Attachments 4 through 18.pdf

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NIST - FMI - Sec. 1 Specs 110629

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UHV Deposition Chamber

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Section 1 - Main Vacuum Chamber Fabrication

Rendering of custom vacuum chamber and associated components for fabrication as described by text and with drawings included here.

Drawings List:

Sheet 1: Overview/Index Sheet 2: Main chamber (sec. 1.1) assembly parts list and ports list Sheet 3: Main Chamber Part Overview Sheet 4: Main Chamber - Tier 1-3 Port Designations Sheet 5: Main Chamber - Tier 4-6 Port Designations Sheet 6: Main Chamber - Shoulder Port Designations Sheet 7: Main Chamber - Bottom - FP1 Port Designations Sheet 8: Main Chamber - Bottom - FP2 Port Designations Sheet 9: Main Chamber - Interior Weld Tab Designations Sheet 10: Main Chamber - Mechanical Mounts + Hoists Sheet 11: Top Flange Mechanical Drawing (sec. 1.2) Sheet 12: Cryoshield Reservoir (sec. 1.3) Sheet 13: Cryoshield Top Plate - Cutouts and mounts (sec. 1.4) Sheet 14: Cryoshield Top Plate - tapped hole pattern Sheet 15: Main Chamber + Cryo-reservoir + cryo-plate Assembly

Note: .stp files for parts available upon request lroark Cross-Out

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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PARTS LIST

PART NUMBERQTYITEM

Custom Vacuum Chamber (as specified)11 Wire Seal 27 x 24 bored12 Top Flange Assembly 27WS (as specified)13 10 inch Flange NRNT74 8" CF flange NRNT35 6" CF flange bored - NRNT 326 2 3/4" large bore flange NRNT307 LN2 shroud1 (internal) (as specified)18 Shroud Plate (as specified)19

General Port List Port Flange Focal Pt Focal Length Polar Angle Azimuth. Angle. Elev. Sheet

