Statement of Work.docx

STATEMENT OF WORK

CHIPS R&D: SEM Analytical Detector(s) including Direct Electron EBSD

MML / 643

I. BACKGROUND INFORMATION

The success of US semiconductor manufacturing relies on the ability of the industry to out innovate competitors with new technology and outperform foreign manufacturers with high-yield processing. NIST’s CHIPS Metrology program is tasked with assisting industry by creating new measurement capabilities that enable the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes. The Strain Measurement for Devices and Packages project addresses both of these goals by advancing the spatial resolution and measurement accuracy for analytical methods including High-Resolution Electron BackScatter Diffraction (HR-EBSD). To achieve the spatial resolution and low-dose operating modes needed to meet the needs of semiconductor manufacturers, new SEM analytical detector(s) including a direct electron EBSD camera are required. These detector(s) will be installed on an existing NIST-owned JEOL 7800 SEM.

II. SCOPE

The contractor is responsible for delivering and installing the new analytical detector(s) on the existing NIST owned SEM, providing training for the system, providing a hardware and software warranty, and offering extended hardware and software service contracts.

III. MINIMUM REQUIREMENTS

Line Item 0001 Description: SEM Analytical Detector System including Direct Electron EBSD Quantity: One SEM Analytical Detector System The contractor will supply a newly manufactured SEM analytical detector that meets or exceeds the following specifications:

1. Direct Electron EBSD Detector

1.1. Detector resolution of at least 512 × 512 pixels. The active area of the detector must be larger than 20 mm × 20 mm and smaller than 58 mm × 58 mm.

1.1.1. Additional value will be given to detector that are monolithic or have “gutters” less than 5 µm wide between detector tiles.

1.1.2. Additional value will be given to detectors that have more pixels up to 4096 × 4096.

1.1.3. Additional value will be given to detectors that can be used in both conventional EBSD positions on bulk samples, and Transmission Kikuchi Diffraction positions on electron transparent samples.

1.2. Energy filtering of incoming electrons to enable patterns to be formed only from electrons within a specified energy range (e.g. only electrons between 9 keV and 11 keV). This requirement can be met by energy discrimination or by intensity accumulation coupled with sparse sampling.

1.3. Sensitivity range including at least 3 kV to 30 kV

1.4. Capable of collecting, indexing, and saving full resolution patterns at rates of at least 85 patterns per second

2. Control System

2.1. Single control PC with software that controls the analytical detector(s) and performs any necessary communication with the JEOL SEM

2.2. Data collection software with the following capabilities:

2.2.1. Control of SEM scan to generate images from the analytical detectors and JEOL’s in-chamber or in-lens detectors

2.2.2. Control of all user accessible parameters of the detector(s)

2.2.3. Collection of maps and line scans including the saving of unaltered EBSD patterns at full resolution for all points

2.2.4. Additional value will be given to systems that control the SEM stage to enable acquisition of stitched fields of view

2.2.5. API interface to allow control of the direct electron EBSD detector

3. Integration with JEOL 7800 SEM

3.1. Images of the current configuration of the microscope are provided so vendors can assess port availability will be provided upon request

3.2. System must operate form 110V AC, 15 A service from a NEMA 15R (standard US plug)

4. Warranty

4.1. 1 year warrant covering the delivered hardware.

4.2. Must include software updates released during the warranty period (1 year)

5. Training covering the essential functions and any required maintenance for up to 3 NIST staff (simultaneously). Training can occur at the completion of installation but must be scheduled in coordination with the TPOC.

6. Installation of the analytical detector system to NIST’s JEOL 7800 SEM in building 217 room D115 on the Gaithersburg campus.

Line Item 0002 – OPTION 1 Description: Integrated Energy Dispersive X-ray Spectrometer (EDS) Quantity: One detector and additional software capabilities Option Execution: NIST can execute this option within one (1) year of CLIN 0001 acceptance.

