Fld Emiss ScanElec Micro (FESEM)- SOW.docx

Statement of Work (SOW)

Procurement of a Field Emission Scanning Electron Microscope (FESEM) Fleet Readiness Center Southwest (FRCSW), Building 469N

Prepared by Technical Point of Contact (TPOC) Thanhlan Nguyen/Engineer: Vu Dao FRC-SW – Naval Air Station (NAS) North Island

1.0 SCOPE:

1.1 This SOW describes the minimum specifications and requirements necessary to purchase one (1) new FESEM system in building 469N. The new FESEM system shall be connected to the existing ThermoElectron Spectrometer (Model: 2252C-3UPS-SN) and ThermoElectron Controller ( Model: NS7). No building modification or alterations are prescribed for this project or within this SOW.

1.2 Description: The purpose of this SOW is to provide details for a “Turn-Key” operation for a commercial vendor to provide parts, labor, and materials delineated by contract scope and specified by SOW, to include; installation, start-up, commissioning, validation, calibration, and training of the FESEM system located at FRC-SW, in Building 469N. The quality, size, and capacity shall be no less than the minimum specification outlined in Section 3 of this SOW.

2.0 APPLICABLE DOCUMENTS AND REFERENCES:

2.1 GOVERNMENT DOCUMENTS: The following specifications, standards, and handbooks form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those listed in the latest issue of the Department of Defense Index of Specifications and Standards (DoDISS) and supplement thereto.

2.1.1 STANDARDS - FEDERAL

a. US NAVY OPNAVINST 3960.16A: Navy Test, Measurement, and Diagnostic Equipment (TMDE), Automatic Test Systems (ATS), and Metrology and Calibration (METCAL) (2011)

b. FED-STD-H28 and FED-STD-H28A - Screw Thread Standards for Federal Services (1994 edition)

c. MIL-STD-130N – Identification Marking of U.S. Military Property (2007 edition) (Copies of Federal and military specifications, standards, and handbooks are available from the Superintendent of Documents, U.S. Government Printing Office, Washington, DC 20402-0001).

d. MIL-M-18058E - Machinery, Metal and Woodworking, Packaging of Military Standards (MIL STD)

e. MIL-STD-1472C - Human Engineering Design Criteria for Military Systems, Equipment, and Facilities

f. MIL-STD-129 - Marking for Shipment and Storage

g. MIL-STD-726 - Packaging Requirement Codes

h. MIL-STD-794 Parts and Equipment, Procedures for Packaging

i. MIL-L-25013 Grease, Aircraft, Ball & Roller Bearring to sensitive skin

j. OPNAVINST 5100.23 Navy Occupational Safety and Health (NAVOSH) Program and 29 CFR 1910 Manual Chapter 18, Hearing Conservation and Noise Abatement

k. U. S. Code of Federal Regulations, Occupational Safety and Health Act (OSHA) 29 CFR PART 1910 - General, 2011 edition.

((Application for copies shall be addressed to: the Superintendent of Documents, U.S. Government Printing Office, Washington, DC 20402-0001)

l. California Code of Regulations Title 22

m. NAVAIR 17-35POP-01, Metrology and Calibration Program Operations and Processes (POP) Manual, 1 November 2000

n. NAVAIR 17-35QAC-01B, Navy and Marine Corps Calibration Laboratory Audit/Certification Manual, 1 December 2006

o. NAVAIR 17-35MTL-1, Metrology Requirements List (METRL), 1 December 2013

p. NAVAIR 17-35TR-04 and NAVAIR 17-35TR-50, REQUIREMENTS FOR THE PREPARATION OF NAVAIR 17–50 SERIES INSTRUMENT CALIBRATION PROCEDURES

q. NAVAIRINST 13680.1C

2.1.2 LOCAL DOCMENTS:

a. FRCSWINST 11300.2F – Energy and Water Management Program (26 Aug 2008 Effective Date or latest).

b. FRCSW North Island Layout Drawings of Facility Engineering Layout Showing designated area for EMAS identified with adequate utility Facility/Aircraft power.

2.2 NON-GOVERNMENT DOCUMENTS: The following documents form a part of this document to the extent specified herein. Unless otherwise specified, the issues of these documents are those cited in the solicitation or contract. The product offered shall comply with the following codes and specifications where applicable. Unless a date or version is specified, the latest edition of the referenced publications in effect at the time of the bid shall govern. In case of a conflict between the requirements in this specification and those listed in the references, the supplier shall notify the TPOC.

