Statement_of_Work_vBMF.pdf

Statement of Work Silane Distribution System

NB687100-19-00500

LAB REQUESTING SERVICE

Microfabrication Group, Quantum Electromagnetics Division 687.10, Physical Measurements Laboratory (PML), National Institute of Standards and Technology (NIST)

1. BACKGROUND

NIST-Boulder has a state-of-the-art research laboratory (the Katharine Bloggett Gebbie Building) otherwise known as the PML to support the most sensitive research done at NIST. Included in this building is a Class 100 microelectronics fabrication facility, called the Boulder Micro-Fabrication Facility (BMF).

2. PURPOSE

To expand upon its fabrication capabilities, the BMF requires an expanded silane distribution system.

The Silane Distribution System (including installation) shall deliver silane, a pyrophoric gas which ignites spontaneously in air at or below 55°C /130°F.

3. OBJECTIVE

This system will be composed of a weather shielded Versum (formerly Air Products) GasGuard AP10 (or newer model, same manufacturer) unit that can control two (2) independent process gas cylinders and one (1) shared purge gas cylinder. One process gas will be connected to an existing silane delivery line and the other process cylinder will be connected to a new silane delivery line installed as part of this contract. This line will be approximately 350 feet of single walled 316L stainless steel orbital welded tubing that is suitable for silane gas delivery.

For safety reasons, the BMF requires an AP10 unit to be consistent with the other AP10 units in the BMF and all work must be done according to National Fire Protection Association (NFPA) 318 and American National Standards Institute (ANSI)/ Compressed Gas Association (CGA) G-13.

4. SCOPE OF WORK

(1) The Contractor shall supply (for installation) all parts, hardware, and equipment for a silane distribution system to include one (1) each Complete GasGuard AP10 (or newer model-by same manufacturer) unit with weather shielding that can accommodate three (3) gas cylinders as follows:

(a) A gas panel that allows for three (3) gas cylinders to be simultaneously connected to the system. The system must be able to independently deliver silane from two (2) separate process gas bottles through two separate gas lines and the system must be able to be purged using one

(1) nitrogen cylinder connected to the system. The gas panel shall meet all requirements in the attachment labeled section 15474 with the following modifications:

[1] Section 2.1.A becomes: “The only acceptable manufacture/unit is the Versum (formerly Air

Products) AP 10 unit, or newer model-same manufacturer to be consistent with other existing AP10 units in the NIST BMF.”

[2] Section 2.2.B becomes: “The HPM gas panel assembly is designed for independent cylinder gas pressure regulation and control of two (2) hazardous gas cylinders and one (1) inert purge cylinder.”

[3] In addition to the requirements of section 15474, the gas panel must:

[a] Be installed in the silane gas bunker located outside of NIST PML Building 81.

[b] Include enough weather proofing to store a compressed gas bottle of silane year-round in Boulder, Colorado. This must include but is not limited to:

{1} A cartridge heater with thermostat in controller.

{2} A controller and AMP Box Weather Shroud.

{3} A controller Z-Purge.

[c] Allow for three (3) gas cylinders to be simultaneously connected to the system.

[d] The system must be able to independently deliver silane from two (2) separate process gas bottles through two separate gas lines and the system must be able to be purged using one (1) nitrogen cylinder connected to the system. The silane delivery system must be able to automatically perform these tasks through software.

(2) The Contractor shall provide all parts, equipment, and labor to include qualifications and certifications of orbital welders to install the silane distribution system. Installation for the silane distribution system shall include approximately 350 feet of ¼ inch single walled 316L stainless steel orbital welded tubing that is suitable for silane gas delivery and shall meet all requirements of Enclosure 2 (Section 15478) per NFPA 318 and ANSI/CGA G-13.

(a) Install the silane gas line conforming to the specification in section 15478 from the gas panel the contractor installs on the NIST PML Building 81 dock to a specified location in the BMF cleanroom. The end in the cleanroom must be capped in a manner that allows the line to be vacuum pumped and purged to test the air tightness of the line.

[1] Approximately 100 feet located in an ISO Class 5 cleanroom.

[2] Approximately 250 feet located inside and external to NIST PML Building 81.

(b) Orbital welding shall only be performed by individuals that have been trained and certified in orbital welding by an appropriate state or nationally recognized certification body.

(c) The contractor shall provide installers that have been trained and are currently certified in orbital welding that conforms to NFPA 318 and ANSI/CGA G-13 standards. Appropriate certification of a state or nationally recognized certification body is required. This criterion shall be demonstrated with appropriate documentation and only applies to contractors who are performing the orbital welding.

(d) Additionally, installation shall include, uncrating/unpackaging of all equipment, set-up and hook-up of all equipment, start-up, demonstration of specifications, and removal of all trash.

5. ATTACHMENTS

(1) Section 15474: Specialty Gas Source Equipment

(2) Section 15478: High Purity Stainless Steel Piping Systems

6. TESTING AND INSPECTION

(1) The contractor shall test the system according to the specifications detailed in section 15474 and section 15478 including a pump/purge test.

