Performance Work Statement (PWS) & Technical Specifications

Resistivity Measurement System Suite, 4-Point Probe

1.0 MISSION OBJECTIVE

The objective of this acquisition is to provide the Department with a comprehensive, multi-environment resistivity measurement capability. This suite will support mission-critical analysis of semiconductor materials, thin films, and conductive polymers across a full range of physical and thermal conditions.

2.0 SCOPE OF WORK

The contractor shall provide a complete ecosystem of automated resistivity test stations, a versatile range of interchangeable probe heads (SP4/HT4 series or equivalent), and NIST-traceable calibration standards. The system must allow for rapid reconfiguration to accommodate diverse sample geometries and material properties.

3.0 TECHNICAL SPECIFICATIONS

3.1 Resistivity Test Systems

The systems must support automated, high-precision data collection with the following features:

Component / Feature Minimum Specification Requirements

Autorange Must automatically determine ideal current settings based on sample resistance to prevent material damage and ensure accuracy.

Dual Configuration Must implement automated geometric error correction for probe spacing and edge proximity.

Edge Accuracy Support accurate measurements within 4x probe spacing of a sample edge with ≤ 1% accuracy.

Mounting Include quick-mount hardware to facilitate probe head swaps in < 60 seconds.

3.2 Standard Probe Head Matrix (Ambient/Low Temp)

To maximize mission versatility, the contractor shall provide a full matrix of probe heads with the following configurable options:

Spring Pressures 1. 45g (Soft films)

2. 85g (General)

3. 180g (High resistivity/Oxidized)

Tip Radii 1. 1.6 mil (Standard)

2. 5.0 mil (Thin films)

3. 10.0 mil (Ultra-thin films)

Tip Materials 1. Tungsten Carbide (Standard Lab)

2. Osmium (Production/Exotic)

Tip Spacings 0.040" (40 mil) 0.050" (50 mil) 0.0625" (62.5 mil)

3.3 High-Temperature / High-Resistance (HT) Probe Heads

For testing in environments exceeding 90°C or involving ultra-high resistance samples:

Body Material High-grade ceramic or Macor (thermal stability)

Spring Pressure Fixed at 180g to penetrate thermally induced oxide layers

Termination Triaxial (TRX) or Coaxial (BNC) configurations for low-noise measurement, OR configuration with equivalent or better noise rating, while maintaining compatibility with the system and sub-components.

3.4 High-Temperature Thermal Chuck Specifications

To support the HT4 series probe heads and enable testing of materials under thermal stress, the contractor shall provide a precision thermal chuck and integrated temperature controller meeting the following minimum specifications:

Temperature Range Ambient to +300°C (minimum) to support a wide range of semiconductor and polymer thermal testing.

Temperature Stability ± 0.5°C or better at steady state to ensure measurement repeatability.

Sample Holding Mechanism Concentric vacuum rings with independent sector control to securely hold irregular small samples as well as standard wafers up to 200mm (8-inch).

Surface Material & Plating Gold-plated, Nickel-plated, or precision-anodized surface for optimal thermal transfer, durability, and minimal surface contact resistance.

Electrical Isolation

The chuck surface must be electrically isolated to support Triaxial (TRX) low-noise, high-resistance measurements (matching the HT4 TRX wire configuration), OR configuration with equivalent or better noise rating, while maintaining compatibility with the system and sub-components.

Thermal Ramping & Cooling Must include programmable heating ramp rates and a forced-air (CDA/N2) or liquid cooling system for rapid and controlled temperature ramp-down.

Safety Features Must include hardware-based over-temperature interlocks, operator thermal shielding, and a visual high-temperature warning indicator.

3.5 NIST-Traceable Calibration Standards

The suite must include certified Resistivity Standards (RS) to ensure system accuracy:

Standard Type Wafer Size Resistivity Range

SRS3 Series 76.2 mm 0.002 to 30 Ohm.cm (multi-decade coverage)

SRS8 Series 200 mm 0.01 to 30 Ohm.cm

Certification Each wafer must include a Certificate of Calibration traceable to NIST.

4.0 Computer, Software, and Application Requirements

Computer, monitor, standard accessories, OS*, and wireless adapter

Windows operating system

*Latest OS version compatible with Dilatometer operating software

Software Fully integrated software to operate Resistivity Measurement System and perform data analysis using an auto ranging function to calculate the complex geometric correction algorithms required when probing near the edges of a given test exhibit

4.1 Data Analysis Software

The system must include a fully computerized control and Original Equipment Manufacturer (OEM) data analysis software suite. The software must be compatible with standard modern Windows OS environments.

4.2 Required Analytical Capabilities

Through flexible programming of the software and instrument, the system must be capable of automatically determining and analyzing the following material properties:

• The system must be capable of directly measuring Voltage/Current (V/I) and calculating Sheet Resistance (Ohms/Square) and Volume/Bulk Resistivity (Ohm-cm).

• Must accurately analyze a wide spectrum of materials, including highly conductive metal films, soft conductive polymers, very thin films, and high-resistivity silicon (including samples with naturally forming nonconductive oxide layers).

