SOW.pdf

This Statement of Work (SOW) details annual performance maintenance services for a 4Wave Ion Mill used in fabrication of silicon devices at NASA-Goddard Space Flight Center. The services include comprehensive maintenance by qualified field service engineers, specifically covering cleaning of sputtered material from spare shields, refurbishment of used optics, and replacement of missing or damaged consumable parts. Key maintenance activities encompass replacing PBN assemblies, ion source grid, quartz dome, testing ion source capacitors, regenerating the cryo pump, lubricating stage assemblies, and conducting general system and spare parts reviews.

The performance will occur at NASA Goddard Space Flight Center within 12 months of award, with a detailed payment plan structured across four quote line items totaling approximately $49,990. The pricing is broken down as $4,900 for completed cleaning and parts delivery, $16,940 for spare parts, $13,200 for annual performance maintenance, and $13,194 for ion optics refurbishment and delivery back to NASA. The vendor will provide a service engineer on-site, safely transport and refurbish components, and ensure all parts are cleaned, free of machine oils, and properly conditioned for reinstallation in the tool's chamber.