SOW_Final_2_9.docx

STATEMENT OF WORK

Title: IR Spectrometer System LAB: Material Measurements Laboratory, Materials Measurement Science Division, Nanomechanical Properties Group (NPG).

BACKGROUND INFORMATION

The Nanocalorimetry for Semiconductors and Semiconductor Process Metrology project is developing bespoke sensors, instrument control systems, and calibration and model verifications methods. These sensors measure the thermal properties of thin film semiconductor materials, can perform experiments at time scales applicable to the operations of semiconductor devices, and are being investigated for integration into processing tools for plasma and atomic layer deposition processes. The temperature calibration of nanocalorimeter sensors is critical and relies on the accurate emissivity of platinum thin films of nanocalorimeter sensors while an optical calibration method is used. Infrared (IR) spectrometer allows us to make measurements of emissivity of metal thin films as a function of both temperature and wavelength when the sample is placed on a temperature-controlled stage. This system will be used to measure radiance of metal surfaces including Pt (emissivity of apx 0.22 at 1550 nm) in the temperature range of 100 °C to 600 °C for the wavelengths of 3.0 µm to 5.0 µm. The IR spectrometer specified here is a portable mid IR spectrometer to be able to measure thermal radiance from a small area of metal surfaces of the silicon sensors fabricated at NIST in the temperature range of 100 °C to 600 °C for the wavelengths of 3.0 µm to 5.0 µm. The metal used here could be platinum which has a low emissivity therefore the detector sensitivity requirement is critical for the application here.

PURPOSE: Advance semiconductor manufacturing by providing reliable material properties for modeling and improved high-yield processing. This investment will assist industry by improved new measurement capabilities that foster the development of next generation devices and help manufacturers with metrology solutions that improve the yield of manufacturing processes.

SCOPE:

The Contractor shall deliver a quantity of one (1) IR Spectrometer System inclusive of FOB Destination delivery terms (or equivalent INCOTERM such as DDP), and one (1) year warranty.

BRAND NAME ONLY JUSTIFICATION

The detector sensitivity of this IR spectrometer is the key to enable quantifying the emissivity of the metal thin film surface with a low emissivity in the temperature range of 100 °C to 600 °C as a function of wavelength from 3.0 µm to 5.0 µm. The reliable temperature calibration of nanocalorimeter sensors is critical for this project. An optical calibration method is best suitable and applicable for nanocalorimetry, and it relies on the accurate emissivity measurement of metal thin films (heater) of nanocalorimeter sensors. Thus, the sensitivity of the detector must be 130k counts (ms µw).

MINIMUM REQUIREMENTS

The Contractor shall submit a firm fixed price quotation which offers a supply/system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not authorized for sale in the U.S. by the Contractor is not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001 Description: IR Spectrometer system Quantity: One (1)

A. Technical Specifications:

1. Detector Sensitivity: Sensitivity of the detector must be 130k counts/(ms µw).

2. Minimum Detectable Optical Power: An optical power of 5 pW/nm at the fiber entrance must exceed the dark noise of the spectrometer at an integration time of 100 ms.

3. Spectrometer Speed: The spectrometer must collect the full spectral range at a rate exceeding 250 Hz.

4. Spectral Range: Spectrometer must include 3.0 µm - 5.0 µm,

5. Spectrum Resolution: Resolution must be equal or better than 6 cm-1.

6. Spot size: Spot size range must be 300 µm - 500 µm

7. Optical Fiber Coupled – Spectrometer shall be optical fiber coupled and shall include the MWIR light gathering optics and optical fiber.

8. Working distance:

8.1. the working distance must be between 100 mm and 200 mm.

8.2. System must be capable of collecting light from a bare cleaved or polished fiber placed near the sample surface.

9. The software to control the instrument must

9.1. Allow control of all applicable control parameters (e.g. dwell time, resolution, etc.).

9.2. Allow collection of spectra.

9.3. Allow saving of spectral data to non-proprietary file types (e.g. text, hdf5).

9.4. Run on Window 10 or 11.

9.5. If the vendor has an application programing interface (API), it shall be included.

10. Physical:

10.1. Connections from the spectrometer to the control PC must be made via USB or ethernet.

10.2. The system mass must not exceed 10 kg.

10.3. Must operate from a NEMA 5-15R (standard US outlet – 120 V, 15 A) with no other facility requirements for compressed gases or cryogens.

DELIVERABLES

DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent INCOTERM such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

DOC/NIST

Shipping & Receiving 100 Bureau Drive, Building 301 (receiving) C/O TBD, Building 223 Room A329 Gaithersburg, MD 20899

INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Basic functions will be tested including:

a. Installing the control software on a NIST owned PC

b. Connecting the IR spectrometer system to the control PC

c. Using the spectrometer control software to position and focus on a test sensor

2. Measure the radiances from the heater of a test sensor between 100 °C and 600 °C by changing the electric current flow in the heater.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST COR to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within fourteen (14) days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

WARRANTY

The contractor shall warranty the entire system for a period of a minimum of one (1) year and shall be in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the system by the Government.

PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule in accordance with the Invoicing Clause in the contract and/or as otherwise noted in this document, upon receipt of a proper invoice.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

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