2.2.1 American Society of Mechanical Engineers (ASME):

a. ASME Y14.5 - Dimensioning and Tolerancing (2009 edition). Application for copies shall be addressed to the; ASME International, Three Park Avenue, M/A 10 E, New York, NY 10016-5990.

2.2.2 International Organization for Standardization (ISO):

a. ISO 4414 Pneumatic Fluid Power

b. ISO 9000 Quality Management Systems – Fundamentals and Vocabulary, Third (3rd) Edition, dtd January 1, 2016 or latest version.

(Applications for copies shall be addressed to the International Organization for Standardization, Case Postale 56, Geneva, and Switzerland CH-1211)

2.2.3 NATIONAL ELECTRICAL MANUFACTURERS ASSOCIATION (NEMA)

a. NEMA ICS 1 - Industrial Control and Systems General Requirements, Latest Edition

b. NEMA ICS 2 - Industrial Control and Systems Controllers, Contactors, and Overload Relays Rated Not More Than 2000 Volts AC or 740 Volts DC (2000), Latest Edition

c. NEMA ICS 3 - Industrial Systems Factory Built Assemblies (2005), Latest Edition

d. NEMA 4 - Industrial Enclosures - Metal, Latest Edition

e. NEMA ICS 6 – Industrial Control and Systems Enclosures (1993 edition)Pg. 16 (13.16.3)

f. NEMA MG-1 – Industrial Control and Systems Enclosures (1993 edition) (Application for copies shall be addressed to the National Electrical Manufacturers Association, 1300 N 17th Street, Suite 1847, Rosslyn, VA 22209)

2.2.4 NATIONAL FIRE PROTECTION ASSOCIATION (NFPA)

a. NFPA 70 - National Electrical Code, (2017 edition or latest)

b. NFPA 79 - Electrical Standards for Industrial Machinery, (2017 edition or latest)

(Application for copies shall be addressed to the National Fire Protection Association, 1 Batterymarch Park, Quincy, MA 02269-9101)

2.2.5 NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (NIST), 2013 edition. Traceable Standard/Calibration

a. NIST 2013 edition can be found at: http://nvlpubs.nist.gov/nistpubs/ir/2013/NIST.IR.7298r2.pdf, and http://www.nist.gov/calibrations/sp250_series.cfm)

3.0 REQUIREMENTS: This section describes the minimum requirements for the procurement, design and on-site installation of a new FESEM at FRCSW, North Island, Building 469N. The contractor shall make all of the adjustments, replacements, modifications, upgrades, and pass all of the environmental, safety, and fire regulations according to the technical requirements included in this SOW in section 2.0. Specifications and requirements are as follows:

3.1 General Requirements: The system offered shall be new. A current model is defined as the manufacturer’s currently produced model, which, on the date this solicitation is issued, has been designed, engineered, sold, or is being offered for sale through advertisements or manufacturer’s published catalogue or brochures. Products such as a prototype unit, pre-production model, or experimental unit do not qualify as meeting the requirements specified herein. The system shall include all components, parts, and features necessary to meet the performance requirements specified herein. All parts subject to wear, breakage, or distortion shall be accessible for adjustment, replacement, and repair. The contractor shall not utilize U.S Government personnel, facilities, equipment, or consumable materials for any task related to the paid service provided, except as specifically identified and authorized by the contract.

3.1.1 New Developments: The contractor shall identify any new developments that would improve the efficiency, accuracy, or productivity of the equipment or would decrease its operating costs. The contract shall notify the KO and TPOC in order that the new developments may, at the Government’s option, be included in the system. Reports of such developments shall be address to the KO.

3.1.2 Measuring and Indicating Device Graduations: All measuring and indicating devices on the system shall be graduated in the metric system. Volts and Amperes shall be International System of Units (Metric).

3.1.3 Controls: All electrical and mechanical operating controls shall be located conveniently, to the operator's workstation(s).

3.2 Environmental Protection and Safety Requirements: The completed installation shall meet all applicable Environmental Protection Agency (EPA) and section 2.1.1.k restriction for materials classified as hazardous to the environment in effect on the date of contract. During the operation of the equipment at the final location, all equipment shall comply with all applicable EPA and section 2.1.1.k in effect on the date of contract regulating the emission of material hazardous to the environment. The contractor shall coordinate with TPOC, North Island regarding installation site approvals and environmental permits required by Federal, State, County, and Local Laws. For additional information, the contractor is instructed to contact the TPOC. Within 30 days from contract award, contractor shall provide in writing the make, model, capacity, footprint, mechanical, pneumatic, and electrical requirements of the equipment to the TPOC (CDLR A001).

