Amendment 01 Q and A 6-1-26.docx
DOCX document 27 KB Posted
- Solicitation number
- NIST-SS26-133
About this file
This file is an Amendment 01 Questions and Answers document for NIST-SS26-133, a silane distribution system solicitation issued June 1, 2026. The Q&A clarifies technical requirements outlined in the Statement of Work (SOW) and addresses concerns raised by potential contractors regarding system specifications and design constraints.
Key technical clarifications include: the Government has approximately $40,000-$50,000 worth of spare CipherCon 1500 gas rack systems available for potential reuse; the outdoor system will be installed under a roof approximately 12 feet 4 inches high with the edge about 4 feet 6 inches away, exposing it to weather in Boulder, Colorado (winter temperatures ranging from 21°F to 48°F with record lows of -33°F); software will enable switching between pneumatic and manual system control; the purge inlet filter is a particulate filter preventing particles from entering the delivery line from the cylinder; the system requires a total flow rate of 800 sccm with 100 sccm per tool for eight tools; six of eight possible distribution lines will be initially populated with valves, gauges, and regulators with field-add capability for two additional lines; pneumatic shut-off valves are acceptable for the system; each distribution line must integrate with the existing toxic gas monitoring system (TGMS) for independent tool-by-tool control and shutdown; and both input and output isolation valves are required for safety and troubleshooting purposes. The Q&A establishes that the system must be compatible with NIST's existing life safety infrastructure while addressing the hazards associated with silane, a toxic and pyrophoric gas.
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Other files
| File | Type | Posted |
|---|---|---|
| DRAFT Statement of Work.docx | DOCX document |
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NIST-SS26-133 Amendment 01 - Silane Distribution System June 1, 2026 Questions & Answers (Q&A)
| Q1. | SOW c.ii.2.a. – We do not believe we can do this, we don’t know enough about the Stainless Design product to determine what might be re-usable. |
| A1. | We have two spare CipherCon 1500 gas rack systems. Roughly ~$40k-$50k worth of spare parts. |
| Q2. | SOW c.ii.2.i. – Will the outdoor system be under a roof, or in a lean-to? If its will be completely exposed, we will have to use only stainless steel. |
| A2. | The system is under a roof that is about 12’4” high. However, the edge of the roof is about 4’6” away so it does get a fair amount of weather. Additionally, we’re in Boulder, CO with mean winter temperatures of 21F to 48F with a record low of -33F in 1930. |
| Q3. | SOW c.ii.2.l. – how do you intend to control the change from pneumatic to manual regarding the system software? |
| A3. | We should be able to change between the two in software. |
| Q4. | SOW c.ii.2.p – What is the purpose of the purge inlet filter? Do you possible mean purifier? |
| A4. | This is a particulate filter to make sure no particles go from the cylinder into the line. |
| Q5. | SOW c.ii.3.a – what is the flow rate required if all eight tools are in use? Please provide a per line flow. |
| A5. | 800 sccm total (100 sccm per tool) |
| Q6. | SOW c.ii.3.f – contrast line f with c.ii.3.a. |
| A6. | a. is the requirement that the system is able to have 8 lines, f. says that only 6 lines need to be populated with the valves, gauges, regulators, etc with the ability to field add two more lines. |
| Q7. | SOWc.ii.3.j. – is a pneumatic shut off valve acceptable, we believe this is what most semiconductor silane processes use. |
| A7. | Pneumatic valve is acceptable to meet the requirement of c.ii.3.j |
| Q8. | SOW c.ii.3.m.i. – we don’t understand this requirement |
| A8. | Each line needs to be able to interact with our toxic gas monitoring system so that we can independently control and shutdown delivery lines tool by tool depending on tool status. |
| Q9. | SOW c.ii.3.m.ii. / c.ii.3.m.iii. – why are both of these required? IS either / or acceptable? |
| A9. | We require both input and output valves to be able to isolate the system on both the input and output for both safety and troubleshooting reasons. |
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