FBO - Combined Glove Box Synopsis Solicitation 8 Jul 10.doc

This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-44 (Effective 08 July 2010 and class deviation 2009-O0009).

1352.215-72 INQUIRIES (APR 2010)

Offerors must submit all questions concerning this solicitation in writing to Marie Gilliam, Contractor, with copy to Todd Hill, Contracting Officer. Questions should be received no later than 10 calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract.

The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees.

This acquisition is 100% set-aside for small business.

In accordance with the non-manufacturer rule, the contractor shall be a small business under the applicable size standard and shall provide either its own product or that of another domestic small business manufacturing or processing concern. See FAR 19.102(f) for additional information.

All offerors shall provide a quotation for the following line items:

Contract Line Item Numbers and Descriptions:

OPTION Line Items

*System is defined in the Statement of Work, Lot = 5 Glove Boxes Note -Offerors may submit the above template or any format that addresses the above requirements and quantities.

STATEMENT OF WORK:

Introduction

The contractor shall furnish the necessary personnel, material, equipment, and services to fabricate, install, integrate and test five (5) glove boxes, including integrated equipment, and connection to two (2) existing glove boxes.

Background

NIST requires a glove box system for depositing, processing, and testing of organic photovoltaic films and devices in an anhydrous nitrogen environment. The system must consist of 7 glove boxes connected by vacuum antechambers. The vendor shall supply 5 of the glove boxes with integrated equipment, and connect them to 2 glove boxes that already exist at NIST.

In the new DEPOSITION glove box, NIST will need to spin coat films, weigh powders, and mix solutions. In the new PROCESSING glove box, NIST requires highly accurate temperature control for annealing samples on a high precision hot plate and an oven. In the new E-TEST glove box, NIST requires capabilities for testing the electrical and photovoltaic properties of devices using controlled light exposure from a solar simulator, IV curves, and impedance spectroscopy (if option is exercised). In the new OPTICAL glove box, NIST will require capabilities for measuring optical properties of films with a high performance optical microscope (if option is exercised) and a variable angle spectroscopic ellipsometer. In the new AUX box, NIST requires an existing ink jet printer be integrated inside the box.

The vendor must disconnect the 2 boxes that already exist at NIST from each other and reconnect them to the 5 new glove boxes to complete the new 7-box system as shown in the Attachment 2. One of the existing boxes is ~72 in long, with an integrated metals evaporator (METALS); it must be connected to the PROCESSING box. The other box is ~50 in long (SMALL); it must be connected to the AUX box.

Minimum Requirements

The system shall meet or exceed the technical specifications identified below. All items must be new. Used or remanufactured equipment will not be considered for award.

GENERAL SPECIFICATIONS FOR GLOVE BOXES – LINE ITEM 0001

Each glove box shall require the following:

1) An independent, programmable logic controlled circulation and purifier system able to maintain an atmosphere of less than 1 ppm of O2 and less than 1 ppm of H2O.

2) Glove box must be sufficiently sealed that with the purifier off, the O2 and H2O levels increase at a rate of less than 2 ppm/hr for single (2 glove) and double (4 glove) boxes and 3 ppm/hr for triple box (6 glove)

3) Programmable logic controller (PLC) with a touch screen interface

a) Touch screen interface shall allow access to all glove box functions including evacuation of antechamber, regeneration of purifier, purging of box, adjusting of the blower speed

b) The display shall show the current glove box O2 and H2O levels

c) The touch-screen control panel shall be mounted such that it is easily accessible and viewable while working at the box.

4) Purifier and control systems

a) O2 and H2O analyzers with sufficient resolution to continuously verify required performance.

b) The blower speed of the purifier system must be at least 30 cfm.

c) Circulation system must include a HEPA filter on both the inlet and outlet ports of the box

d) Must have a removal capacity of at least 20 L (STP) of O2 and 1300 g of H2O.

e) Purifier must be regeneratable and all functions associated with regeneration must be controlled by the PLC.

f) Automated purge ability to rapidly remove contaminants from the glove box by flushing fresh nitrogen into the box and exhausting the box atmosphere into the building exhaust.

g) Purifier/blower assembly may not extend outside of the footprint of the system (must be mounted under the box or under one of the T-antechambers).

5) The Aux box and the Deposition box shall require solvent recovery systems to protect the purifier system from halogenated solvents (such as chloroform, chlorobenzene, and di-iodooctane, 1,2 dichlorobenzene).

a) The recovery system must have a substantial removal capacity of solvent.

b) Must contain at least 2kg of activated carbon or material of similar absorbency that is easy to replace

c) Must be external to the glove box

d) Must include isolation and bypass valves for the drive train and be evacuatable

6) Antechambers

a) System shall contain both large (nominally 15” diameter) and mini (nominally 6” diameter) antechambers

i) Large antechambers shall not be longer than 36”

b) All large antechambers shall be electronically controllable by the glove box PLC and shall have automated purge and evacuation routines.

c) All antechambers shall have a slideable shelf to ease transfer of objects through the antechamber.

7) Glove box materials

a) Removable front panel of the glove box must be made of a transparent material that is nominally resistant to solvent usage (such as Lexan). It may not be made of safety glass.

b) The double box front panel must be one continuous sheet of transparent material. The triple box may be made of two panels with a seam or metal coupling between glove ports 4 and 5.

c) All other glove box walls and antechambers must be made of stainless steel.