0 27WS FP1 N/A 0 - 36 3

1 CF6 L 18 90 60 4 4

2 CF6 L 18 90 120 4 4

3 CF6 L 18 90 240 4 4

4 CF6 L 18 90 300 4 4

5 CF10 M 18 90 0 5 4

6 CF10 M 18 90 180 5 4

7 CF2.75 N 18 90 22.5 10 4

8 CF2.75 N 18 90 67.5 10 4

9 CF2.75 N 18 90 112.5 10 4

10 CF2.75 N 18 90 135 10 4

11 CF2.75 N 18 90 157.5 10 4

12 CF2.75 N 18 90 202.5 10 4

13 CF2.75 N 18 90 225 10 4

14 CF2.75 N 18 90 247.5 10 4

15 CF2.75 N 18 90 292.5 10 4

16 CF2.75 N 18 90 337.5 10 4

17 CF6 P 18 90 0 16 5

18 CF2.75 P 18 90 22.5 16 5

19 CF6 P 18 90 45 16 5

20 CF2.75 P 18 90 67.5 16 5

21 CF2.75 P 18 90 112.5 16 5

22 CF6 P 18 90 135 16 5

23 CF2.75 P 18 90 157.5 16 5

24 CF2.75 P 18 90 202.5 16 5

25 CF6 P 18 90 225 16 5

26 CF2.75 P 18 90 247.5 16 5

27 CF6 P 18 90 270 16 5

28 CF2.75 P 18 90 292.5 16 5

29 CF6 P 18 90 315 16 5

30 CF2.75 P 18 90 337.5 16 5

31 CF10 T 18 90 180 22 5

32 CF8 R 18 90 0 24 5

33 CF6 R 18 90 30 24 5

34 CF8 R 18 90 60 24 5

35 CF6 R 18 90 90 24 5

36 CF6 R 18 90 120 24 5

37 CF2.75 R 18 90 150 24 5

38 CF2.75 R 18 90 210 24 5

39 CF6 R 18 90 240 24 5

40 CF6 R 18 90 270 24 5

41 CF8 R 18 90 300 24 5

42 CF6 R 18 90 330 24 5

43 CF2.75 AA 22 45 0 N/A 6

44 CF6 Y 22 45 30 N/A 6

45 CF2.75 AA 22 45 60 N/A 6

46 CF6 Y 22 45 90 N/A 6

47 CF2.75 AA 22 45 120 N/A 6

48 CF6 Y 22 45 150 N/A 6

49 CF2.75 AA 22 45 180 N/A 6

50 CF6 Y 22 45 210 N/A 6

51 CF2.75 AA 22 45 240 N/A 6

52 CF6 Y 22 45 270 N/A 6

53 CF2.75 AA 22 45 300 N/A 6

54 CF6 Y 22 45 330 N/A 6

General Port List Port Flange Focal Pt Focal Length Polar Angle Azimuth. Angle. Elev. Sheet

55 CF10 FP1 32 180 N/A -8 7

56 CF6 FP1 30 164 260 N/A 7

57 CF6 FP1 30 152 245 N/A 7

58 CF6 FP1 30 152 272 N/A 7

59 CF6 FP1 30 164 102 7

60 CF6 FP1 30 152 88 7

61 CF6 FP1 30 152 115 7

62 CF10 N/A R11 180 120 see sheet 7 63 CF10 N/A R11 180 240 see sheet 7 64 CF10 FP2 29 170 0 see W-W 8 65 CF6 FP2 29 170 100 see W-W 8 66 CF6 FP2 29 170 260 see W-W 8 67 CF6 FP2 29 155 85 see W-W 8 68 CF6 FP2 29 155 275 see W-W 8 69 CF2.75 FP2 29 165 60 see W-W 8 70 CF2.75 FP2 29 158 60 see W-W 8 71 CF2.75 FP2 29 165 300 see W-W 8 72 CF2.75 FP2 29 158 300 see W-W 8

All ports nominal tolerance except:

One degree or better alignment: Ports 5, 6, 32, 35, 40, Two degree or better alignment: Ports 56-61 and 65-68

Chamber body and tubes: Type 316 SS Flanges: Type 304 SS

Front

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Bottom

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Right SCALE 1/20 Back

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Left

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A A

B B

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

SIZE

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PARTS LIST

PART NUMBERQTYITEM

Custom Vacuum Chamber (as specified)11 Wire Seal 27 x 24 bored12

10 inch Flange NRNT74 8" CF flange NRNT35 6" CF flange bored - NRNT 326 2 3/4" large bore flange NRNT307 LN2 shroud1 (internal) (as specified)18 Shroud Plate (as specified)19

36.00

32.00

28.00 24.00

8.00

12.00

60°

60° 32.00

4 4

4.00

10.00

16.00

Overview

22.00

5.00

Lower chamber mount bracket shown sheet #4

Main chamber hoist brackets shown sheet #4

R31.995.00

6.00

This parts list exludes ports mounted on top flange.

SCALE 1:10

SECTION L-L (@4")

SCALE 1:10

[4 x 6" CF]

SECTION M-M (@5")

SCALE 1:10

[2 x 10" CF]

SECTION N-N (@10")

SCALE 1:10

[10 x 2 3/4" CF]

A A

B B

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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L LM M

N N

60°

60°

R18.00

18.00

18.00

22.5°

45°

45°

22.5°

22.5°

R18.00

4.00

5.00

10.00

Flange @ other elevation (see M-M)

Flange @ M-M

@ L-L

@ L-L

10" CF @ M-M (partial slice)

10" CF @ M-M (partial slice) FRONT FRONT

FRONT

Mounts (partial)

Radial port designations: 4"; 5", 10" elevations

FRONT

SCALE 1:10

SECTION P-P (@ 16")

SCALE 1:10

[6 x 6" CF; 8 x 2 3/4" CF]

SECTION R-R (@ 24")

SCALE 1:10

[3 x 8" CF; 6 x 6" CF;

2 x 2 3/4" CF]

SECTION T-T

SCALE 1:10

[1 x 10" CF @ 22"]

A A

B B

SHEET 5 OF 15

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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P P

