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Ferromagnetic Insulator System Assembly Views

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Section 1 - Vacuum Chamber Fabrication

Section 2 - Chamber support and table kit

Section 3 - Sample manipulator, exchange and storage

Section 4- Main chamber pumps

Section 5 - Load Lock Assembly

Section 6 - Vacuum Monitoring, etc.

Section 7 - All other parts (standard catalog items)

General Design Assembly View Rendering

(Assembly view shows all components that comp rise and form the main vacuum chamber system.

Not shown, but to be included, are all support appar atus required to operate the equipment shown, e.g. va cuum gauge controllers, deposition controllers, forepu mps, etc.)

lroark Cross-Out

Overview

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Ferromagnetic Insulator System Assembly Views

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PARTS LIST

PART NUMBERQTYITEM

Gate Valve 10" CF (E/P)11

Gate Valve - 6" CF (E/P)22

Mag-Transfer Rod 4813

Main Chamber + top flange14

Frame Base 115

6" Cf to 2 3/4" CF Zero-length26

Mount Bolts67

6 CF Glass ViewPort188

8CF Glass ViewPort29

Manip 2110

CF 10 -> CF 8 zero length reducer111

CF8 radius elbow 112

CF 8 Gate Valve113

500 L ion pump on 8 CF114

6CF 6 way cross115

LN2 shroud1 (internal)117

RGA118

CF 10 blank519

2 3/4 CF blank1420

QCM421

E/P Shutter feedthrough 4 in stroke422

CF 275 LN2 Feedthrough223

6 CF blank2124

CF 275 viewport 625

UHV Metal Right Angle Valve226

CF 275 UHV leak valve227

CF 275 UHV Ion Gauge228

CF6 to 3x CF275 cluster129

Millitorr pressure gauge130

CF6 turbo131 4 in Linear push-pull - heavy duty132 Getter or TSP panel133 Sample and Mask Magazine134

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12 13

Additional: For items like gauges and pumps - all components to make them operate should be included, e.g., controllers, power supplies, cables. QCM should have controller not monitor. Entire package (once assembled by customer) should be ready for vacuum and comprise a complete vacuum system.

NOT SHOWN TO BE INCLUDED:

-Backing Pump System for Pfeiffer TMU-1000M turbo - ~18 cfm dry pump + bellows connections, foreline shutoff (E/P type) and foreline gauging -Backing pump system (same as previous) for Load Lock turbo - 100 lpm class dry pump -Transfer Arm, Manipulator ad Load lock magazine must all be mutually compatible. A dozen sample/mask "cassettes" (transfer platters) should ultimately be included.

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Ferromagnetic Insulator System Assembly Views

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72.64

36.64

112.00

62.00

28.00

5.68

52.0050.0 52.00

Ion pump support

Support for Pfeiffer TMU-1000MPC (connected to CF10 gate valve)

Support for main magnetic transfer arm

Load Lock support

Main Chamber supports

Dimensions and notations are for Section 2 reference only.

These dimensions are not specifications but to proivde information for bidder reference.