SOW_Plasma Cleaner - G5-174030.docx.docx

APPENDIX B – Statement of Work

Project No.

Version #

Period of Performance

Version status

Description:

This contract will obtain and install a plasma cleaner system to be performed is routine maintenance and cleaning of TEM holders and the cleaning of TEM Samples in bldg. 242 room E005 using plasma for preparation to insert holders and samples into the Spectra Ultra Iliad TEM in the neighboring labspace E009. This work calls for the purchase of a plasma cleaner with multiple gas sources (Argon, hydrogen, oxygen and mixtures) so that we can utilize plasma of different recipes for different samples and holders with specialized requirements for advanced characterization. An additional feature requirement of the tool is that it is amenable to simple assembly and operation by novice users (i.e. students).

APPENDIX B – Statement of Work

SOW for <Name of Project> Page 1 of 2

Contents

APPENDIX B – SOW for <Project Title> Page 3 of 5

Background Must interface with owner provided facilities in Bldg. 242 E005 Gas lines connecting to the plasma cleaner device should be Ar, O₂, H₂, TEM holders to be used with this equipment are Phillips/ FEI/ Thermofisher scientific dimensions. Not JEOL or Hitachi holder dimensions.

Power 100 – 200 VAC, 50 – 60 Hz, 400 W

The work goals are to study battery and quantum materials in an analytical electron microscope. To execute this work. Maintaining clean samples and a contaminant free microscope is essential. The microscope operates within a vacuum system and for the health of the detectors, vacuum pumps and the electron source all holders and samples inserted into the microscope must be as clean as possible.

Why project is being pursued Hydrocarbon contamination is detrimental to analytical electron microscopy. Contamination can build up within the atmosphere. Cleaning holders with a treatment of plasma can reduce and remove this hydrocarbon contamination. This relates directly to the use of the Spectra UltraX TEM in the neighboring lab in Bldg 242 room E009 Authority Regulatory authority: All electrical and electronic components must be certified by a Nationally Recognized Testing Laboratory (e.g., UL-listed) and comply with Argonne’s Electrical Safety Program, which enforces DOE 10 C.F.R. 851, NFPA 70E, and NEC standards for safe operation of the equipment.

Scope Under this contract, the contractor shall supply a Plasma cleaner tool to clean and maintain TEM holders and samples with minimal hydrocarbon contamination, provide a user friendly fully integrated system for the rapid training and repeatable safe and effective operation by novice users. Multiple plasma sources are needed in the system for recipe customization depending on the samples being studied.

Objectives Deliver a new fully integrated plasma cleaner for TEM holder hydrocarbon reduction and sample cleaning with hydrogen, oxygen, argon and mixed source plasmas. The tool should be user friendly to novice users (Graduate students) to operate for the cleaning of TEM holders.

Use of End Product The plasma cleaner will be used to clean TEM holders and samples with hydrogen, oxygen, argon, and mixed source plasmas. We will develop recipes to use routinely The system will also offer the option to keep holders pumped under vacuum operating as a turbo pumping station.

Tasks Contractor must supply a plasma cleaner. The plasma cleaner must fit TEM holders of the Phillips/FEI geometry. The plasma cleaner must enable multiple gas inlets for plasma sources from different and mixed gasses. Gases include: Argon, hydrogen, oxygen.

Deliverables, Timing, Location, and Documentation Deliverables Deliver a Multisource plasma cleaner that can be installed to the lab E005 for cleaning of TEM holders and samples.

Timing Delivery within 90 days after contract award.

Location Argonne, Building 242 Room E005 image1.jpeg