8) Interior of the boxes

a) Each box must contain a glove port cover along with a mount on the ceiling for storing the port cover out of the way of normal operation but easy to access

b) Each box shall contain N2 blow guns (1 gun in double boxes and 2 guns in triple) with a shut-off valve inside the box within reach of the gloves.

i) All auxiliary N2 lines (including hot plate N2 supply) must have an automatic valve that is shut off by the glove box controller when the internal pressure reaches the over-pressure limit to prevent an over-pressure event caused by a leaking N2 line.

c) Each box must have a light attached to the front panel of the box (outside of the box)

9) System vacuum

a) All primary vacuum for the system (except the spin coater) will be provided by house vacuum supplied by remotely located XDS35i scroll pumps provided by NIST

b) The in-lab connection will be NW25 flanges on the service rack behind the boxes. Vendor shall provide required hoses to connect boxes to the NW25 vacuum ports.

10) Mounted flat-panel display and trackpad-integrated keyboard(8 total)

a) Designated boxes shall require a mount on the corner of the box to hold a vendor-supplied 19“ flat-panel display and trackpad-integrated keyboard

b) Flat-panel displays must match or exceed the following specs:

i) 19” diagonal (3:4 ratio, not wide-screen format)

ii) At least 1280 x 1024 resolution

iii) Integrated USB 2.0 hub

c) There shall be 8 of these in total as shown in drawing and described in detailed specifications.

11) Computers

a) Five computers must be provided by the primary vendor

i) Windows XP Professional operating system

ii) Windows Office software

iii) Hard drive with at least 500 GB of capacity

iv) Intel I5 Dual Core 670 or equivalent microprocessor

v) 4 GB of Memory

b) One computer (inkjet printer controller) is existing

c) All computers shall be located in NIST-provided electronics racks above the relevant glove box.

The series of glove boxes shall be arranged as shown in the attached drawings in Attachment 2. Boxes shall be chamber locked as shown to allow transfer of samples between boxes through the antechambers while avoiding any oxygen or water exposure. Two existing MBraun glove boxes shall be integrated into the total glove box system.

DETAILED SPECIFICATIONS FOR LINE ITEM 0001

1) Deposition Box (6 port, triple box)

a) 6-port, triple box meeting the specifications described in the “general specifications for glove box” section with the following properties:

i) Nominal box dimensions of 105” to 120” wide by 30” to 32” deep by 35” to 37” high. Box floor shall be approximately 39” off ground

ii) Solvent recovery / removal system to protect purifier from halogenated solvents as described in general specifications.

iii) N2 blow guns (two in total) shall be installed on the back wall between the glove ports 2 and 3 and glove ports 4 and 5 so that one blow gun can be accessed by either the left or middle person and the other can be accessed by either the middle or right person. See Attachment 2.

iv) The back wall shall consist of 3 rows of shelves going the full length of the box

v) Four-outlet 120 V receptacles shall be on the back wall adjacent to each of the three glove stations.

vi) In-deck spin coater integrated into floor of box located as shown in Attachment 2 (see spin coater specs)

vii) High precision balance with non-radioactive static eliminator system (see balance and static eliminator specs)

viii) Heater shaker for mixing solutions (see heater shaker specs)

ix) All gloves on the Deposition box shall be halogenated-solvent resistant, viton-lined gloves

x) Computer (one of the five provided by contractor described in general specifications).

xi) 19” monitor/keyboard described in general specifications on adjustable arm mounted on the right corner of the Deposition Box

b) Spin coater specs

i) Spin coater shall be mounted flush with the bottom of the floor of the box as shown in Attachment 2

ii) Spin coater shall be multi-step programmable with capability of at least 8 steps per program and 10 programs stored in memory

iii) Spin rates of 100 rpm to 9,000 rpm or greater

iv) Adjustable acceleration rate of 100 rpm/s to 10,000 rpm/s or greater

v) Shall include vacuum chucks for small samples (10 mm square), 1” wafers, 4” wafers, and 6” wafers.

(1) The vacuum chucks and o-rings shall be resistant to halogenated solvents.

vi) Contractor shall supply an auxiliary diaphragm pump for spin coater vacuum

c) Balance specs

i) The balance shall operate in an anhydrous environment and be able to be transferred through the large antechamber

ii) Shall be accurate to within 0.1 mg with a measurement range of 0 g to at least 50 g with a sample size of at least 1 inch

iii) The balance shall include a draft shield with a side loading capability

iv) Shall include calibration standard and a current calibration certificate

v) The balance shall be integrated with the static eliminator

vi) The balance shall be mounted on a vibration damping pad

d) Static eliminator specs

i) The box shall include a static eliminator designed for use while weighing powders with the balance.

ii) The static eliminator may not contain any radioactive isotopes (e.g. Polonium 210)

e) Heater shaker (Anthill TS150-2 or equivalent) which meets or exceeds the following salient characteristics:

i) The heater shaker shall operate in an anhydrous environment

ii) Shall have variable rotary agitation from approximately 100 rpm to at least 600 rpm.

iii) Shall have a maximum temperature of at least 140°C.

iv) Shall heat at least two removable heater (reaction) blocks (nominally 3.5” by 5”).

v) Shall include two heater (reaction) blocks (nominally 3.5”x5”) that are nominally 1” high that can hold vials of ~15 mm outer diameter. Shall hold 24 vials in 4x6 pattern.

vi) Shall include one heater (reaction) block that is nominally 1.7” high and can hold vials of 29 mm outer diameter. Shall hold 6 vials in 2x3 pattern.

vii) Shall include timer and LCD readout for easy visibility and control.