(2) After the pump/purge test is complete, the contractor shall demonstrate the full functionality of the system. These tests shall demonstrate that the system can meet all the specifications identified herein. If the system does not meet all the specifications, the contractor shall repair any faults and retest the system until the system meets specifications.

(3) The Contractor shall provide a report one week after completion all requirements to include work accomplished, test results, any issues encountered, and corrections to meet specifications.

7. QUALIFICATIONS/EXPERIENCE

The Contractor shall provide qualified, experienced, and certified installers as follows:

(1) Experienced with installing toxic gas delivery systems. Evidence of this condition shall be supported by documentation showing the successful installation of at least one similar silane distribution system.

(2) Trained and are currently certified in orbital welding that conforms to NFPA 318 and ANSI/CGA

G-13 standards. The appropriate certification by a state or nationally recognized certification body shall be provided with the quotation. This criterion only applies to contractors who are performing the orbital welding.

(3) Contractors must pass required government background checks to be issued badges for work on the

NIST Boulder, CO site.

8. DELIVERY SCHEDULE: 416 days after receipt of order as follows:

Deliverable Due Date Delivery 1 year after receipt of order (ARO) Installation Within 30 days of Delivery Test/Accept. Within 2 weeks of Installation Training Within 1 week of Test/Acceptance Warranty 1-year Standard after Acceptance

9. PLACE OF PERFORMANCE

(1) The design and manufacturing of the equipment shall be completed at the Contractor’s facility.

Installation of the equipment and training shall be accomplished at:

U.S. DOC/NIST

325 Broadway Bldg. 81 Boulder, CO 80305

(2) Normal Business Hours are Monday through Friday, 8:30am through 5:00pm mountain time (MT), except Federal Holidays. Contractors may be given access to the facility on Saturdays between 8:30am and 5:00pm MT with the prior approval and coordination of the Technical Point of Contact

(TPOC).

(3) Day-to-day supervision and direct control over the work performed by on-site contractors will be the sole responsibility of the contractor.

10. DELIVERABLES

Description Quantity/Method Due Date The contractor shall provide the government with the submittals listed in section 15474 1.4 and section 15478 1.3 and all other submittals/ deliverables listed in section 15474 and 15478 such as weld test coupons and documentation.

One (1) Electronic copy

Submit with the quotation

The contractor shall provide the government with a report summarizing the following items after delivery and installation:

(1) Work done.

(2) Results of the system test.

(3) Any issues identified and resolution to conform to specifications.

One (1) Electronic copy

Within one (1) week of Government Acceptance of full requirement

The contractor shall provide the government with a copy of the operations and maintenance manual for Silane Delivery System.

One (1) set At time of Acceptance

11. TRAVEL

Travel to the NIST, Boulder is required. Travel shall be included in the price, and not priced separately.

12. TRAINING

The Contractor shall coordinate with the TPOC and facilitate training for NIST personnel, on-site at NIST Boulder, CO. The training shall provide a thorough demonstration of all equipment functions, equipment operation, basic troubleshooting, any required safety and any routine maintenance.

Training shall be provided during normal business hours, between 8:30am and 5:00pm mountain time, Monday through Friday, except Federal Holidays, and shall occur within the deliverable schedule specified herein.

13. WARRANTY

The Contractor shall provide, at a minimum, a one-year warranty on the equipment, installation and all features installed by the Contractor. The warranty shall cover all parts, labor and travel (if required). The warranty shall commence upon successful completion of delivery, installation, training and demonstration of all required specifications.

14. GENERAL INFORMATION

(1) Safety: The Contractor employee shall be responsible for knowing and complying with all installation safety prevention regulations. Such regulations include, but are not limited to, general safety, fire prevention, and waste disposal.

(2) Security: NIST is a restricted campus. An identification badge is required and shall be presented to the armed Security Police when entering the campus and is required for access into buildings.

(3) Identification Badges: Contractor employees that come on-site to install the equipment must be

U.S. citizens and comply with NIST identification and access requirements. Contractors shall familiarize themselves with and comply with the Real ID Act of 2005 requirements. The Contractor employee is responsible for absences due to expired identification and access documents. Each Contractor employee shall wear a visible identification badge provided by the NIST Security Office. The badge must show the full name, title, and if required by NIST, the words “Contractor” in front. The Contractor employee shall turn in the NIST identification badge and vehicle pass to the TPOC, COR, or Contracting Officer (CO) upon termination of their services under this contract.

To facilitate the badging process all installation team members that will be on-site will be required to complete the badging/security process prior to working on-site. Therefore, the names and required information of the installation team must be sent to the TPOC at least 8 weeks prior to the start of installation.

(4) Vehicle Registration: All Contractor employees must register their vehicles with the NIST

Security Office to gain access to the campus. A valid driver’s license, Government-furnished civilian ID, proof of insurance and current registration must be presented to the NIST Security Office, at which time a NIST vehicle pass will be issued. The pass shall be displayed on the vehicle in accordance with NIST Security Office instructions. The Contractor shall follow NIST procedures for removal and turn-in of the vehicle pass upon completion of services under this purchase order.