STATEMENT OF WORK/REQUIREMENTS DOCUMENT

Title: Vacuum Equipment Repair for Growth System Requesting Lab: Quantitative Nanostructure Characterization Group (686.09), Applied Physics Division, Physical Measurement Laboratory

I. BACKGROUND INFORMATION

NIST-Boulder has a molecular beam epitaxy (MBE) crystal growth system used to synthesize semiconductor materials and devices. This equipment supports critical projects that include CHIPs metrology research projects and fabrication of semiconductor nanostructures for a NIST standard reference instrument (SRI). This system uses a valved gallium effusion cell manufactured by E-Science to provide a vapor phase flux of gallium atoms during crystal growth. This cell is currently broken and needs to be rebuilt to bring it back to functional operation. Therefore, the Government requires the refurbishment of this effusion cell in order to continue its mission critical research.

Purpose/Objective: The goal of this procurement is to refurbish the Government’s existing valved gallium effusion cell to meet the needs of current research projects.

II. SCOPE

The Contractor shall perform an effusion cell rebuild on NIST’s 90 cc Valved Titan Effusion Cell (serial number ES-18-0530), inclusive of FOB Destination delivery and option line items.

III. MINIMUM REQUIREMENTS

The Contractor shall perform the cell rebuild to meet all technical specifications identified below.

Line Item 0001: Rebuild 90 cc Valved Titan Effusion Cell (E-Science part number REB-

ECVT-090-450-1140)

Description: Disassembly, removal and replacement of broken/degraded components, cleaning of usable parts, reassembly Quantity: 1

A. Technical Specifications

a. Source should be returned to original specifications

b. Source should be outgassed and tested in vacuum

c. Documented test results should be provided with repaired source

Line Item 0002: Crucible, 90cc Valved Titan (E-Science Part Number C101137) Description: New graphite crucible for valved effusion cell Quantity: 1

A. Technical Specifications

a. Crucible should be verified to be dimensionally compatible with rebuilt source

IV. DELIVERABLES

Description Quantity or Format Due Date

1. Rebuilt valved gallium effusion cell

2. New crucible for cell

Equipment 8 weeks after receipt of order

Standards of Acceptance: The NIST TPOC or COR shall review and respond with an acceptance or request for revision email to the Contractor Point of Contact (POC) within 1 week of receipt of deliverable.

V. PLACE OF PERFORMANCE

The cell will be repaired and tested at the Contractor’s facility.

VI. PERIOD OF PERFORMANCE/LEAD TIME

6 weeks after receipt of order

VII. DELIVERY TERMS

Delivery shall be F.O.B Destination and shall occur in accordance with the delivery due dates provided in the above table.

FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at the delivery point specified in the purchase order; and pay all charges to the specified point of delivery. The contractor shall deliver all Line Items to:

National Institute of Standards and Technology Shipping and Receiving 325 Broadway Boulder, CO 80305 C/O Matt Brubaker, Building 81, Room 1A-115

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***

VIII. INSPECTION & ACCEPTANCE

In addition to the inspection and acceptance terms articulated in 52.212-4, the Government reserves the right to perform such performance tests and evaluations as defined below to verify specified system performance. The Contractor has the right to be present during the tests and evaluations, if performed, at the Contractor’s expense.

Performance Tests:

1. Visual inspection of cell to confirm it is undamaged and has been adequately rebuilt.

2. Electrical probing to verify electrical continuity of heating filaments and thermocouples.

3. Electrical probing to verify electrical isolation of heating filaments from the source flange.

4. Manual manipulation of valve assembly to verify smooth operation.

NIST may choose at its discretion to forego this part of acceptance testing.

A visual inspection of the equipment will be performed by the NIST TPOC to identify surface defects or any form of indication that any equipment was damaged during transport to NIST. The Government shall have sole discretion to require repair or replacement of damaged and/or nonconforming supplies at no cost to the Government. The Government at any time prior to acceptance shall reject the equipment due to defects and/or nonconformance. The vendor is responsible for latent defects discovered any time after final inspection. However, the extent of its liability shall be prorated over the useful life of the equipment.

The Government will test, inspect, and accept or reject the equipment within 5 working of the receipt of the equipment unless otherwise indicated above. The Government reserves the right to conduct quality assurance testing to confirm that a given instrument(s) meets the manufacturer’s and/or the Government’s performance specifications. It is anticipated that the equipment will meet all manufacturer’s specifications and/or the Government’s performance specifications identified in the most recent operations and maintenance manual for each piece of equipment and/or in this document.

IX. PAYMENT SCHEDULE

Advance payment is not authorized. The Contractor must invoice in arrears according to the payment schedule. The Contractor shall be paid, in accordance with Net 30-day payment terms, upon receipt and acceptance of a proper invoice, in accordance with the following schedule:

1. 100% after acceptance by the TPOC, AND

2. After the successful completion of the testing requirements set forth in this document under section set forth in this document, AND

3. After successful demonstration by the instrumentation that it performs IAW the technical requirements set forth in this document AND

4. After receiving an invoice submitted properly, IAW the purchase order terms and conditions.

NOTE: Partial shipments and partial invoices will not be accepted, unless otherwise requested and accepted by the Contracting Officer prior to award offer. Proposed payment schedules shall be submitted with vendor’s response to the RFQ for consideration.

***Due to ongoing limited site access of the NIST facilities, the Awardee SHALL confirm with the Designated Government Official and the Contracting Officer prior to ANY shipment to NIST***