3.2.1 Waste Disposal: Disposal of non-hazardous solid waste shall be the responsibility of the contractor. FRCSW shall assume all responsibility and associated liability for disposal of hazardous waste as defined in section 2.1.1.l

3.2.2 Disposal of old equipment: Unless stated otherwise, shall be the responsibility of the Government. Contractor to contact TPOC and obtain specific instructions in regards to location and latest regulation from the government for disposal of old equipment/parts/machinery

3.2.3 Safety and Health Requirements: All machine parts, components, fluids, mechanisms, and assemblies furnished for the FESEM whether or not specifically required herein, shall comply with all of the requirements of section 2.1.1.j and 2.1.1.k.

a. Mercury Restriction: The FESEM system shall not contain mercury or mercury compounds nor be exposed to free mercury during manufacture.

b. Asbestos Restriction: Asbestos and materials containing asbestos shall not be used on or in the FESEM system.

c. Lead: Lead and materials containing lead shall not be used on or in the FESEM system except electronic solder joints and otherwise stated.

d. Use of Polychlorinated Biphenyl (PCB): The use of PCB on or in the equipment is prohibited.

e. Lubrication: Means shall be provided to ensure adequate lubrication for all moving parts. Recirculating lubrication systems shall include a filter that is cleanable or replaceable. Each lubricant reservoir shall have at least a 24-hour capacity. Means shall be provided to indicate a low oil condition. Shall a low oil condition occur; the machine shall enter an emergency stop condition upon completion of the current operation. All oil holes, grease fittings, and filler caps shall be accessible.

f. Interchangeability: All replacement parts shall be interchangeable without requiring modification. Replacement parts are those that are subject to wear or failure such as gears, bearings, shafts, feed screws, drive belts, pumps, and seals. Electrical replacement parts shall include but not be limited to, motors, relays, fuses, switches, magnetics, pushbuttons, light bulbs, braking mechanisms, and solid-state devices. Tooling and accessories normally supplied as standard items shall also be considered replacement parts. Foreign-sourced replacement parts shall be interchangeable with domestically supplied components or be readily available from a domestic source.

3.3 Detail Tasks: The FESEM shall be manufactured with parts that are new, without defects, and free of repairs. The structure shall withstand all forces encountered during operation of the system to its maximum rating and capacity without distortion.

3.3.1 Surfaces: All surfaces shall be clean and free of harmful or extraneous materials. All edges shall be either rounded or beveled unless sharpness is required to perform a necessary function. The condition and finish of all surfaces shall be in accordance with the manufacturer's commercial practice.

3.3.2 Finish: The system shall be finished in accordance with the manufacturer’s commercial practice. If paint is used it shall be of the lead-free type.

3.3.3 Workmanship: Workmanship of the system shall meet all requirements specified herein and shall be of a quality equal to that prevailing among manufacturers producing system of the type covered by this purchase description.

3.3.4 Castings and Forgings: All castings and forgings shall be free of defects, scale, and mismatching. No processes such as welding, peening, plugging, or filling with solder or paste shall be used for reclaiming any defective part.

3.3.5 Fastening Devices: All screws, pins, bolts, and other fasteners shall be installed to prevent unintentional loosening. Fastening devices subject to removal or adjustment shall not be permanently installed.

3.3.6 Threads: All threaded parts, either US or SI, used on the machine and its related attachments and accessories shall conform to section 2.1.1.b and the applicable "Detailed Standard" section referenced therein.

3.3.7 Welding, Brazing, or Soldering: Welding, brazing, or soldering shall be employed only where specified in the original design. None of these operations shall be employed as a repair measure for any defective part.

3.3.8 Maintainability: The equipment shall be designed and manufactured to permit maintenance personnel to easily service the equipment using a minimal number of tools. All parts subject to wear, breakage, or distortion shall be accessible for adjustment, replacement or repair. Consistent with required maintenance and design of the system, the contractor shall provide any special tools required to service the Unit. The system shall be equipped with access covers to facilitate inspection, cleaning, and repair, or replacement of parts.