R R

T

T

22.5°

22.5°

22.5°

22.5°

22.5°

22.5°

22.5°

16.00

7 6

30°

30°

30°

30°

30°

R18.00

Flange @ other elevation (see T-T)

24.00

FRONT

18.00

R18.00

22.00

FRONT

FRONT

Radial Port Designations: 16"; 22"; 24" elevations

Top

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SECTION Y-Y

SCALE 1:15

SECTION AA-AA

SCALE 1:15

A A

B B

SHEET 6 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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Y Y

AA

AA

FRONT

30°

30°

30°

12.00

28.00

45°

22.00

12.00

22.00

45°

30°

30°

30°

This sheet - chamber "shoulder" ports:

[6 x 6" CF; 6 x 2 3/4" CF - perp. entry on shoulder]

Chamber "shoulder" port designations

Bottom

SECTION U-U

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A A

B B

SHEET 7 OF 15

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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U U

FRONT

11.0011.00

60°

15°

12°

88°

35°

15°

12°

28°

35°

Flange axis co-linear with chamber axis (points straight up in "z" direction)

Focal Point FP1 - polar angle shown azimuthal angle 16 deg - 30" flange to FP1 (mirrored flange the same)

Focal Point FP1 - polar angle shown azimuthal angle 28 deg - 30" throw (mirrored flange the same)

FP1 - chamber center manipulator axis

24.00

Chamber axis ("z" direction)

Transfer axis (appx.)

Note: Colored ports are defined on this sheet.

Red ports aim at FP1; left side is mirror of right side Green ports point on "z" direction - polar locations indicated

This sheet:

[2 x 10" CF - normal] [(1 x 10" CF + 6 x 6" CF) @ FP1]

Chamber Bottom - Pump and FP1 port designations

SECTION W-W

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A A

B B

SHEET 8 OF 15

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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W

W

FRONT

FRONT

10°

29.00

Focal Point 2 (FP2)

Front e-beam well (vertical mount)

Front e-beam well (horizontal mount)

Manipulator Axis

4 5

Turbo port

Alt. e-gun well (hor. mount)

Bottom pump port(s)

Alt. e-gun well (vert. mount)

FP2 Identification

6.00

60°

25°

15°

FP2 Location (shown for reference)

NOTE: Colored ports aimed at FP2 and are defined on this sheet Left side ports mirror right

6" CF @ FP2 - polar shown azimuthal 29" @ 10 deg

6" CF @ FP2 - polar shown azimuthal 29" @ 25 deg

10" CF @FP2 - 0 deg polar azimuthal 29" @10 deg

2 3/4" CF @FP2 - polar shown azimuthal 29" @15 deg

2 3/4" CF @FP2 - polar shown azimuthal 29" @ 22 deg

Chamber Bottom: FP2 designations

SCALE 1:15

SECTION C-C

SCALE 1:15

SECTION AB-AB

SCALE 1:15

DETAIL AC

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SECTION AD-AD

SCALE 1:15 SECTION AE-AE

SCALE 1:15

A A

B B

SHEET 9 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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C C

AB

AB

AC

AD AD AE

AE

Chamber Interior Weld Mounts

Welded mounts for internal cryoshield

FRONT 10.88

FRONT

30°

60°

60°

61°

1.50 .50

.75

Details of cryo mount and cryoshield subject to revision in consulation w/contractor.

Mount tab for source shields

Mount tab (appx. side view)

Chamber bottom mount tabs for source shields shown in correct number, but only approximate alignement and size/shape. Tabs will also be expected to include at least 2 x #8-32 tapped through holes each.

FRONT

FRONT

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Top

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DETAIL J

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SECTION K-K

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A A

B B

SHEET 10 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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J

K

K

6 chamber mounts w/ 1/2" through holes for primary chamber support

Exterior Mechanical Supports

R20.00

.50

3.50

4.25

1.50

2.00

.75

FRONT

FRONT

Hoists and mounts should be adjusted and certified by contractor for adequate mechanical strength as specificied in written specs.

