SOW.docx

STATEMENT OF WORK

Title: BL-4 Vacuum Pumps and Controllers Lab: PML

I. BACKGROUND INFORMATION

Our CHIPS project will construct a new synchrotron beamline at SURF III for a dedicated radiometry and detector calibration facility. Calibrations performed here will support the power measurement needs of the semiconductor industry throughout the ecosystem of tools.

We require vacuum pumps to provide clean, ultra-high vacuum conditions at pressures of 10-10 or lower for the series of beamline chambers. In addition to the pumps, we require appropriate pump controllers and interconnect cabling. This beamline is a significant deliverable to CHIPS project, and failure to obtain these vacuum pumps will jeopardize the success of the project.

Without these vacuum pumps, the beamline will not function as required and a significant deliverable of CHIPS project will be jeopardized.

II. PURPOSE

These vacuum pumps will evacuate a synchrotron beamline to a pressure of 10-10 torr so that the extreme ultraviolet light being used in the measurements can be transmitted through the beamline to the measurement station at the end.

III. MINIMUM REQUIREMENTS

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered. The use of “gray market” components are not acceptable. All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:

Description: Gamma Vacuum P/N 200L-CV-8S-SC-110-N Brand Name or Equivalent

Quantity: 3 A. Technical Specifications

a. Pump Type: Ion pump

b. Pumping speed for N2: 200 L/s or greater

c. Starting pressure: 10-4 torr or greater

d. Ultimate Pressure: 10-11 torr or less

e. Inlet Flange Size: DN160 (8 in) ConFlat

f. Heater: Yes, 110 VAC

g. Electrical Connection: 10 kV SHV

Line Item 0002 Description: Gamma Vacuum P/N 400L-CV-8S-SC-110-N Brand Name or Equivalent

Quantity: 1 A. Technical Specifications

a. Pump Type: Ion pump

b. Pumping speed for N2: 400 L/s or greater

c. Starting pressure: 10-4 torr or greater

d. Ultimate Pressure: 10-11 torr or less

e. Inlet Flange Size: DN160 (8 in) ConFlat

f. Heater: Yes, 110 VAC

g. Electrical Connection: 10 kV SHV

Line Item 0003 Description: Gamma Vacuum P/N XW-CV-2D-SC-110-N Brand Name or Equivalent

Quantity: 1 A. Technical Specifications

a. Pump Type: Differential Ion pump

b. Pumping speed for N2: ??? L/s or greater

c. Starting pressure: 10-4 torr or greater

d. Ultimate Pressure: 10-11 torr or less

e. Inlet Flange Size: DN40 (2.75 in) ConFlat

f. Heater: Yes, 110 VAC

g. Electrical Connection: 10 kV SHV

Line Item 0004 Description: Gamma Vacuum P/N QPC-4-P-S-1-US110-S-S-N Brand Name or Equivalent

Quantity: 1 A. Technical Specifications

a. Number of sections: 4

b. Each section shall be capable of controlling any of the following Gamma Vacuum pumps Brand Name or Equivalent:

1. 200L-CV-8S-SC-110-N

2. 400L-CV-8S-SC-110-N

3. XW-CV-2D-SC-110-N

c. Electrical Connections: 10 kV SHV

d. Configurable set points for process control

e. Communications: Ethernet

f. Power Input: US 110 VAC plug

Line Item 0005 Description: Gamma Vacuum P/N MPCQ-2-P-S-1-US110-S-S-N Brand Name or Equivalent

Quantity: 1 B. Technical Specifications

a. Number of sections: 1

b. Each section shall be capable of controlling any of the following Gamma Vacuum pumps Brand Name or Equivalent:

4. 200L-CV-8S-SC-110-N

5. 400L-CV-8S-SC-110-N

6. XW-CV-2D-SC-110-N

c. Electrical Connections: 10 kV SHV

d. Configurable set points for process control

e. Communications: Ethernet

f. Power Input: US 110 VAC plug

IV. SCHEDULE OF DELIVERABLES

Place of Delivery

Standards of Acceptance: The NIST TPOC or COR shall review all the above deliverables and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 30 days of receipt of deliverable. This section applies to deliverables which must be reviewed and approved for acceptances (e.g., draft plans, drawings, etc.