viii) Remote connection for controlling heater with computer and for data logging

f) Feedthrough specs

i) Feedthrough for heater shaker control cable

g) Connections to neighboring boxes

i) T-style large antechamber that is controllable by the glove box controller and allow automated cycling of N2 refill and evacuation to connect the Deposition Box to the Processing Box

ii) Manually evacuatable mini antechamber on the left side of the Deposition box

iii) No antechambers shall be present on the right side of the Deposition Box

2) Processing Box (4 port, double box)

a) 4-port, double box meeting the specifications described in the “general specifications for glove box” section with the following properties:

i) Nominal box dimensions of 70” to 74” wide by 30” to 32” deep by 35” to 37” high. Box floor shall be approximately 39” off ground

ii) N2 blow gun shall be installed on the back wall between the glove ports 2 and 3. See Attachment 2.

iii) The back wall shall consist of 3 rows of shelves going the full length of the box

iv) Four-outlet 120 V receptacle shall be on the back wall and accessible from the right side glove station

v) Oven mounted inside of glove box (see drawing and oven specs) on the left side of the box

vi) One high-temperature uniformity hot plate with integrated vacuum chuck (see hot plate specs) on right side of box

vii) Computer (one of the five provided by contractor described in general specifications).

viii) 19” monitor/keyboard described in general specifications on adjustable arm mounted on the right corner of the Processing Box

b) Oven specs

i) Maximum temperature of at least 300 C with at least 0.5 C temperature resolution

ii) Temperature rise time of at least 20 C/min

iii) Programmable with multi-step annealing cycles

iv) Shall be able to operate in both N2 and vacuum environments

v) Internal dimensions of 9” to 11” wide by 9” to 11” deep by 5” to 7” tall

vi) Shall include one tray

vii) Oven shall not impede the access to either the large antechamber to the Metals Box or the back transfer antechamber to the E-Test Box

c) Hot plate specs (Brewer Science CEE-1300 or equivalent), 2 in total

i) One hot plate shall be in the Processing box and the second in the Metals box

ii) Electronically controlled by a programmable logic controller (PLC) with temperature resolution of 0.1 C and uniformity of less than 1% across working surface

iii) Maximum temperature of at least 300 C

iv) Heating surface dimensions of greater than 6” x 6”

v) Programmable multistep annealing cycles

(1) Storage of greater than 20 programs

(2) At least 3 steps per program

(3) Programs can be uploaded or downloaded from an external computer

vi) Integrated vacuum chuck with 3 different vacuum hole patterns. The patterns shall be electronically selectable and shall allow the attachment of either one small sample (0.5” x 0.5”), an array of 4 small samples (0.5” x 0.5”), or one large sample (8” wafer)

vii) Shall operate on a 120 VAC electrical connection

d) Feedthroughs

i) Feedthrough for hot plate computer cable

ii) Vacuum feedthrough for hot plate with shut-off valve inside box that can be reached with the gloves

iii) N2 feedthrough for hot plate with adjustable pressure regulator on back outside of glove box and shut-off valve inside the box that can be reached with the gloves

iv) Vacuum for oven

e) Connections to neighboring boxes

i) Connection to the existing T-style MBraun Large Antechamber of the existing MBraun Metals Box (this antechamber is controlled by the MBraun PLC on the Metals Box)

ii) Connection to Processing box previously described

iii) Manually evacuatable mini antechambers on both the right side and the left side of the Processing box.

iv) Pass-through Antechamber to connect the back of the Processing Box to the back of the E-Test box.

(1) Antechamber shall be about 8” in diameter

(2) Antechamber shall be evacuatable and boxes shall be isolatable

(3) Antechamber shall be 42” to 45” long

(4) Method shall be applied (conveyor, sliding tray, etc…) to easily transfer samples between the boxes

3) E-Test Box (4 port, double box)

a) 4-port, double box meeting the specifications described in the “general specifications for glove box” section with the following properties:

i) Nominal box dimensions of 70” to 74” wide by 30” to 32” deep by 35” to 37” high. Box floor shall be approximately 39” off ground

ii) N2 blow gun shall be installed on the back wall between the glove ports 2 and 3. See Attachment 2.

iii) The back wall shall consist of 3 rows of shelves going the full length of the box

iv) Four-outlet 120 V receptacles (two) shall be on the back wall with each receptacle being on a separate circuit. One outlet shall be accessible from each glove station

v) UV-grade fused silica window in floor of the box (6” diameter viewable) with protective cover (as shown in drawing).

vi) Solar simulator mounted on floor underneath the box on adjustable table (see solar simulator specs) for controlled light exposure of photovoltaic devices through the fused silica window

vii) Dual channel source/measure units (SMUs) (see dual channel specs) for high throughput characterization of large sets of photovoltaic devices.

viii) Electronics shall be mounted on NIST-provided electronics rack above the glove box unless otherwise noted.

ix) Two 19” Monitors/keyboards as described in general requirements section on adjustable arms, one mounted on the right corner and the other on the left corner of the E-Test Box

b) E-test side (Left side)

i) Computer (one of the five provided by vendor described in general specs) located on electronics rack (provided by NIST) to control E-test electronics.

ii) Feedthrough specs for E-test side

(1) Easily modifiable panel for feedthroughs must be mounted on the box behind the test apparatus and be accessible from the inside of the box with the gloves

(2) 4 Triax female to female feedthroughs and 8 BNC female to female feedthroughs

(a) The grounds of the BNC and triax feedthroughs must be isolated from the glove box and each other, but must be continuous through the feedthrough

(3) Vacuum feedthrough with shut-off valve inside of box

(4) 25-pin RS-232 male to male feedthrough with shield isolated from ground of glove box

