SATPC0040734 Tab 07 2 SOW Redacted.pdf
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- Solicitation number
- 80NSSC26929278Q
About this file
This is a Statement of Work (SOW) for NASA GSFC's procurement of customized 5-inch quartz mask plates for x-ray detector array production.
NASA GSFC (Code 521) requires 45 customized 5-inch quartz mask plates and 10 Teflon coatings to support production of large-format x-ray detector arrays for the ATHENA X-IFU project. Mask plates must meet specific technical specifications including Core 2564 (Laser) or Alternative Write Tool Generated 1X Master product type, 5090EQAR 2C material grade, 1 micrometer minimum feature size, ±0.1 micrometer critical dimension tolerance, 0.25 micrometer registration, and zero defects at 1 micrometer or greater. The vendor must provide Teflon coating capability and accept orders for quantities fewer than the total, with separate billing for each delivery. The vendor shall establish a secure platform for data intake from NASA GSFC, process data into visualizable format for inspection, and provide remote access to data files within 2 working days of order receipt. Following NASA GSFC approval, the vendor must print, inspect, and deliver mask plates within 3 working days. Deliveries shall be sent to NASA GSFC in Greenbelt, Maryland 20771 with suitable packaging and shipping provided by the vendor. Payment terms require NASA GSFC payment upon receipt of items. The period of performance is one year from the award date. Selection criteria emphasize vendor proposals meeting all specifications, prior mask provision for prototypes, and established secure data protection systems.
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| File | Type | Posted |
|---|---|---|
| SATPC0040734 Tab 07 5 Question-Answer.pdf |
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Text version
STATEMENT OF WORK
For
Customized Five Inch Quartz Mask Plates
PCN:_______________________
Background:
NASA GSFC (Code 521) requires customized 5” quartz mask plates in order to produce large format arrays of sensitive x-ray detector elements for the ATHENA X-IFU project and other instruments. The arrays are produced on silicon wafers in the Detector Development Laboratory (DDL) with semiconductor processing methods. Each array consists of over 1000 intricate detector elements with each element connected via fine wires to the edge of the substrate. The success of GSFC’s Detector Systems Branch in producing working array devices depends on achieving the highest available level of performance for the 5” mask plates as well as availability of the production of masks on a timely basis.
Objectives:
The purpose of this contract is for NASA GSFC to procure customized 5” quartz mask plates
Additionally, some of the custom 5” quartz mask plates will be provided with a Teflon coating
The vendor will provide data intake from NASA GSFC and output to NASA GSFC in a protected server
The vendor will provide rapid turnaround time for data processing for NASA GSFC inspection and delivery of the mask plates
Scope:
This document will describe a contract for the procurement of 5” quartz mask plates. The details of the specifications of mask plates, the coating of the mask plate if requested, the handling of data, and the delivery times will be described. Expectations for the period of performance and quantities of the plates will be indicated.
Tasks/Requirements:
Mask plates shall be provided with the following specifications:
Product: Core 2564 (Laser) or Alternative Write Tool Generated 1X Master Grade: 5" QTZ Min Feature Size: 1 um Material: 5090EQAR 2C
Critical Dimension Tolerance: ± 0.1 um Registration Guaranteed: Y Registration: 0.25 um
The vendor shall be able to coat the custom 5” quartz mask plate with a Teflon coating.
The quantity of quartz plates to be provided is 45
The quantity of Teflon coatings to be provided is 10
The vendor shall accept orders for fewer than the total number of mask plates and coatings and provide separate billing for each delivery made to NASA GSFC.
The vendor shall provide a platform for receipt of customized data from NASA GSFC to be printed on the mask plates
The vendor shall process the data into a form that can be visualized for inspection by NASA
GSFC
The vendor shall provide a platform for inspection of the data and notify NASA GSFC of the availability of the data on the platform
Upon request, the vendor shall provide tracking information for a specific delivery
Suitable packaging and shipping will be provided by the vendor to the technical contact at NASA GSFC (information provided below)
PAYMENT TERMS AND CONDITIONS consisting of:
NASA GSFC provides payment upon receipt of items.
Delivery Schedule: Data will be provided to NASA GSFC within two days to allow for inspection of the pattern to be printed on the mask
After receipt of approval of the data by NASA GSFC, Other Requirements: None
Data Security: None
Selection Criteria:
Vendor proposal meets all specifications for the mask plate production
Vendor has provided the masks for the earlier prototypes
Vendor has the data intake and output set up to protect NASA GSFC data
Delivery Schedule:
Vendor provides remote access to view file of mask data within 2 working days of receipt of order
Vendor prints mask plate, inspects, and delivers to NASA within three working days of receipt of approval of mask data.
Point of contact and delivery address at GSFC is:
NASA GSFC
Greenbelt, MD 20771
Government Furnished Equipment and Information:
None
Security none
Place of Performance:
The work for this procurement is to be performed at the vendor location
Period of Performance:
The period of performance for this procurement shall be one year from date of award
3/25/2026
Signature and Title Date
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