PLACE OF PERFORMANCE

NIST Gaithersburg

Regular Business Hours (usually pertains if work is being performed onsite at NIST; otherwise, delete if not needed).

Regular business hours are Monday through Friday, 8:00 am to 5:00 pm, Eastern Time, excluding Federal holidays and NIST closures.

V. DELIVERY TERMS

Delivery shall be F.O.B Destination (or equivalent incoterms, such as DDP) and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery.

The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 100 Bureau Drive, Building 301 Gaithersburg, MD 20899 TBD, Bldg. 245. D-09 (SURF Loading Dock)

VI. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in the specific FAR clause that allows the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST POC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

Ownership of the equipment shall transfer to NIST upon acceptance by the Government.

The Government will test, inspect, and accept or reject the equipment within 14 days of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

VII. WARRANTY

The contractor shall provide a warranty for a period of a minimum of 1 year in accordance with terms in FAR 52.212-4. Warranty shall commence upon acceptance of the pumps and controllers by the Government.

VIII. PAYMENT SCHEDULE

Define how the contractor will be paid if more information besides what is included in the payment clause is needed. If firm-fixed-price construction, for example, it may warrant further definition.

The Contractor will be paid, in accordance with the payments clause in the contract and as otherwise noted in this document, upon receipt of a proper invoice.

1. 100% after installation and acceptance by the TPOC of fully installed system, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs in accordance with the requirements set forth in this document.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

IX. CYBERSECURITY PRIVACY REQUIREMENTS

NIST seeks a solution that provides security and privacy protection consistent with requirements defined by applicable federal laws, regulations, policies, and standards (e.g., the Federal Information Security Management Act (FISMA), OMB Circular A-130, and FIPS Publication 200). The solution provider (including subcontractors) may meet these requirements through various means, including but not limited to FedRAMP authorization, current third-party assessments (e.g., SSAE, PCI), and/or responses to NIST special publication control set SP 800-171.

Minimally Acceptable Controls

· System security plan describing physical, technical, and administrative controls implemented to protect systems and sensitive personally identifiable information (SPII).

· IT management processes to establish and manage secure configuration baselines including routine patching for all operating systems and applications.

· Access to SPII is restricted to those with a need to know. Personnel with access to SPII have background investigations performed (e.g. criminal, financial etc.), and are trained on secure handling of SPII.

· Access Controls for SPII meet or exceed industry best practices for access and identification control including, but not limited to, connectivity to servers and databases, multi-factor authentication for remote accesses for administration, secure configurations for any devices accessing the system, and strong physical security for any place where the data is accessed.

· The solution supports multifactor authentication for users and/or supports integration with customer federation services for Single-Sign capability.

· Processes for scanning on a continual basis for vulnerabilities and proper configurations for all aspects of the system, as well as processes for timely mitigation of findings.

· Auditing and Incident Response processes including customer notification of suspected or actual incidents and logging with sufficient information to perform forensics on any incident. Processes for notifying and providing appropriate mitigations, including but not limited to credit monitoring services, for subsidy applicants in the event of suspected or actual incidents.

· SPII is encrypted in transit using TLS 1.2 or better and encrypted at rest in all places the SPII is stored. All encryption algorithms and modules are FIPS 140-2/140-3 validated.

If unable to meet any of the requirements listed above, the solution provider may provide details of mitigations or alternative protections in place to ensure the appropriate handling and protection of SPII.

If the solution provider provides services to other Federal agencies, provide a general description of the security risk management approach and client point of contact.

This section is not applicable.

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