3.3.9 Stage. The FESEM shall be equipped with a 5-axes eucentric goniometer stage that has the minimum travel requirements specified in Table 1. The stage shall have a maximum sample weight capacity of 500g in any stage position. All axes of the system shall be actuated through a closed loop. Axes shall be machined to accept way bearings of a precise fit to their respective ways. The way bearings shall be an antifriction type and shall be provided with adjustable guides or bearings to maintain and adjust alignment of the table to the ways and prevent causing excessive loading of the feed drive motor. Antifriction, re-circulating ball type linear ways are acceptable. Axes shall meet the following requirements

TABLE 1. Minimum goniometer stage travel movements.

Axes Travel Range, minimum

3.3.10 Chamber: The chamber shall have twelve accessory ports on it, three of them for analytic application with take-off angle of 35 degrees, and the chamber shall meet the axes movement in section Table 1. Safety sensors for operation such as overheat, overload and over travel shall be mounted on the chamber and provide the audible alarm warning with on screen message. Chamber shall have a plasma cleaner for removal of hydrocarbon contamination from both sample and chamber. Integrated software control for user defined cleaning cycles without user interaction after starting the cleaning process. Chamber shall have an IR camera for viewing internal sample position.

3.3.11 Detection System. Detection system shall be able to perform parallel detection and process signals of multiple detector channels simultaneously. The system shall have the following detectors

a. In-lens Secondary Electron (SE) Detector with optically coupled photomultiplier for high efficiency

b. In-lens Energy Selective Backscatter (EsB) Detector with optically coupled photomultiplier for detection of energy and angle selective backscattered electrons

c. Everhart-Thornley Secondary Electron (ETSE): Chamber secondary electron detector (Everhart –Thornley)

d. Variable Pressure Secondary Electron (VPSE): High efficiency variable pressure SE detector

e. BackScatter Detector (BSD) Detector: Pneumatic retractable multi-mode solid state BackScatter Electron (BSE)-detector

f. Angle Sensitive Backscatter (AsB )detector: Cap-mounted multi-mode solid state BSE-detector

g. SCD detector: specimen current detector (SCD) for imaging electron absorbed current in the specimen

h. Infra Red (IR) camera for viewing sample in chamber

3.3.12 Vacuum System. Vacuum system shall be an automatic controlled pumping system, and oil free pump system. It shall also consists of turbomolecular pump and ion getter pump for ultrahigh vacuum in the column and the emitter region. The vacuum system shall have a range from 0 to 500 Pa ( Pascal), adjustable in steps of 10 Pa

3.3.13 Electron optics and performance. The system shall use a high resolution Schottky emitter gun and shall meet at least the following requirements

a. Electron Beam Resolution : High vacuum: 0.9nm at 15KV, 1.4 nm at 1 KV. Low vacuum: 3.0nm at 3 KV

b. BSE resolution : 1.2 nm at 1KV

c. Acceleration voltage range : 0.2KV – 30 KV

d. Probe current: It shall have a minimum probe current of 100nA

e. Magnification. The system shall be able to magnify the image from 8 to 2,000,000 times referenced to polaroid image format. It shall provide automatic function for focus, brightness and contrast

f. Beam decel (sample bias) capability

3.3.14 Scanning. The new FESEM system shall have the following scanning modes

a. Dual channel mode: The system shall display two different detector signals on computer screen at the same time.

b. Quad mode

c. Dual mag: The system shall be able to zoom in and out at different magnification levels and split the screen display into different windows. Images from different detectors can be displayed at different magnification.

d. Automatic focus control: it shall be an automatic coarse and fine focus control.

e. Automatic focus wobble: it shall provide an automatic assistance in aperture alignment, with adjustable amplitude and speed.

f. Focus compensation: Automatic compensation to minimize focus changes over the entire acceleration voltage range.

g. Tilt compensation: it shall correct the perspective foreshortening caused by scan of a tilted specimen.

h. Dynamic focus: it shall make the correction of focus on tilted specimens.

i. Drift correction: it shall provide a compensation for frame and image drift.

j. Beam shift: it shall make precise adjustment of image position at high magnification.

