RFI.doc

The University of California

Lawrence Berkeley National Laboratory

Procurement Department, MS: 937-200

One Cyclotron Road

Berkeley, CA 94720

November 6, 2024 Subject:

Request for Information (RFI) No. KT-2024-01

Response Due Date: November 18, 2024 Introduction The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide a thermal scanning probe lithography system (t-SPL).

Background The LBNL Material Sciences Division (MSD) focuses on research programs related to the discovery and control of quantum materials and systems, novel materials platforms for future energy needs, and the accelerated design and synthesis of materials and assemblies. A new t-SPL system is required at this time to utilize state-of-the-art nano-patterning techniques to develop a novel method for synthesizing lateral heterostructures of 2D materials as well as lateral superlattices.

Preliminary Specifications LBNL intends to acquire an instrument that meets or exceeds the following specifications. These are preliminary and subject to change.

· Scanning tip < 10nm

· Tip heater temperature up to ~1100 C (<1 K setpoint resolution)

· Lateral imaging resolution 10nm

· Vertical resolution <0.5nm

· Writing field size 60um x 60um

· Field stitching accuracy 25nm

· Overlay accuracy 25nm

· Write speed 1000um2 / min NAICS Code and Size Standard

The North American Industry Classification System (NAICS) Code for this acquisition will be 333242 (Semiconductor Machinery Manufacturing). The corresponding small business size standard is 1,500 or fewer employees.

Instructions Respondents who can demonstrate a proven record of delivering a lithography system per the preliminary specifications above should email the LBNL Procurement Representative Karen Tays at kktays@lbl.gov with relevant published product literature and/or technical specifications demonstrating compliance. Attachments or hyperlinks are both acceptable. Please indicate the country of origin where the instrument is manufactured.

All responses must be submitted by email no later than 2:00pm Pacific on Friday, November 18th, 2024.

Request for Information Only

This RFI is for informational and planning purposes only. This is not a request for quote or proposal. It does not constitute a solicitation and shall not be construed as a commitment by the University. Responses in any form are not offers and no subcontract will be awarded as a result of this announcement. No inquiries regarding a bid package or solicitation will be answered, because there is no bid package or solicitation yet available. Any information submitted by respondents to this RFI is strictly voluntary.

In order to protect the procurement integrity of any future procurement that may arise from this RFI, information regarding the technical point of contact will not be given and no appointments for presentations will be made. No funds are available to pay for preparation of responses to this announcement, and no reimbursement will be made for any costs associated with providing information in response to this RFI or any follow-up information requests related to this RFI. Responding to this RFI does not provide any advantage or disadvantage to potential offerors if LBNL chooses to issue a formal solicitation at a later date.

This Request for Information is governed by procurement policies and procedures established under the University's Prime Contract with the U.S. Government, represented by the Department of Energy, for management and operation of Lawrence Berkeley National Laboratory.

Proprietary Information

Because information received in response to this RFI may be used to structure future programs and may be made available to the public, respondents must not include any information in their responses that might be considered business sensitive, proprietary, or otherwise confidential. Responses must be submitted with the understanding that their contents may be publicly disclosed and, in the event of a public disclosure, LBNL will not notify respondents or provide any opportunity to revise or redact submitted information.

Karen Tays LBNL Procurement Representative

(510) 486-4926 kktays@lbl.gov (End of RFI document) LBNL Request for Information No. KT-2024-01