Contractors are encouraged to provide an optional line item to include a fully integrated EDS system that meets the following specifications:

1. Silicon Drift based EDS detector

1.1. Silicon Drift Detector with an active area of at least 70 mm2

1.2. Capable of processing count rates of at least 700 kcps

1.3. Motorized detector insertion and retraction

2. To be considered fully integrated, the EDS line-item option must

2.1. Be controlled from the same PC and software package as the EBSD system

2.2. Offer simultaneous collection of EBSD and EDS signals

2.3. Allow phase identification using both EBSD crystallography and EDS elemental information

Line Item 0003 – OPTION 2 Description: Service Contract for SEM Analytical Detector System – Year 2 Quantity: 1 year Option Execution: NIST can execute this option within two (2) years after CLIN 0001 acceptance.

Contractor must extend all coverages offered under the included initial warranty.

Line Item 0004 – OPTION 3 Description: Service Contract for SEM Analytical Detector System – Year 3 Quantity: 1 year Option Execution: NIST can execute this option within three (3) years after CLIN 0001 acceptance.

Contractor must extend all coverages offered under the included initial warranty.

Line Item 0005 – OPTION 4 Description: Service Contract for SEM Analytical Detector System – Year 4 Quantity: 1 year Option Execution: NIST can execute this option within four (4) years after CLIN 0001 acceptance.

Contractor must extend all coverages offered under the included initial warranty.

Line Item 0006 – OPTION 5 Description: Service Contract for SEM Analytical Detector System – Year 5 Quantity: 1 year Option Execution: NIST can execute this option within five (5) years after CLIN 0001 acceptance.

Contractor must extend all coverages offered under the included initial warranty.

IV. DELIVERABLES

V. PLACE OF PERFORMANCE

All work shall be completed at the contractor’s facility. Installation of the detector system and training shall be performed at NIST, Gaithersburg, MD facility. Normal duty hours are Monday through Friday, 8:30 a.m. to 5:00 p.m. with the exception of Federal holidays.

VI. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Dr.

Gaithersburg, MD 20899

VII. INSTALLATION

The system shall be installed by the Contractor and meet contract specifications no later than 2 weeks after delivery. Installation, at a minimum, shall include uncrating/unpackaging of all equipment, rigging, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD- Building 217. When installed, the system must fully integrate with the existing SEM without impairing normal SEM operation, and coordination with JEOL’s field service engineers may be required.

VIII. TRAINING

Training covering the essential functions and any required maintenance for up to 3 NIST staff (simultaneously). Training can occur at the completion of installation but must be scheduled in coordination with the TPOC.

IX. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Basic operations testing placing the detector in the operational position, control of SEM beam and stage positioning, setting of detector acquisition parameters.

2. Collection of EBSD map while saving patterns using energy filtering. Sample will be SiGe on Si.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 1 week of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

X. WARRANTY

The contractor shall warranty the entire system for a period of a minimum of 1 year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

XI. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

XII. TRAVEL

a. The contractor shall be responsible for all travel expenses.

XIII. CONTRACTOR SUPPLIED MATERIALS

a. The contractor shall supply all parts, hardware, equipment, and labor required to perform the tasks listed.

XIV. MISCELLANEOUS INFORMATION

Safety: The Contractor employee must be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

Security: NIST is a restricted campus. An identification badge is required for access for entry into buildings and is shown to the armed Security Police when entering the campus.

Regular Business Hours. Regular business hours are Monday through Friday, 8:00 am to 5:00 pm Eastern Time, excluding Federal holidays and NIST closures.

Identification Badges: Contractor employees must comply with NIST identification and access requirements. Each Contractor employee must wear a visible identification badge provided by the NIST Security Office. The contractor shall provide personnel that pass required government background checks to be issued badges for work on site.

Vehicle Registration: All Contractor employees must register their vehicles with the NIST Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass must be displayed on the vehicle in accordance with NIST Security Office instructions.

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