PWS_23-3H7_TrionPhantomII_Redacted.pdf

PERFORMANCE WORK STATEMENT (PWS)

DMEA 23-3H7

7 June 2023 Project Engineer:

1.0 SCOPE:

1.1 TITLE: Trion Technologies Phantom II Preventative Maintenance Service Contract

1.2 APPLICABILITY: Defense Microelectronics Activity (DMEA), Radiation and Validation Branch

1.3 BACKGROUND: The Trion Phantom II is a plasma etcher used in the delayering of integrated circuits and the preparation of samples for failure analysis, scanning electron microscopy imaging, focused ion beam editing, and sample cleaning.

1.4 PURPOSE: To purchase a preventative maintenance service contract to ensure the proper function and maximum accuracy and precision of the tool to minimize downtime. The purchase shall include one (1) base year and four (4) option years

2.0 REFERENCED GOVERNMENT PROVIDED RESOURCES:

2.1 GOVERNMENT DOCUMENTS:

2.2 OTHER DOCUMENTS:

2.3 GOVERNMENT FURNISHED EQUIPMENT:

Equipment Name Serial Number Current Service Expiration Date Available Trion Phantom II PHTII-2228 20230917 TBD

2.4 GOVERNMENT FURNISHED INFORMATION:

2.5 GOVERNMENT FURNISHED FACILITIES/ACCESS:

Facility/Access Date Building 620, Room 125 TBD

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.1.1 RESERVED

3.2 PROGRAM MANAGEMENT: None

3.3 TASK REQUIREMENTS:

3.3.1 REQUIREMENT:

3.3.1.1 PREVENTATIVE MAINTENANCE: The contractor shall provide at least one (1) preventative maintenance (PM) visit, at a time agreed upon by the contractor and DMEA. During the PM visit, the contractor shall ensure that the system is back to full operational condition meeting OEM specifications.

3.3.1.2 SOFTWARE: The contractor shall provide the latest software updates and upgrades to the TRION software, when released. The software updates shall be provided on a CD, sent to DMEA prior to the scheduled visit for installing the software update.

3.3.1.3 ON-SITE HARDWARE SUPPORT: The contractor shall provide unlimited on-site visits to DMEA to provide support and repair any malfunctions to return the tool to full operational condition meeting OEM specifications. The contractor shall replace any parts or component needing to be replaced with equivalent or better quality parts. Components to be covered shall include, but are not limited to:

3.3.1.3 REMOTE TECHNICAL SUPPORT: The contractor shall provide email and telephone support for the Trion Phantom II system Monday through Friday between the hours of 0800 to 1500 Pacific Time, except on Federal Holidays.

3.3.1.3.1 If a site visit is required to return the tool to full operational condition meeting OEM specifications, the contractor shall report to DMEA within five (5) business days of the reported issue.

3.3.1.4 SECURITY:

3.3.1.4.1 The contractor must provide DMEA at least two (2) business days advance notification prior to conducting any on-site inspection, installation, maintenance, modification, repair, or training.

3.3.1.4.2 All services shall be performed by US citizens.

3.3.1.4.3 Prior to being allowed entry to the DMEA facility, all contractor personnel shall provide proof of citizenship in according with the DMEA visitor approval process in effect at the time that the visit is requested.

3.3.1.4.4. During periods of exceptionally heightened security, additional advanced notice and background investigations of contractor personnel may be required prior to gaining entry to DMEA.

3.3.1.4.5 If the contractor requires the use of a laptop during the service visit, DMEA must be notified prior to the visit and laptop must be checked by DMEA Security prior to entering the laboratory. All recording devices and wireless communications must be disabled, including but not limited to the camera, microphone, wireless internet, Bluetooth, etc.

3.3.1.4.6 The on-site contractor personnel will be issued a badge each day that they are required to be on-site and shall return the badge to DMEA security personnel at the end of each work day.

3.3.1.4.7 Contractor personnel must comply with all DMEA Security policies and instructions at all times.

3.4 PROGRAM SUMMARY: None

4.0 POINTS OF CONTACT:

DMEA/MEBC Project Engineer:

Address: 4234 54th Street, McClellan, CA 95652-2100