DRAFT Statement of Work.docx

DRAFT Statement of Work Silane Distribution System

1. Background Information:

a. The National Institute of Standards and Technology (NIST)-Boulder has a state-of-the-art research laboratory (the Katharine Blodgett Gebbie Building) to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF). Among the many critical pieces of equipment in this laboratory is equipment that uses the process gasses silane (SiH4). Silane is a toxic and pyrophoric gas and needs to be stored in and outside bunker using a gas rack and is delivered to tools through a specialized gas valve manifold box (VMB). Recently, the BMF has learned that their existing system has reached end of life and the system needs to be replaced for safety and operational reasons. The Government requires a new silane delivery system that is compatible with its existing life safety equipment, such as the toxic gas monitoring system and other gas cabinets to continue to use silane as process gasses.

2. Scope of Work:

a. Objectives:

i. The goal of this contract is to provide the Government with a new silane distribution system consisting of a gas rack and VMB to meet the needs of the NIST Boulder community.

b. General:

i. The contractor shall:

1. Provide personnel that pass required government background checks to be issued badges for work on site.

2. Provide all new items. Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments are unacceptable.

ii. Specifications for the Work:

1. All staff must be badged by NIST Security. No one may enter the site without a badge.

2. The work and badging shall be scheduled with the Contracting Officer’s Representative (COR) and/or Technical Point of Contact (TPOC) prior to arrival to do the work.

c. Specific Requirements:

i. The contractor shall provide the Government with a silane distribution system that is compatible with the Governments existing SDC CiphercoNTM gas delivery infrastructure. To maintain critical life-safety continuity, the new system shall utilize identical spare parts, safety interlock mechanisms, and software architecture as the existing SDC gas delivery infrastructure.

ii. System Requirements:

1. The silane distribution system shall consist of a silane gas rack and a silane VMB.

2. The new gas rack shall be a CiphercoN™ 1500 Gas Rack or equivalent with the following specifications:

a. Be able to be repaired using spare parts from the Government’s existing stock of spare parts for a SDC CiphercoNTM 1500 cabinet.

b. Be constructed of materials that are compatible for use with silane.

c. Meet all applicable code for delivering silane such as SEMI S2 and/or CGA-13 standards.

d. Be able to deliver Ultra High Purity (UHP) silane to a VMB in a manner that is consistent with semiconductor industry standards.

e. Be able to deliver silane to each system in a fully automated, computer-controlled method using a touch screen.

f. Be a two-cylinder system with one cylinder being an independent out, configured for silane, and the other as an onboard purge system, configured as nitrogen.

g. The gas Rack shall meet all CGA-13 requirements, including but not limited to:

i. High pressure test circuit

ii. Vent purge trickle

iii. Reduced flow orifice (RFO)

h. Have a Z-purge system.

i. Be able to be used outdoors in Boulder, Colorado, USA year-round.

i. The system shall include a control heater system if required.

ii. Any weather proofing required to operate year-round.

j. Have an appropriate integrated UVIR detection and safety shutoffs.

k. Have an adjustable cylinder shelf to accommodate standard size gas cylinders.

l. Have the ability to accommodate gas cylinders with an industry standard automatic pneumatic valve and a manual hand valve.

m. Have dual stage regulators.

n. Have CGA standard DISS fittings for the lines that connect to both the silane and nitrogen gas cylinders.

o. Have a process gas out line filter appropriate to industry standards for the semiconductor industry.

p. Have a purge inlet filter appropriate to industry standards for the semiconductor industry.

q. Have an EMO button.

r. Have an evacuate system that is able to independently evacuate the delivery line, purge line, and the inlet line of the system to vacuum pressures that is consistent with semiconductor industry standards.

s. Have the ability to communicate with the Government’s existing Toxic Gas Monitoring System (TGMS) where it can send and receive signals including but not limited to: the gas rack is ready to deliver gas, the gas rack is not able to deliver gas, and can receive and shut down signal to shut down the system.

t. Have an excess flow switch that can shut down the line delivery in case of a large change in flow signifying a leak.

u. Have a manual isolation valve on the output that has the ability to be locked out with a lock for standard LOTO procedures.

3. The new gas rack shall be a FlexGas™ VMB or equivalent with the following specifications:

a. Be able to receive gas from the gas rack and deliver UHP silane to up to 8 process tools in a manner that is consistent with semiconductor industry standards.

b. Be constructed of materials that are compatible for use with silane.

c. Meet all applicable code for delivering silane such as SEMI S2 and/or CGA-13 standards.

d. Be able to deliver silane to each system in a fully automated, computer-controlled method using a touch screen.

e. Be able to deliver silane to each system in a fully automated, computer controlled method.

f. Be able to independently deliver silane to 6 systems with the ability to expand the system to 8 delivery lines.

g. Have a nitrogen purge system that is able to independently purge each delivery line and the inlet line of the system.

h. A manual input isolation valve that has the ability to be locked out with a lock for standard LOTO procedures.

i. Have an evacuate system that is able to independently evacuate each delivery line, purge line, and the inlet line of the system to vacuum pressures that is consistent with semiconductor industry standards.

j. Have an inlet manifold electronic shut off valve

k. Have an appropriate integrated UVIR detection and safety shutoffs.

l. Have an EMO button.

m. Each of the 6 delivery lines shall have:

i. An automated line isolation valve with contacts for a tool to call gas or to signal that gas is available.

ii. A manual input isolation valve that has the ability to be locked out with a lock for standard LOTO procedures.

iii. A manual outlet isolation valve that has the ability to be locked out with a lock for standard LOTO procedures.

iv. An automatic purge isolation valve

v. A pressure regulator to regulate pressure for pressures consistent with semiconductor industry standards for the use of silane.

vi. An electronic pressure transducer to measure each line’s delivery pressure.

vii. An excess flow switch that can shut down the line delivery in case of a large change in flow signifying a leak.

viii. An automated evacuation isolation valve

n. Have the ability to communicate with the Government’s existing TGMS where it can send and receive signals including but not limited to: the gas rack is ready to deliver gas, the gas rack is not able to deliver gas, and can receive and shut down signal to shut down the system and each silane stick individually.

o. Be expandable to include 2 more spare user configurable gas delivery lines that meet the same requirements listed in2.c.ii.3.l.

iii. Delivery and Installation:

1. The contractor shall be responsible for delivering the silane gas rack and VMB to the Government. After the gas rack and VMB are delivered, the Government will then be able to facilitize the system for a period between system delivery and site commissioning. This time period shall be at least 1 month and will not exceed 1 year, and the actual time period will be agreed upon between the Government and the contractor. If facilitization occurs faster than the agreed upon time period, then the contractor may start the commissioning on a date that is mutually agreeable between the Government and the contractor.

iv. Commissioning and acceptance:

1. After the gas rack and VMB are facilitized, the contract shall commission the gas rack and VMB using a standard site acceptance test. The system will be accepted by the Government after the system passes the site acceptance test.

2. After completing the site acceptance test, the contractor shall assist the Government in introducing gas back to all of the process lines. Additionally, the contractor shall provide written directions on how to perform a cylinder change, pumping out the delivery line to the VMB, and introducing process gas to the VMB.

3. The contractor shall be responsible for all travel expenses.