NOI SS Probe Station.pdf

SAM.GOV ANNOUNCEMENT TYPE: SPECIAL NOTICE

CLASSIFICATION CODE: 6640 – LABORATORY EQUIPMENT AND SUPPLIES

ANNOUNCEMENT NUMBER: NB681050-24-02221

SUBJECT: NOTICE OF INTENT TO SOLE SOURCE for Probe Station for CMOS Measurement

Notice of Intent to Noncompetitively acquire a probe station for CMOS Measurement

This notice is not a request for a quotation. A solicitation document will not be issued, and quotations will not be requested.

This acquisition is being conducted under the authority of FAR 13.106-1(b). The North American Industry Classification System (NAICS) code for this acquisition is 334516 – Analytical Laboratory Instrument Manufacturing, with a small business size standard of 1,000 employees.

The National Institute of Standards and Technology (NIST) Biophysics and Biomedical Measurements Group (681.05) requires a probe station for characterizing CMOS devices designed for biophysical measurements. This probe station will be used for parametric characterization of devices enabling new signal test capabilities to interrogate and validate novel electronic devices custom-built for biology.

The probe station will be used for DC and low frequency measurements of < 10 MHz. The system will support two types of test classes, current vs. voltage (IV) at DC and capacitance vs. voltage (CV) measurements at frequencies < 10 MHz. The probe station operation shall be semi-automated, for example including at minimum a motorized stage and associated machine vision, scripting and automation tools that can repeat test programs across single die or up to an entire 200 mm diameter wafer in a predetermined path. This capability assumes that the layout of the device pads remains constant relative to each other. The system should also be programmable (and scriptable, e.g., with Python) to repeat measurements of multiple test structures within a single die by moving a fixed distance from the initial position, assuming the pad layout of each structure remains constant. Critically, to account for the additional sensitivity of biological chips and unique chip structures that may include fluidic layers, the system must have the ability to detect potential collisions and halt actuation of all moving components. This includes the ability to define custom exclusion zones in software.

NIST requires:

a) One (1) 200 mm semi-automatic probe station that meets the following minimum specifications:

1. Chuck: The probe station must include an ambient temperature (or non-thermal) chuck that supports single dies, shards and wafers up to 200 mm diameter.

i. Vacuum zones: 4 or more to allow attachment of samples as small as 10 mm and up to a 200 mm wafer. Vacuum zones must be individually controllable.

ii. Temperature range: Non-thermal ambient

iii. Electrical connection: Triaxial

iv. Electrical leakage: < 25 fA.

v. Planarity: < 25 m at room temperature (25 deg C)

vi. Auxiliary chuck: Single auxiliary steel chuck that supports a sample size of 10 mm 10 mm, for example, to allow probe cleaning.

vii. Sample loading: The probe station shall include a roll out chuck for easy sample loading and to prevent accidental damage to samples or probes. The probe station shall support future automation needs such as automated wafer loaders.

viii. Light Shielding: Complete light shielding of sample chuck with > 100 dB attenuation.

2. Platen: An integrated fixed platen is required with the following specifications:

i. Probe positioners: Support 8 or more DC probe positioners.

ii. Platen mount: Fixed

iii. Material: Steel to support magnetic probe positioners.

iv. Platen interface: Top hat that supports 8 or more manual DC probes simultaneously and provides shielding from electromagnetic interference (EMI).

3. Sample Stage: Motorized 4-axis stage with X, Y, Z and with the following performance specifications:

i. X and Y axis:

a. Resolution: 0.25 m.

b. Travel range: 200 mm or greater.

ii. Z-axis:

a. Resolution: 1 m.

b. Travel range: 25 mm or greater.

iii. Rotation :

a. Resolution: 1 m

b. Range: 5 degrees

4. Probe Station Control: Must include PC and all control software for sample stage and all motorized components.

i. Required interface: GPIB for test instrumentation control

ii. Require interface: USB for instrument control

iii. Software: Software with graphical user interface for system operation

iv. Scripting:

a. The probe station control software shall work in tandem with the machine vision system (item b) to allow the ability to script system functions to allow custom test programs. Scripting in Python, C or equivalent is required.

b. The probe station control software shall work in tandem with the machine vision system (item b) to be programmable to repeat measurements of multiple test structures within a single die by moving a fixed distance from the initial position, assuming the pad layout of each test structure remains constant.

v. Operating System: Windows 10 to ensure network compatibility.

5. Vibration Isolation Platform: The system must include actively damped vibration isolation platform.

i. Type: Air-damped vibration isolation system

ii. Feet: Leveling feet for installation in final location.

b) One (1) microscope and machine vision system with the following minimum specifications:

1. Optical magnification: 10 or greater.

2. Camera system resolution: 10 megapixels or higher.

3. Illumination: Integrated Light Emitting Diode (LED) illumination.

4. Microscope Mount/Bridge: Integrated microscope mount or bridge with the following specifications:

a. Travel along X and Y axes: > 25 mm.

b. Travel along Z axis: > 50 mm.

c. Microscope motion: Manual

d. Focus: Motorized automatic image focus and refocus with sample height variations.

5. Software: The microscope-based vision system must provide software that is integrated with the probe station and have the following features:

a. Pattern recognition to detect features such as probe pads and work in tandem with the probe station control (item a) to step across dies in a single wafer to repeat measurements.

b. The machine vision software shall work in tandem with the probe station control (item a) to include crash or collision avoidance as a standard feature to avoid contact probes and microscope objective.

i. The crash detection feature must include the ability to define exclusion zones for additional safety.

c) Four (4) probe positioners, probe arms and probe tips to support IV and CV that meet the following minimum specifications:

1. Attachment: Magnetic or vacuum.

2. Positioning: Three axis X, Y, and Z

a. Travel: > 10 mm along each axis

b. Resolution: 1 m

3. Probe connections: triaxial.

4. Probe tip size: 5 m radius.

5. Probe frequency: DC to >50 MHz.

6. Probe current leakage: <5 fA.

7. Isolation: 10 T or greater

8. Modularity: Probe holder should be modular and allow upgrades to higher performing probes in the future without requiring a full replacement of positioners.

NIST conducted market research in May 2024 to August 2024 to determine what sources could potentially meet NIST’s minimum requirements. This included searches on GSA, Thomas Register, System for Award Management (SAM); surveying vendor websites; speaking with subject matter experts at NIST; and issuance of a Sources Sought Notice on SAM.gov. Market research identified three potential manufacturers of probe stations, but only identified one that meets all NIST requirements. The results of market research revealed that only FormFactor, Inc. (UEI: RS88D3S15F37) appears to be capable of meeting NIST’s minimum requirements.

However, any sources that believe they are capable of meeting NIST’s minimum requirements are encouraged to respond to this notice by the response date to provide the following information at a minimum: Company Unique Entity Identifier (UEI) number in https://sam.gov; details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements; whether your company is an authorized reseller of the product or service being cited and evidence of such authorization; and any other information that can help NIST determine whether this requirement may be competitively satisfied.

A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will be considered solely for the purpose of determining whether to conduct a competitive procurement. Only responses received by the offers due date and time of this notice will be considered by the government. Responses shall be submitted via email to nina.lin@nist.gov.