03263_SOW.docx

Statement of Work Palladium/Gold Target for Sputter

NB686020-15-03263

BACKGROUND:

The Quantum Devices Group has a history of using Palladium/Gold targets within the sputtering system in the clean room to produce resistors on the surface of silicon wafers that are being patterned for circuitry for various uses and for testing purposes of other systems.

For example, the Quantum Voltage Project develops Josephson-based voltage standards which are used worldwide. The manufacture of these chips requires the ability to be able to sputter Pd/Au on the surface of the wafers to use as one of the contact layers. It has been found that the mixture specified gives the best performance of the Voltage Standard and allows for extensive testing in sub-zero temperatures without affecting the results.

PURPOSE:

Procure replacement target to continue the research within the clean room on various projects.

TECHNICAL SPECIFICATIONS:

Pd/Au target must be 52% Pd and 48% Au with an overall purity of 99.95%.

Target must be 3” in diameter and ¼” thick. There is no need for a backing plate as this target is mounted directly into the system.

DELIVERABLE SCHEDULE:

2-3 weeks ARO

Price will be based on the cost of the metals on the day after they are shipped. Because of the continuing change in the price of precious metals, the amount of metal purchased will be based on these costs and can only be approximated at this time.

INSPECTION AND ACCEPTANCE CRITERIA:

Inspection will be done at the NIST facility upon receipt.

The Government reserves the right to verify the specifications listed above are met per the specifications in this SOW.