RFI KT-2025-01.pdf

LBNL Request for Information No. KT-2025-01 Page 1

August 13, 2025

Subject: Request for Information (RFI) No. KT-2025-01 Response Due Date: August 22, 2025

Introduction The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide an Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE).

Background The LBNL Molecular Foundry is a national user facility dedicated to nanoscience research. Its primary focus is to provide researchers from around the world, including those from academia, industry, and other government labs, with free access to state-of-the-art instruments, expertise, and capabilities in this field. A new ICP etcher with ALE capabilities is required to replace LBNL’s existing tool, ensuring support for current projects and expanding research into quantum computing, sensing, and nanofabrication.

Preliminary Specifications LBNL intends to acquire an instrument that meets or exceeds the following specifications. These are preliminary and subject to change.

Type of plasma source: ICP Maximum RF power: 3kW Temperature Range: -150C to +400C Liquid cooling to cryo (LN2) cooling rapid switchability Number of atomic layer etch MFC delivery lines: 2+ High volume of Atomic Layer Etch processes availability Number of available process gas MFCs: 12+ Wafer size supported: 200mm Batch vs. single-wafer processing: Single Compatibility with fragile or specialty substrates Endpoint detection: Optical emission spectroscopy (OES) Recipe control and software: User interface, data logging, remote access, recipe management Power Requirements: 208V 3Ph 50A Wall mountable gas pod

NAICS Code and Size Standard The North American Industry Classification System (NAICS) Code for this acquisition will be 333242 (Semiconductor Machinery Manufacturing). The corresponding small business size standard is 1,500 or fewer employees.

Instructions Respondents who can demonstrate a proven record of delivering a ICP etcher per the preliminary specifications above should email the LBNL Procurement Representative Karen Tays at kktays@lbl.gov mailto:kktays@lbl.gov

LBNL Request for Information No. KT-2025-01 Page 2 with relevant published product literature and/or technical specifications demonstrating compliance.

Attachments or hyperlinks are both acceptable. Please indicate the country of origin where the instrument is manufactured.

All responses must be submitted by email no later than 2:00pm Pacific on Friday, August 22, 2025.

Request for Information Only This RFI is for informational and planning purposes only. This is not a request for quote or proposal. It does not constitute a solicitation and shall not be construed as a commitment by the University.

Responses in any form are not offers and no subcontract will be awarded as a result of this announcement. No inquiries regarding a bid package or solicitation will be answered, because there is no bid package or solicitation yet available. Any information submitted by respondents to this RFI is strictly voluntary.

In order to protect the procurement integrity of any future procurement that may arise from this RFI, information regarding the technical point of contact will not be given and no appointments for presentations will be made. No funds are available to pay for preparation of responses to this announcement, and no reimbursement will be made for any costs associated with providing information in response to this RFI or any follow-up information requests related to this RFI. Responding to this RFI does not provide any advantage or disadvantage to potential offerors if LBNL chooses to issue a formal solicitation at a later date.

This Request for Information is governed by procurement policies and procedures established under the University's Prime Contract with the U.S. Government, represented by the Department of Energy, for management and operation of Lawrence Berkeley National Laboratory.

Proprietary Information Because information received in response to this RFI may be used to structure future programs and may be made available to the public, respondents must not include any information in their responses that might be considered business sensitive, proprietary, or otherwise confidential. Responses must be submitted with the understanding that their contents may be publicly disclosed and, in the event of a public disclosure, LBNL will not notify respondents or provide any opportunity to revise or redact submitted information.

Karen Tays LBNL Procurement Representative

(510) 486-4926 kktays@lbl.gov

(End of RFI document) mailto:kktays@lbl.gov

NAICS Code and Size Standard