48°

84°

30°

60°

30°

60°

20.00 10.00

1.50

Top

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A A

B B

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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PARTS LIST

PART NUMBERQTYITEM

Top Flange - 27WS sputter srcs11 6" CF flange bored - NRNT 72 2 3/4" large bore flange63

Top Cluster Flange (27WS base)

60°

6.00

7.00

27.07

NOTE: This is part #1 on Sheet #1

Parts list for this component only.

30°

60°

60°

60°

60°

60°

R5.50

R9.70 8°

Notes:

6CF flanges on this cluster flange require 1 degree tolerance on angular alignment

Flange location and alignments subject to small changes prior to fabrication - final alignments to be determined based on the outcome of a separate acquisition.

DETAIL AF

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A A

B B

SHEET 12 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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AF

R14.75

R11.00

R14.00

LN2 feed (x4) - to be welded to 10" molded bellows fitted w/ VCR connections to mate with LN2 feedthroughs on main chamber ports

LN2 Vent

8-32 UNC - 2B .75

4.00

3.00

FRONT

R12.50

90°

15°

30°

30°

30°

30°

30°

22.5°

45°

30°

60°

60°

Qty[12] - 1/4 x 20 stud @ 1"

1/4' x 20 stud @ 1"

.50

.50

4.00

.50 cryo-shield design

8-32 UNC - 2B .75

R15.00

.50

"Legs" to fit into cutout of weldmount shown in Section C-C (sheet 9)

Bolt studs for mounting cryo-plate - shown sheets 13-14

A A

B B

SHEET 13 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

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R14.50

R14.50 R1.50

R1.50

R14.00

15°

Hole Pattern to match stud pattern on cryo-resevoir

(see sheet 12)

3.00

Part split in two pieces to facilitate installation thru 27WS mouth

.25

1.50

2.48

Cryo-plate: for mounting on top of cryo-reservoir (sheet 12) Material: 5/16" or thicker OFHC copper

Cutout holes are to align with ports in the bottom of the main vacuum chamber for allowing effluence through - all cutouts are listed as 3" OD circles centered as indicated

Additionally, a grid pattern of #8-32 tapped holes is indicated to allow othe mounting and for installation of baffles or covers for holes not in service.

While the part is nominally specified as a single part, it is necessary to split it into two pieces to facilitate istallation on the two part cryoshield, as indicated.

Dimensions for gridded hole pattern given on sheet 14

22.5°

All effluence cutouts are 3" OD

Effluence Pattern left-right symmetric about center line

2.61 3.00 3.40

.49

.18

2.16

2.22

4.58

2.77

4.62

5.10

Cutout for LN2 line clearance on LN2 cryo-reservoir (see sheet 12)

13.52

.27 THRU

.27 THRU

A A

B B

SHEET 14 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

SIZE

B

SCALE

NIST

REV

1.39

3.00

1.00

1.00

2.00

1.00

1.00

1.00

1.00

2.00

2.00

1.00

1.00

2.00

2.00

1.00

1.00

2.00

2.00

2.00

1.00

2.00 1.00

1.00

2.00

1.00

2.00

2.00

2.00

1.00

1.00

1.00

8-32 UNC - 2B .75

#8-32 tapped hole pattern on sparse 1" grid as shown

SECTION AJ-AJ

SCALE 1/9

SECTION AK-AK

SCALE 1/9

A A

B B

SHEET 15 OF 15

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jpomeroy 6/24/2011

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NIST - FMI - Sec. 1 Specs 110629

TITLE

UHV Deposition Chamber

SIZE

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AJ AJ

AK AK

Cryoshield Assembly View

Mount tabs welded to chamber interior (sheet 9)

Cryo-reservoir "foot" welded to cryo-reservoir (sheet 12)

Double "half-moon" cryo-reservoirs

1/4-20 bolt studs welded to cryo-reservoirs feedthrough cryo-plate and fixed w/ split washer + nut

One of four inlet/outlet ports fitted w/ molded bellows and VCR connectors for attachment to cryo-feedthroughs

CF 2.75 port for LN2 feedthrough fitted w/ VCR connectors to mount