Statement of Work.pdf

STATEMENT OF WORK

Title: Scientific CMOS cameras for absorption tomography

Lab: MML/646

I. BACKGROUND INFORMATION

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing.

The Digital Twins for Atomic Layer Deposition Processes Project (5.05) was undertaken to develop and validate digital twin (DT) models for atomic layer deposition (ALD) processes to help facilitate efficient design and operation of these processes. One aspect of this project involves development and application of in situ optical diagnostics capable of quantifying precursor chemical concentrations in an ALD chamber, in both one and two dimensions. One optical technique that will be employed is absorption tomography. To implement this technique, Group 646.05 must procure two scientific complementary metal oxide semiconductor (CMOS) cameras to record images of molecular absorptions by precursor chemicals along two orthogonal optical axes in an ALD chamber. Since, the precursor chemicals of interest are metal chlorides and metal oxychlorides with optical absorption features in the in the ultraviolet to visible spectral region and are present at low concentrations, cameras with high quantum efficiency and low noise in the ultraviolet to visible spectral region are needed. In addition, since the flow system is dynamic, cameras capable of high frame rates and designed with a global shutter are needed.

II. PURPOSE

The purpose of this solicitation contract is to purchase two scientific CMOS cameras suitable for high-sensitivity and high-speed absorption tomographic measurements across the ultraviolet to visible spectral region for the MML/646 lab. The Contractor shall deliver a quantity of two (2) of each, inclusive of FOB Destination delivery.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.

The use of “gray market” components is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001: Scientific CMOS camera

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Description: Scientific complementary metal oxide semiconductor (CMOS) cameras suitable for high-sensitivity and high-speed absorption tomographic measurements across the ultraviolet to visible spectral region Quantity: Two (2)

A. Technical Specifications

a. Sensor type: Back-illuminated, scientific CMOS

b. Sensor size: greater than or equal to 14 mm by greater than or equal to

14 mm

c. Sensor diagonal size: greater than or equal to 11 mm

d. Pixel Format: greater than or equal to 2500 pixels by greater than or equal to 2500 pixels

e. Pixel Dimensions: less than or equal to 10 microns by less than or equal to 10 microns (square)

f. Quantum Efficiency at 200 nm (at 300 K): greater than or equal to 25 %

g. Quantum Efficiency at 300 nm (at 300 K): greater than or equal to 50 %

h. Quantum Efficiency at 400 nm (at 300 K): greater than or equal to 50 %

i. Quantum Efficiency at 500 nm (at 300 K): greater than or equal to 70 %

j. Quantum Efficiency at 600 nm (at 300 K): greater than or equal to 60 %

k. Quantum Efficiency at 700 nm (at 300 K): greater than or equal to 40 %

l. Digitization: capable of greater than or equal to 16 bits

m. Frame readout rate, full frame at 16 bits: greater than or equal to 50 frames per second

n. Frame readout rate, full frame at 12 bits: greater than or equal to 100 frames per second

o. Any accessories necessary to achieve the specified frame readout rate, for example, a frame grabber computer card and cables

p. Shutter architecture: global shutter

q. Full well capacity: greater than or equal to 7,000 electrons

r. Sensor readout noise: less than or equal to 2 electrons (root mean square)

s. Dark current at 10 degrees C: less than or equal to 0.2 electrons/pixel/second

t. Minimum operating temperature: less than or equal to -10 degrees C

u. Any accessories necessary to achieve the specified minimum operating temperature, for example, a refrigerated chiller and hoses

v. Optical mount: C-mount w.

IV. SCHEDULE OF DELIVERABLES

Deliverable

Number Description Quantity Due Date

Place of Delivery 1 Scientific CMOS camera Two (2)

No later than 12 weeks ARO

NIST (Gaithersburg)

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PLACE OF PERFORMANCE

All work shall be completed at the Contractor’s facility.

Equipment will be delivered to 100 Bureau Dr. Building 221, Gaithersburg, MD 20899

PERIOD OF PERFORMANCE

System Delivery shall be within 12 weeks ARO.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the below table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899

TPOC, 221/A320

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Performance tests involve confirming that test images can be collected with the cameras and transferred to a control computer.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or

4 | P a g e replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within ten (10) business days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of twelve (12) months in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government and at a minimum shall include parts and labor.

VIII. PAYMENT SCHEDULE

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

(Example language – Delete or revise as appropriate.)

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer.

Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards

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(e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

• System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information

(SPII).

• IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

• Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

• Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

• The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

• Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

• Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

• SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140- 2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.