• The analytical software must automatically apply thickness correction factors (a) for samples where the thickness (t) is less than or equal to one-half the probe spacing (s), utilizing the standard formula: Rho = 4.53 x (t) x (V/I).

• The software must utilize advanced correction algorithms (e.g., Dual Configuration mode) to allow accurate probing near the edge of the sample (to within a proximity of 4 times the probe spacing) maintaining ≤ 1% accuracy.

• Utilizing the high-temperature probe heads (HT4) and thermal chuck, the system must be capable of measuring and logging changes in sample resistivity as a function of temperature from ambient up to +300°C.

• The system must feature "Autorange" capabilities to automatically step through current settings at the first test site until the measured voltage reaches the ideal target range, thereby preventing damage to delicate thin films and ensuring measurement accuracy.

• All analytical results, including raw V/I data, calculated resistivity, applied correction factors, and temperature logs, must be exportable to standard, non-proprietary formats such as CSV.

5.0 Installation and Training

5.1 Installation Requirements

Installation shall be conducted on-site at the government facility by a highly trained, OEM-certified Service Engineer. The installation process must adhere to ISO 9001 quality procedures (or equivalent certified quality management standards) to ensure consistency, high-quality setup, and baseline calibration.

5.2 Facility & Site Preparation Requirements

The contractor shall provide a comprehensive Site Preparation Guide within 15 days of contract award, if required. The equipment provided must be compatible with standard laboratory utility infrastructures, bounded by the following parameters:

Utility / Requirement

Maximum Allowable Specification

Electrical Power 110-120V AC, 60Hz or 208V AC, 50/60Hz (Single Phase). System must utilize standard NEMA 5-15P or equivalent laboratory receptacles.

Pneumatics / Gases If clean dry air (CDA) or Nitrogen (N2) is required for high-temperature oxidation prevention or pneumatic chuck operation, the system must accept standard laboratory supply lines (60-80 psi).

Exhaust / Venting If high-temperature testing (HT4) produces outgassing from specific samples, the vendor must specify the localized exhaust flow rate required (CFM) for safe operation.

Footprint & Weight The vendor must define the exact dimensional footprint (W x D x H) and total system weight.

5.3 Training Requirements

Upon successful installation and site acceptance testing, the Contractor shall provide a minimum of one (1) day of operator familiarization training for up to six (6) individuals. Training must cover hardware setup, safe handling of micro-machined probe heads, software recipe creation, and NIST-traceable calibration procedures. Training must include the following:

• Overview of equipment hardware and how to safely mount and dismount the SP4/HT4 probe heads using the quick-mount blocks without breaking the tungsten or osmium tips.

• How to properly load the NIST-traceable calibration wafers and execute the calibration software to ensure system accuracy.

• Basic software navigation, test programming, and data export.

• Routine user-level maintenance and safety procedures.

• User manual (digital storage device or hardcopy)

6.0 Maintenance and Lifecycle Support

6.1 Maintenance Support Plan

To ensure improved instrument performance, increased uptime, and reduced total cost of ownership, the Contractor must offer a comprehensive post-warranty support plan. This coverage shall begin at the end of the standard 1-year warranty period.

The maintenance support plan must include the following:

• Calibration or replacement of all calibration standards - DLA ships the calibration standards to contractor for calibration at no cost OR contractor schedules a certified technician to come for one (1) on-site visit to perform calibration on standards.

• Technical Support - priority telephone and email troubleshooting support

• Repair Coverage - complete corrective repair coverage, including all service, parts, accessories, technical labor, and travel costs

• Consumables - discounted pricing on standard consumable purchases for the life of the agreement

7.0 Administrative Requirements

7.1 Period of Performance

Delivery of all hardware, software, and accessories shall be completed within 90 days after the date of award. Installation and training shall be coordinated with the technical point of contact upon delivery.

7.2 Pricing

Pricing shall include all costs for shipping and delivery (FOB Destination) to the address specified below.

7.3 Notice of Delivery Contractor shall give notice to Edward Francoeur (Edward.Francoeur@dla.mil, 267-621-2096) and Mike McClain (James.McClain@dla.mil, 445-737- 1764) when the instrument is to be delivered.

7.4 Delivery Address / Marking Instructions

Attn: Edward Francoeur DLA Product Test Center 700 Robbins St., Bldg. 5-D Philadelphia, PA 19111

7.6 Invoicing All invoices must be submitted through Wide Area Workflow (WAWF). See DFARS Clause 252.232-7006 Wide Area Workflow Payment Instructions for detailed instructions. The DoDAAC for this action is SL0701.

https://www.google.com/url?q=mailto%3AEdward.Francoeur%40dla.mil https://www.google.com/url?q=mailto%3AJames.McClain%40dla.mil

8.0 Certification and Verification

8.1 The contractor shall provide instrument certification or verification of instrument performance upon completion of installation (IQ/OQ).

8.2 A NIST Traceable ANSI/NCSL Z540.1 certificate (with data) shall be provided for calibrated components or sub-components, as applicable.

9.0 Warranty A minimum one-year comprehensive warranty covering all parts, labor, travel, food, and lodging for one service technician must be included.