(5) Two thermally isolated KF50 vacuum line feedthroughs that are capped on inside and outside of box

c) PV-Test side (right side)

i) 6” viewable UV-grade fused silica window in bottom of box with protective cover (see Attachment 2). Fused silica window shall have a transmittance greater than 90% from 200 nm to 1200 nm. Window must be thick enough so that it shall not break during normal operation.

ii) Computer (one of the five provided by vendor described in general specs) to control PV-test electronics.

iii) Solar simulator specs (Oriel 91192 or equivalent)

(1) Solar simulator must be mounted directly underneath the quartz window on an adjustable-height base

(2) Solar simulator must be a 1000 W ozone-free Xe light with a collimated 4”x4” illuminated area with 5% or better uniformity in intensity

(3) The light source must be oriented with its window up

(4) The light source must include filters to match the output with AM1.5 conditions

(5) The solar simulator must include neutral density filters to adjust the intensity of the output.

iv) Two Dual channel source/measure unit specs (Keithley 2602A or equivalent)

(1) Dual channel source/measure unit (SMU) for synchronously measuring and sourcing two independent channels

(2) Dual channel units must be able to synchronize triggers with other dual channel unit.

(3) Each SMU must be able to source at least 40 V and 2 A (maximum power of 40 W)

(4) Each SMU must be able to measure current, voltage, or resistance at a measurement speed of greater than 5,000 measurements/second

(5) SMU must have a voltage resolution of greater than 200 microvolts and a current resolution greater than 100 picoamps

(6) Input impedance must be greater than 10 gigaohms when measuring voltage

(7) Unit must be computer controllable and come with LabView drivers

v) Feedthrough specs for PV-test side

(1) Easily modifiable panel for feedthroughs must be mounted on the box behind the test apparatus and be accessible with the gloves

(2) Two 50-pin D-sub (female on the outside, male on the inside)

(3) 4 Triax female to female feedthroughs and 8 BNC female to female feedthroughs

(a) The grounds of the BNC and triax feedthroughs must be isolated from the glove box and each other, but must be continuous through the feedthrough

(4) USB feedthrough for spectrometer

(5) Type K thermocouple feedthrough

d) Connections to neighboring boxes

i) T-style large antechamber that is controllable by the glove box controller and allow automated cycling of N2 refill and evacuation to connect the E-test Box to Optical Box

ii) Manually evacuatable mini antechambers on the right side of the E-test box

iii) Pass-through chamber to Processing Box described previously

4) Optical Box (4 port, double box)

a) 4-port, double box meeting the specifications described in the “general specifications for glove box” section with the following properties:

i) Nominal box dimensions of 90” to 100” wide by 38” to 45” deep by 35” to 37” high. Box floor shall be approximately 39” off ground. NOTE that box is deeper and wider than other boxes.

ii) N2 blow gun shall be installed on the back wall between the glove ports 2 and 3. See attachment 2.

iii) Shelves accessible from the glove ports, but out of the way of instrument operation

iv) Four-outlet 120 V receptacles (two) shall be on the back wall with one on each side

v) 19” Monitors/keyboards described in general requirements section on adjustable arms shall be mounted on both the right and the left corners of the Optical Box.

b) Feedthrough specs

i) USB and Ethernet feedthrough

ii) Firewire feedthrough

iii) Two 9-pin RS-232 feedthroughs

c) Connections to neighboring boxes

i) Manually evacuatable mini antechambers on the left side of the Optical Box

ii) Previously described connection to the E-Test box

5) Aux Box (2 port, single box)

a) 2-port, single box meeting the specifications described in the “general specifications for glove box” section with the following properties:

i) Nominal box dimensions of 45” to 50” wide by 30” to 32” deep by 35” to 37” high. Box floor shall be approximately 39” off ground

ii) Solvent recovery / removal system to protect purifier from halogenated solvents as described in general specifications.

iii) N2 blow gun shall be installed on the back. See Attachment 2.

iv) All gloves on the Aux box must be halogenated solvent resistant, viton-lined gloves

v) The back wall shall consist of 3 rows of shelves going the full length of the box.

(1) Shelves should be such that they are above the printer

vi) Four-outlet 120 V receptacle shall be on the back wall

vii) Existing Dimatix printer shall be integrated into box

(1) Printer is 27” wide by 23” deep by 16” tall

viii) Printer needs to be mounted on a vibration isolation pad sufficient for printer to properly operate

ix) Printer weighs ~100 lbs

b) The Dimatix printer has an existing control computer, but requires a 19” monitor and keyboard on a swinging arm attached to the left corner of the box.

c) Feedthrough specs

i) USB feedthrough for printer

ii) S-Video feedthrough for printer camera

iii) Vacuum feedthrough for printer

d) Connections to neighboring boxes

i) T-style large antechamber that is controllable by the glove box controller and allow automated cycling of N2 refill and evacuation to connect the Aux Box to existing MBraun single Box (Small)

ii) Manually evacuatable mini antechambers on both the left side of the existing Mbraun Small Box and the right side of the Aux Box

Modifications to existing boxes

6) MBraun single box (Small)

a) Connect the KF25 vacuum line to the main vacuum line feedthrough to the pumps in the attic

b) Relocate the existing purifier, blower, and controller assembly to underneath the large T-style antechamber or underneath the box.

c) If necessary, replace the left side panel of the box to connect to the large T-style antechamber of the AUX box.

d) Remove the mini-antechamber from the right side of the box and cover the hole.

e) Install a mini antechamber on the left side of the box.

f) Computer (one of the five provided by contractor described in general specifications).

g) 19” monitor/keyboard described in general specifications on adjustable arm mounted on the left corner of the MBraun single box Box

7) MBraun double box (Metals)

a) Connect the KF25 vacuum line to the main vacuum line feedthrough to the pumps in the attic

b) Integration of hot plate identical to the one installed in the Processing box

c) Feedthroughs

i) Ethernet feedthrough for hot plate

ii) Vacuum feedthrough for hot plate with shut-off valve on inside of box

iii) N2 feedthrough for hot plate with adjustable pressure regulator on back outside of glove box and shut-off valve on inside of box.