3.3.15 Computer. The computer of FESEM system shall meet the following minimum requirements:

· Windows 10 Enterprise LTSC 2021 (version 21H2) Operating System, or latest Window version that is approved by Navy

· The latest version of Microsoft Office with permanent license key

· The latest version of Adobe Acrobat Reader

· Intel Core i7 Processor or latest model

· Two (2) 1 TB hard-drives storage capacity\

· A CD/DVD Burner

· Ethernet Networking Card

· USB ports

· Laser color printer

· Two (2) 24” or larger “ LCD or LED monitors

3.3.17 The Elemental Analysis System. The FESEM shall be equipped with an elemental analysis system (EAS) that includes an elemental dispersive spectrometer, digital controller/analyzer, all necessary cables, wiring, flanges, and software program that work with Window operation system of the FESEM SYSTEM’s computer in section 3.3.16 to perform elemental and image analysis during FESEM operation. The EAS software shall provide spectrum acquisition, point ID, fast x-ray mapping, feature measurement, spectral imaging, spectral matching, spectral quantification, line scan, and automatic peak ID. The EAS spectrometer shall have a 30mm2 window, be a dry SDD type (LN2 free), have a 127 eV resolution (or better) at Mn Kα, and capable of detecting all elements including Be and higher atomic numbers. This system shall have the following function :

a. Drift Correction

b. Background removal and elimination of peak overlaps

3.3.18 Electrical System. The system shall conform to section 2.2.4.b. The existing source power available at the facility is two hundred and eight (208) Volt, sixty (60) Hertz (Hz), 30 amp. The FESEM system shall not exceed this in-house capacity and shall connect with a standard electrical plug. The machine’s electrical system shall be tolerant of fluctuation of plus or minus ten percent (±10%). The electrical system shall be complete, including any electrical transformer(s) that may be required to modify the existing source voltage to the proper operating voltage of the equipment. A properly rated, and fused, single disconnect device shall be utilized on the machine with means of lockout in the “Off” position only.

a. Electrical Enclosure. Assembly of the electrical enclosures shall conform to section 2.2.3.e standards and shall be designed for an indoor non-hazardous location. All electrical components shall conform to applicable section 2.2.3.a. The system shall be provided with interlocks on its electronic cabinet that shall instantly remove power from the system when the door is opened in accordance with section 2.2.4.b.

3.3.19 Arc Flash Protection. The machine enclosures shall be marked for arc flash in accordance with section 2.2.4.b

3.3.20 Solid-State Components. Electrical devices used to power electrical servo of control voltage delivered to solid-state electrical components shall be solid-state devices. Such devices shall handle the electrical load imposed by operation of the machine to its maximum capability. The use of selenium in solid-state components shall be restricted to those devices that protect other solid-state components from voltage surge.

3.4 Software: FESEM software shall have automated control of all FESEM functions such as auto-focus, auto brightness, auto wobble, etc. It shall control the vacuum system. It shall be able to produce two or more live images from any installed detectors. It shall also allow for the mixing of two signals from any two installed detectors. Shall provide image capture and mosaic function and feature measurement and image processing capabilities.

3.5 Marking on Instruments, Control Panels, and Plates: All words on plates shall be in the English language. Characters shall be engraved, etched, embossed, or stamped in boldface on a contrasting background. All plates shall be corrosion resistant.

3.5.1 Lubrication Plate. A lubrication plate shall be permanently and securely attached to each machine. The plate shall contain the following information:

a. Points of Lubricant Application

b. Servicing Interval

c. Type of Lubricant

d. Viscosity

e. Military or Federal Specification for Each Lubricant (If available)

f. Size and Type of Each Lubricant Filter

3.5.2 Nameplate. A nameplate shall be permanently and securely attached to each component. The nameplate shall contain the information listed below. If the system is a special model, the model designation shall include the model number of the basic standard machine and a suffix identified in the manufacturer's permanent records.

a. Nomenclature

b. Manufacturer’s Name

c. Manufacturer’s Model Designation

d. Manufacturer’s Serial Number

e. Power Input (Volts, Total Amps, Phase, Frequency)

f. Contract Number

g. Date of Manufacture

3.5.3 Identification Marking of Military Property. An Item Unique Identification Marking (IUID) shall be provided in accordance with section 2.1.1.c and all applicable documents within the standard with Machine Readable Information (MRI) for item identification marking and automatic data capture. The application of Human Readable Information (HRI) shall be used in combination with MRI and free text. This tag shall contain the information listed in paragraph 3.6.2 Nameplate.

3.5.4 Technical Data (CDRL A002/ CDRL A003). All documentation, operation manuals, maintenance manuals, programming manuals, student training materials, drawings, vendor literature, laminated note cards, metal name and service plates, service bulletins, upgrade bulletins, and all associated charts/graphs, shall be written in the English language and be grammatically correct. All technical data shall identify manufacturer's name, model number, serial number and contact number. The technical data shall be delivered with the system to the TPOC. The system schematics & layout (CDRL A003) shall be furnished in both AutoCAD and Portable Document Format (PDF) formats.

