SATPC0040734 Tab 07 5 Question-Answer.pdf
PDF 36 KB Posted
- Solicitation number
- 80NSSC26929278Q
About this file
This is a Questions and Answers document for federal contract opportunity 80NSSC26929278Q, issued under SATPC0040734/PR4200929278, pertaining to 45" and 105" Quartz Mask plate coating.
The document addresses a single inquiry regarding defect specifications for the quartz mask plates. A vendor inquired whether a defect density of 1 defect per square inch at 1.5 micrometers would satisfy the requirements. The government responded that this specification does not meet the stated requirement of 1.0 micron defect per area (DPA) on the mask and therefore cannot be considered acceptable. The response indicates that vendors must adhere strictly to the 1.0 micron specification, with deviations of this magnitude falling outside acceptable tolerances.
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Other files
| File | Type | Posted |
|---|---|---|
| SATPC0040734 Tab 07 2 SOW Redacted.pdf |
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Text version
SATPC0040734/PR4200929278
80NSSC26929278Q - 45 5" Quartz Mask plate, 105" Quartz Mask plate coating
Questions and Answers
Q: Would “1 per square inch @ 1.5 um” work?
A: No. The requirement is 1.0 micron and I believe we say DPA (defect per area on the mask) so this is too far from the requirement to be considered acceptable.
File details come from the government source that posted it. Updated .