LINE ITEM 0002

1) Spectroscopic Ellipsometer specs (JA Woollam, Inc M-2000 or equivalent)

a) Ellipsometer shall be located in the Optical Glovebox [4) of line item 0001] as shown in attachment 2

b) A fully automated, real-time spectroscopic ellipsometer for the following applications:

i) ex-situ studies of multi-layer polymer/dielectric films on metal and semiconducting substrates

ii) in-situ (controlled temperature and or ambient) studies of multilayer films.

c) Mechanical Design:

i) Mechanical construction of instrument must be compatible with limited outgassing and operation in a dry, high static electricity environment. Control electronics, etc. must be compatible with remote (outside of box) location. Physical dimensions of Instrument must fit in the interior of the glove box. The Optics glove box must be sized such that there is at least 2” between the glove box wall and the ellipsometer on all sides. Instrument must not exceed 55” in lateral width.

d) Optical Design:

i) Instrument must be capable of measuring the absolute sign of the ellipsometric parameter Delta=Arg[rp/rs], determining sample depolarization and determining the off-diagonal elements of the Jones matrix of anisotropic samples.

e) Wavelength coverage:

i) spectral coverage of 210 nm to 1650 nm minimum

ii) minimum of 512 data points over the total spectral range

iii) resolution (full width at half-maximum) of 6 nm or better

f) Performance:

(1) Instrument must be capable of obtaining a spectrum with a minimum of 512 spectral points in ~0.1 sec.

(2) For 1 sec spectrum acquisition time

(a) Precision:

Psi=ArcTan[Abs[rp/rs]] no worse than 0.2 degree over 90% of the spectral range

(b) Delta: no worse than 0.3 degree over 90% of the spectral range

(3) Performance shall improve by ~1/(time for acquisition times between 1 sec and 60 sec. For ‘long’ acquisition times (~2 min), precision :

(a) Psi better than 0.015 degree over at least 90% of the spectral range

(b) Delta better than 0.015 degree over at least 90% of the spectral range

g) Opto-mechanical

i) System shall provide both a collimated beam of size <5 mm diam (90% power ) with divergence less than 0.3 degree and a focused beam of size of <0.13 mm diam over the entire frequency range (measured perpendicular to the propagation direction).

ii) System shall provide a digital image of the sample to allow identification of the area illuminated by the focused spot. Digital storage of the image shall be provided.

iii) System shall accommodate samples of at least 150 mm dia and 15 mm thickness, mounted horizontally.

iv) System shall provide a fully automated adjustable angle-of-incidence with a minimum range of 45 degrees to 70 degrees with 0.01 degree precision and 0.03 degree accuracy (unfocused) and 0.01 degree precision and 0.05 degree accuracy (focused, effective average angular subtense)..

v) System shall provide full automated sample alignment (tilt and height)

vi) System shall allow full automation of sample mapping over a 100 mm x 100 mm area at 0.025 mm step resolution. Optional re-alignment at each point and multiple angle acquisition at each point is to be supported. (Note this is to allow unattended multiple angle data on multiple ‘chips’ on a single platen.)

vii) Vendor shall provide a removable sample heater stage capable of operating between room temperature and a minimum of 200C. Heater shall support samples of at least 50 mm diameter and 7 mm thickness. Heater must be transferrable through the large antechambers (~15”)

viii) Vendor shall provide an ‘in-situ’ cell constructed of inert materials capable of providing controlled atmosphere studies (N2, O2, H2O, O3). Cell shall support samples of 25 mm x 25 mm and 7 mm thickness at an angle of incidence near 70 degrees. In-situ cell must be transferrable through the large antechambers (~15”)

ix) Vendor shall provide a stage for automated rotation of the sample about the sample normal for studies of biaxial films. System shall allow for manual alignment of the sample normal to the axis of rotation and of the axis of rotation to the optical plane. Stage shall provide for complete 360 degree range of motion. Minimum precision and accuracy of azimuthal angle 0.1 degree. Rotation stage shall be compatible with auto height, multiple angle, mapping, and small spot modes. Stage (if removable) must be transferrable through the large antechambers (~15”).

h) Software:

i) System shall be delivered with a minimum of two fully functional copies of the analysis software, in addition to the data acquisition software for instrument control

ii) Acquisition software shall

(1) Provide all necessary automated calibration routines

(2) Support kinetic mode acquisition of a minimum of 1000 sequential spectra at an acquisition speeds of ~0.1 s/spectra to 120 s/spectra

(3) Support mapping mode acquisition of a programmed grid of spots with automated re-alignment at each spot

(4) Support multi-sample, multi-angle automated acquisition of an arbitrary set of at least 100 locations on the platen with automated sample alignment (tip, tilt, and height).

(5) Support variable temperature mode with automated control of the sample temperature with a full multi sample mode routine executed at each temperature point in a multiple ramp, soak series.

