SATPC0042198 TAB 07 SOW PRINTED.pdf
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- Solicitation number
- 80NSSC26940698Q
About this file
This is a Statement of Work for annual performance maintenance and refurbishment services for a NASA-operated Ion Mill located at NASA Goddard Space Flight Center. The Ion Mill is a high-precision silicon device fabrication tool used in the Code 553 Detector Development Lab that requires qualified field service engineer maintenance on a regular basis. The vendor must provide comprehensive performance maintenance services covering a one-year period from the date of award, including on-site technician support of 4 days plus one travel day to perform standard annual maintenance tasks such as replacing the PBN assembly, ion source grid, and quartz dome; testing ion source capacitors; replacing chamber and stage shielding; inspecting and cleaning vacuum valves; regenerating the cryo pump; servicing the stage components including rotary water seal and water filter cartridge replacement; and lubricating stage drive assemblies. Additionally, the vendor must clean all spare shields and consumable parts to remove sputtered material, machine oils, and grease without causing material erosion or damage from excessive chemical etching or bead blasting.
The vendor is also responsible for safely transporting ion optics (grids, plasma bridge neutralizer, and RF chamber ceramic dome) back to their facility during the scheduled maintenance visit, performing refurbishment work, and shipping the refurbished parts back to NASA Goddard. The contract emphasizes that all parts must be returned in proper working condition free from contamination, as a previous cleaning service had damaged parts through over-etching and residual machine oils that compromised high vacuum performance. Performance of all services must be completed within 9 months from the date of award at NASA Goddard Space Flight Center.
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STATEMENT OF WORK
1. Objective/Requirements NASA-GSFC owns and operates a Ion Mill. This is a high precision tool used in fabrication of silicon devices that are processed in the Code 553 Detector Development Lab. These systems require maintenance by qualified field service engineers on a regular basis. NASA Shared Services Center has a requirement for providing annual performance maintenance on this equipment. Additionally, the ion optics needs to be removed from the tool and refurbished to maintain expected performance.
Further, shields and other consumables need to be precision cleaned from sputtered film depositions. A previous cleaning service sent back damaged parts which were overly etched by chemicals and the metal eroded, as well as parts with machine oils and grease which are not good for high vacuum performance.
2. Characteristics, Scope, and Specs Provide performance maintenance services for the following Ion Mill. The services will include refurbishment of used optics to cover the period of performance of one year from the date of award.
Clean sputtered material from all spare shields and other recommended parts prior to the annual performance maintenance. These spares must be cleaned and free from machine oils and grease so they can be installed in the chamber during the annual performance maintenance. These spares should also be returned in a condition to install properly in the tool with no erosion of material from excessive chemical etching or bead blasting that would make them not work properly in the tool.
The vendor will send a service engineer to perform the standard annual performance maintenance on the tool.
- 4 days on-site and one travel day for vendor technician
- Replace the PBN assembly with customer spare
- Replace the ion source grid with customer spare
- Replace the ion source quartz dome with customer spare
- Test ion source capacitors (12cm ion source RF only)
- Replace chamber and stage shielding
- Evaluate and clean as required any redeposited coatings on unshielded areas
- Inspect high vacuum and isolation valves for vacuum leaks and clean as required
- Regenerate the cryo pump
- Inspect and service the stage as required replace rotary water seal, inspect belts, inspect platen backside for corrosion and replace stage water filter cartridge
- Lubricate the stage angle change and linear rail drive assemblies
- General system and spare parts review
Carry out ion optics, including the grids, dome and plasma bridge neutralizer and refurbish these optics in preparation for the next performance maintenance vendor will safely transport parts back to facility during the scheduled PM visit, perform work and ship them back to NASA/Goddard
- Refurbish Ion Mill Grids
- Refurbish Plasma Bridge Neutralizer
- Refurbish RF Chamber Ceramic Dome
3. Place of Performance
NASA Goddard Space Flight Center
4. Period of Performance Service shall be performed within 9 months from date of award.
File details come from the government source that posted it. Updated .