction perpendicular to the wafer.

c. Power Supply: Must include a dedicated bipolar power supply to allow field sweeping from negative to positive values.

d. Physical Dimensions: The magnet must fit within a volume (Length x Width x

Height) of 11.5 cm x 11.5 cm x 19 cm.

e. Operational Duty: Must be capable of continuous operation at 0.5 T.

f. Cooling: The system must include provisions for cooling to support continuous

0.5 T operation. Chiller/process chilled water will be supplied by NIST.

g. Control Interfaces: The field value shall be controllable by an external analog voltage AND additionally via standard computer interface (e.g., USB, GPIB, or Ethernet).

h. Must contain a method for measuring magnet over-temperature.

B. Installation:

a. The contractor shall perform installation in accordance with Section VI.

Installation described below.

b. The Contractor shall deliver an installation manual, utility requirements, and schematics to NIST on or around delivery and before installation.

IV. SCHEDULE OF DELIVERABLES

The following table lists the deliverables that shall be completed, including a description, quantity, due date, and place of delivery. The place of delivery is associated with the Delivery terms in Section no. 5 Below. The NIST COR will review all deliverables for inspection and acceptance within the Standards of Acceptance criteria below.

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 High-field electromagnet and bipolar power supply system

No later than 6 weeks after receipt of order.

NIST Boulder, CO

2 Installation manual, utility requirements, and schematics

1 After delivery, prior to installation.

NIST Boulder, CO

3 Installation support and verification

1 Within 2 weeks after delivery

Remote support

Standards of Acceptance: The NIST Contracting Officer’s Representative (COR) shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 2 weeks of receipt of

3 | P a g e deliverable. This section applies to deliverables which must be reviewed and approved for acceptance (e.g., draft plans, drawings, etc.).

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO 80305 Attention/POC Matthew R. Pufall, M/S 686.12 Building 1, Room 1-4537

VI. INSTALLATION

Installation and verification will be performed by NIST staff. No installation is required by the contractor. The contractor must be available by phone or video conference during this period to provide support should questions arise while NIST is installing the system.

The Contractor shall schedule installation and verification for a period of time (no longer than 2 hours) to occur within 2 weeks after the high-field electromagnet system is delivered, in correspondence and mutual agreement with the COR. Verification shall include, but not limited to, the performance tests listed under Section VIII. Inspection & Acceptance below.

VII. TRAINING

No training will be required by the Contractor.

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

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1. Basic power supply function

2. Basic magnet function: energizing, cooling, interlocks

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 14 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The Contractor shall provide a commercial warranty for the entire system and provide, at minimum, a one-year warranty for all new equipment and services. The warranty shall cover all parts, labor, and travel. The warranty shall commence upon successful completion of delivery, after inspection and acceptance have been completed. The warranty shall be in accordance with the terms specified in FAR 52.212-4.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

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• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

The Contractor shall comply by providing the COR with documentation of minimally acceptable controls within 30 days of award. If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.