(6) Support anisotropic sample mode with automated control of sample phi and angle of incidence for full characterization of samples with in-plane anisotropy

iii) Provide for user-friendly modeling of multi-layer thin films systems with the following features

(1) number of layers determined only by hardware limitations

(2) both isotropic and anisotropic (uniaxial and biaxial) media

(3) both Mueller matrix and Jones matrix determinations

(4) both effective medium and depolarization models for roughness

(5) Parameterized dispersions including: Cauchy, Sellmeir, Lorentz, Drude, Tauc-Lorentz

(6) Causal (Kramers-Kronig consistent) “arbitrary” functions, either numerically KK consistent pt-by-pt or spline.

iv) Provide regression analysis of principle model parameters to experimental data

(1) regression analysis shall properly account for statistical uncertainties in the data

(2) regression analysis shall report statistical properties of the regression parameters including:

(3) estimated variance of regression parameters

(4) cross-correlation matrix

(5) software shall allow Monte Carlo or other resampling schemes for validation of model robustness

v) Allow for flexible combination of data types and samples in combined analysis. I.e. capable of multisample analysis in both variable thickness and variable substrate forms.

vi) Software updates shall be provided at no charge for a minimum of one year. Updates to correct software errors shall be provided at no charge for 5 years.

i) Computer

i) Windows XP Professional operating system

ii) Hard drive with at least 500 GB of capacity

iii) Intel I5 Dual Core 670 or equivalent microprocessor

iv) 4 GB of Memory

v) Computer will be located on the electronics rack above the Optical glove box

j) Installation and integration of ellipsometer in glove box with assistance of an authorized/certified agent of the ellipsometer manufacturer

i) Shall include all required feedthroughs for Optical glove box to externally control the ellipsometer [see 4) of line item 0001 detailed specifications above]

ii) Shall include vibration isolation pad

OPTION LINE ITEM 0003

1) Dielectric/Impedance Spectrometer specs

a) Dielectric/Impedance Spectrometer and electrochemical test interface shall be located on the electronics rack above the E-test glove box (rack will be provided by NIST) [see 3) of line item 0001 detailed specifications above] as shown in attachment 2

b) Dielectric, Conductivity, Impedance and Gain Phase Analyzer (Novocontrol Alpha AN with Options B and F or equivalent) and Impedance test interface with 4 wire input terminals (Novocontrol ZG4 or equivalent)

i) Must perform measurements over a frequency range of at least 3 microHertz (µHz) to 20 megaHertz (MHz) with an error of +/- 100 ppm; without changing any electrical connections

ii) Measurement of tan (delta) down to 3x10^-5; and a capacitance measurement range of 1 fF to 1 F

iii) The impedance test interface shall be located inside the glove box

c) Electrochemical test interface (Novocontrol Pot/Gal 30/2 or equivalent)

i) Output +/-30V, +/- 2A,

ii) When combined with the analyzer [see 1)b) above] is capable of potentiostat, galvanostat, or direct voltage operation modes

iii) Counter Electrode Polarization Voltage and Current of +/- 30 V and +/- 2 A dc and ac with resolutions of 1 mV (dc) and 20 µV (ac) and 0.1 pA

d) Data collection and analysis software (Novocontrol WinIMP, WinCHEM, WinFIT + WinPLOT or equivalent)

i) Must perform dielectric, conductivity, impedance and gain phase spectroscopies when combined with the analyzer [see 1)b) above] and impedence test interface [see 1)b) above]; and voltammetry, amperometry, electrochemical impedance spectroscopies when combined with the analyzer [see 1)b) above] and electrochemical test interface [see 1)c) above]

ii) Must be capable of control of frequency, ac voltage, dc-bias and time in any multi dimensional arrangement.

iii) The software must plot collected data to display multiple data sets in a single graph, 3D diagrams, Bode and Cole-Cole plots, and can curve fit equivalent circuit modeling with data transformations including fits to Williams-Landel-Ferry equation, Havriliak-Negami equation, and generalized functions, subtraction of dc conductivity, and conversion of frequency domain data to time domain data

e) Connection head with standard sample cell for low conductivity materials (Novocontrol BDS1200 + BDS 1230 or equivalent)

i) Must come with gold-plated electrodes approximately 30 to 40 mm in area and temperature sensor, Tmax = 400 °C, plus free standing shielding unit for ambient measurements, usable over a temperature range of -150°C to 400°C and capable of performing three terminal parallel plate dielectric spectroscopy measurements

f) Cylindrical liquid dielectric test cell for low viscosity liquids (Novocontrol BDS 1307 or equivalent)

i) Must be compatible with the connection head with sample cell [see 1)e) above] for a three terminal measurement between the parallel plate electrodes with the only additional connection being for the guard electrode

g) Teflon sample cell for impedance measurements of liquids of medium conductivity (Novocontrol BDS 1308 or equivalent)

i) Must be compatible with the connection head with sample cell [see 1)e) above] for a two terminal measurement between the parallel plate electrodes without requiring any additional connections or wires

h) Shall include all required feedthroughs for E-test glove box to connect the dielectric/impedance spectrometer to the impedance test interface [see 3) of line item 0001 detailed specifications above]

OPTION LINE ITEM 0004

1) High performance optical microscope specs (Zeiss Axioimager Z2M or equivalent) (Line Item Option 0004)

a) Microscope shall be located in the Optical Glovebox [4) of line item 0001] as shown in attachment 2

b) Fully automated, high performance, upright optical microscope for both reflectance and transmission modes

c) Must be less than 30” deep, 20” wide, and 30” tall and function properly in an anhydrous environment

d) Must be remotely controllable

e) Must include touch-screen flat-panel display for local control of microscope

f) Must have automated, motorized xyz stage and controller

i) Stage must have at least 3” by 3” range

ii) Stage must have positional resolution of at least 0.1 micrometer and reproducibility of better than 1 micrometer

iii) Stage must include both metal and glass inserts

iv) Must include joystick for controlling stage

g) Optics

i) Rotatable polarizers and analyzer for both transmission and reflectance modes

ii) Automated objective nose piece capable of holding at least 6 objectives with the following infinity-corrected objectives:

(1) 1.25x, Numerical Aperture >= 0.03, working distance greater than or equal to 4 mm, brightfield

(2) 5x, Numerical Aperture >= 0.1, working distance greater than or equal to 12 mm, brightfield and darkfield

(3) 10x, Numerical Aperture >= 0.2, working distance greater than or equal to 8 mm, brightfield and darkfield

(4) 20x, Numerical Aperture >= 0.2, working distance greater than or equal to 10 mm, brightfield and darkfield

(5) 50x, Numerical Aperture >= 0.5, working distance greater than or equal to 8 mm, brightfield and darkfield

(6) 100x, Numerical Aperture >= 0.75, working distance greater than or equal 4 mm, brightfield and darkfield

iii) Automatic component recognition of optical components

iv) Multi-slot motorized reflector turret with following reflector modules

(1) Brightfield

(2) Darkfield

(3) Differential interference contrast

v) Multi-slot motorized turret with following modulator prisms

(1) Required DIC prisms

vi) 2x motorized filter wheel

(1) Neutral density filter set

vii) White LED light sources for both reflective and transmissive paths

h) CCD Camera

i) Controllable by firewire cable

ii) At least 5 MP with 36 bit RGB color depth

iii) Sensor size of at least 2/3 inch

iv) Integration time of 1 ms to at least 30 s

v) Live image high quality frame rate of at least 3 frames/s

i) Software

i) Must include full control of all microscope functions, including autofocus, image stitching, z-plane stacking, extended focus, time lapse imaging, and script writing ability

ii) Must be able to control existing Linkam LTS-350 hot stage

iii) Image analysis must include particle counting, size, and shape analysis

j) Imaging computer specifications

i) Intel Xeon quad core processor or equivalent

ii) 4 GB DDRII memory

iii) SATA-II on-board controller (> 3 gigabits/s data transfer)

iv) At least 160 GB SATA-II hard-drive (7200 rpm) for operating system

v) Two SATA-II hard-drives (7200 rpm) with at least 250 GB capacity in Raid-0 configuration

vi) Multilayer DVD +/- RW writer

vii) Firewire card

viii) ATI Fire GL V5600 512 Meg PCI-Express video card or equivalent

ix) Windows XP Professional operating system

x) Computer will be located on the electronics rack above the Optical glove box

k) Vibration isolation plate for mounting microscope inside glove box

l) Installation and integration of microscope in glove box with assistance of authorized/certified agent of manufacturer of the microscope

i) Shall include all required feedthroughs for Optical glove box to externally control the microscope [see 4) of line item 0001 detailed specifications above]

REPORTING REQUIREMENTS UNDER THE RECOVERY ACT

Recovery Act reports are a required deliverable in accordance with FAR 52.204-11. Failure to submit timely and complete Recovery Act reports will be considered failure to comply with a contract term or condition.

Site Preparation NIST will renovate the laboratory site for installation of the instrument prior to instrument delivery and installation by the contractor. The contractor shall provide a complete list of facilitization requirements within 5-days of contract award.

The Contractor may be required to coordinate with a contractor performing the laboratory renovations. This coordination may include, but is not limited to participating in meetings in person or via conference call and providing information regarding electrical supply and cooling water requirements.

Installation

The system shall be installed by the Contractor and meet contract specifications no later than 45 days after components are in place in Room A330/332. Installation, at a minimum, shall include uncrating/un-packaging of all equipment, set-up and hook-up of the system, demonstration of all specifications, and removal of trash. Onsite installation and demonstration shall be done at NIST, Gaithersburg, MD – Building 224.

Training The contractor shall conduct one (1) training session for up to five (5) users at NIST. This training is for operation of the glove box, not the third party pieces inside. The training shall provide a thorough demonstration of all system/solution functions, maintenance (glove changing, purifier regeneration, changing of purifier catalyst and solvent recovery system media), data administration, and basic troubleshooting. The training may be completed at NIST immediately after installation/set-up and on-site measurements demonstrating that no damage or misalignment issues arose during transportation and installation, but shall be completed no later than 30 days after installation.

The following training shall be provided by by authorized/certified agents of the manufacturer for the required items:

1) Spectroscopic Ellipsometer

i) Hands-on training for up to 8 NIST staff on the principle capabilities of the ellipsometer. Training shall include, at minimum:

(1) Alignment of a single sample (thermal oxide film on Si) and automated acquisition of multiple angles of incidence. Development of a multi-layer isotropic model for fitting the resultant data

(2) Alignment of multiple samples (minimum three: polymer film on native oxide on Si, on thermal oxide on silicion, and on fused silica) and automated acquisition of multiple spots at multiple angles of incidence on the multiple samples. Development of a multi-layer, uniaxial model for fitting the resultant multi-sample data

(3) Installation and alignment of the heater stage (if necessary). Repeat of (2) with the additional of a programmed temperature series

(4) Installation and alignment/calibration of the liquid in-situ cell, alignment of a signal sample, automated acquisition of a kinetic series of adsorption vs time (alkane thiol adsorption on a Au substrate)

(5) Installation and alignment of the sample azimuth stage (if necessary) automated acquisition of multiple azimuths and multiple angles of incidence on an biaxial polymer film. Development of a multi-layer, biaxial model for fitting the resultant data.

(6) All routine maintenance (lamp changes), alignment and calibration procedures

2) Optical microscope (If Line Item Option 0004 is exercised)

i) General operation of required microscope functions and modes

(1) Transmission, reflectance, bright-field, dark-field, polarized, and differential interference contrast modes

ii) Software

(1) Remote operation of microscope

(2) Autofocus, image stitching, z-plane stacking, extended focus, time-lapse imaging, and script writing ability

(3) Control of existing Linkam hot stage

(4) Image analysis including particle counting, size, and shape analysis Express Warranty The contractor shall warrant all new parts installed and the integration for a period of at least one year. The warranty must include unlimited telephone/e-mail support for questions regarding operation. All costs including parts, labor, travel, and other expenses necessary to repair the system will be borne solely by the contractor at no additional cost to the U.S. Government.

Inspection and Acceptance Criteria In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. Such tests and evaluations, if performed, shall be conducted within the environment that the system is to be operated. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests

Glove Box

1. Each box must maintain an atmosphere of less than 1 ppm of H2O and O2 for an hour.

2. With the purifiers shut-off, the instrument must be able to maintain the atmosphere at less than 10 ppm of O2 and H20 for an hour

Ellipsometer

1. On a sample of thin oxide on Si, verify 1 second and long time (~ 1 min) performance of psi and del

2. On same sample, verify mapping and auto alignment and auto angle performance by acquiring a 5x5 grid of spectra covering 80 mm x 80 mm at 3 angles of incidence. Auto alignment to be verified by less than 0.01 degree variation in the fit angle of incidence for the 25 spots.

Delivery

Delivery shall be FOB DESTINATION and shall take place not later than five (5) months after contract award. The size of this equipment requires a rigging contractor to utilize a crane to lift the equipment to the third floor and through a removed window. The window gap is 52”W by 85” H. The contractor shall notify the Government 30 days prior to delivery in order to provide sufficient time to coordinate with rigging contractor. Delivery shall take place no earlier than and no later than date coordinated with the rigging contractor.

PROVISIONS AND CLAUSES:

The following provisions and clauses apply to this acquisition and are hereby incorporated by reference. All FAR clauses may be viewed at http://acquisition.gov/comp/far/index.html.

Those marked with an asterisk are provided in full text in Attachment 1.

Provisions *52.212-1 Instructions to Offerors-Commercial Items

*52.212-3 Offeror Representations and Certifications-Commercial Items 52.217-5 Evaluation of Options

Offerors shall complete annual representations and certifications on-line at http://orca.bpn.gov in accordance with FAR 52.212-3 Offerors Representations and Certifications - Commercial Items. If paragraph (j) of the provision is applicable, a written submission is required.

Clauses

*52.212-4 Contract Terms and Conditions—Commercial Items

*52.212-5 II

Contract Terms and Conditions Required to Implement Statutes or Executive Orders—Commercial Items (MAY 2009)--ALTERNATE II (MAY 2009)—Commercial Items including subparagraphs 52.203-6 Restrictions on Subcontractor Sales to the Government *52.203-15 Whistleblower Protections under the American Recovery and Reinvestment Act of 2009

*52.204-11 American Recovery and Reinvestment Act--Reporting Requirements

52.211-6 Brand Name or Equal

52.219-6 Notice of Total Small Business Set-Aside 52.219-8 Utilization of Small Business Concerns 52.219-14 Limitations on Subcontracting

52.219-28 Post Award Small Business Program Representation

52.222-3 Convict Labor 52.222-19 Child Labor – Cooperation with Authorities and Remedies 52.222-21 Prohibition of Segregated Facilities 52-222-26 Equal Opportunity 52.222-35 Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era and Other Eligible Veterans

52.222-36 Affirmative Action for Workers with Disabilities;

52.222-37 Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era and Other Eligible Veterans

52.225-1 Buy American Act – Supplies

52.225-13 Restriction on Certain Foreign Purchases 52.232-30 Installment Payments for Commercial Items

52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration *52.237-2 Protection of Government Buildings, Equipment, and Vegetation *52.247-34 F.O.B. Destination *1352.201-70 Contracting Officer’s Authority *1352.201-72 Contracting Officer’s Representative (COR) *1352.209-73 Compliance with the Laws *1352.237-71 Security Processing Requirements Low Risk Contracts *1352.271-83 Government Review, Comment, Acceptance, and Approval

INSTRUCTIONS:

Central Contractor Registration

In accordance with FAR 52.204-7, the awardee must be registered in the Central Contractor Registration (www.ccr.gov) prior to award. Refusal to register shall forfeit award.

Due Date for Quotations

Offerors shall submit their quotations so that NIST receives them not later than 12:00 p.m. Eastern Time on 28 July 2010. FAX quotations shall not be accepted. E-mail quotations shall be accepted at todd.hill@nist.gov with copy to marie.gilliam@nist.gov. Offeror’s quotations shall not be deemed received by the Government until the quotation is entered into the e-mail address inbox set forth above.

Quotations shall be sent to the National Institute of Standards and Technology, Acquisition Management Division, Attn: Todd Hill, Contracting Officer with copy to Marie Gilliam, Contractor Support, 100 Bureau Drive, Stop 1640, Gaithersburg, MD 20899-1640. All offerors should ensure the RFQ number is visible on the outermost packaging.

Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 48 hour (excluding weekends and holidays) prior notice shall be provided to Todd Hill, Contracting Officer, on (301) 975-6984 with copy to Marie Gilliam, Contractor Support, on (301) 975-6753.

Addendum to FAR…