3.5.5 Manuals (CDRL A002)/ Drawings (CDRL A003). The contractor shall furnish three (3) hard copies of all technical, training, and maintenance manuals and drawings containing all information in compliance with modifications of the system. The manuals shall provide the data necessary for the programming, operation, and maintenance of the machine and ancillary equipment. The contractor shall also furnish one (1) digital copy of the above technical manuals and drawings in PDF file format or Excel on CD-ROM(s), as appropriate. The digital manuals and drawings shall be organized, indexed and referenced similar to the equivalent hardcopy format (i.e. volume, manual, section, etc.).

3.5.6 Training Manuals (CDRL A002). The training manuals shall cover, in detail, all phases and cycles of operation such as start-up, maintenance, idle, shut down, troubleshooting, programming, running programs, printing, re-starting systems, etc. Manuals shall include the vendor's contact information, parts list, preventive maintenance cycles, all information and documentation necessary to properly service, operate, maintain, adjust, and perform all functions within the equipment.

3.5.7 Maintenance Manuals (CDRL A002). The maintenance manuals shall properly identify in detail the extent of preventive maintenance, repair, and/or troubleshooting of equipment. The manuals shall have mechanical, electrical and electronic schematic, wiring diagram, block diagram and electrical pin in and out in details and electrical box interface in details. A complete list of all materials, chemicals, substances, and parts used for the maintenance and operation of the equipment shall be provided to the TPOC.

3.5.8 Calibration Manuals (CDRL A002). The calibration manuals shall properly identify in detail the extent of calibration, part numbers, model numbers, and manufacturer used. A complete list of all materials, chemicals, substances, and parts used for the calibration, or that need to be calibrated within the equipment shall be provided to the TPOC ninety (90) days prior to installation of equipment. Manuals shall be provided at the time of delivery and/or before acceptance of equipment.

3.5.9 Onsite Adjustment (CDRL A002). All adjustments made to the equipment during testing, acceptance, and warranty shall be minimum for one year. Updated manual with all adjustments, updates, or changes made to the system shall be provided to the TPOC.

3.5.10 Test Procedure Report (CDRL A004). Two (2) copies of the manufacturer's standard performance, operational, alignment, magnification and software , in accordance with section 3.3 , section 3.4 and table 1 shall be submitted with the contractors' proposal for government review. The TPOC will inform the contractor of the acceptance or the rejection of test procedures.

3.6 Contractor Installation Responsibilities. The contractor shall provide all materials, labor, transportation and rigging support for complete installation of the FESEM system and all associated tooling and components unless otherwise stated in this specification.

3.6.1 Training. After satisfactory completion of acceptance testing of the system, the vendor shall provide maximum five (5) working days of workforce familiarization training between 8:30 am and 4:30 pm Pacific Standard Time (PST). Training shall be for maximum of twenty (20) Government employees who are engineers, maintenance and calibration personnel. It shall be performed at the customer’s facility. Training shall include both classroom and hands-on portion, and shall utilize as-built drawings and manuals provided under this contract. All printed training aids (CDRL A003) shall become the property of the government. The contractor shall provide the TPOC with the following training equipment with full software license permissions/ownership.

3.6.2 Operator Training. Operator-level training shall include the following:

a. Operating procedures, to include: how to overcome common malfunctions that are commonly encountered in user-level engagement with the machine.

3.6.3 Maintenance Training. Maintenance training shall be provided for a minimum of two (2) mechanical and two (2) electrical/electronic maintenance personnel and shall include the following topics:

a. Mechanical Training.

· Mechanical system of the SEM system

· Review of mechanical schematics and drawings

· Component location and function

· Troubleshooting procedures and techniques

· Repair procedures including disassembly and assembly

· System maintenance and servicing

· Set up, adjustment and calibration

· Preventive maintenance procedures including lubrication points, type of lubrication and recommended frequency

· Axes alignment

· General operation

b. Electrical Training.

· Electrical and electronic components and system of the SEM system.

· Review of electrical and electronic system drawings and wiring schematics

· Troubleshooting procedure and techniques

· Electrical and electronic equipment service and repair

· Location of components and their function, adjustment procedure, frequency and calibration Procedures

· Preventive maintenance and procedure and frequency

· Controller maintenance and troubleshooting

· Controller programming including parameter restoration from backup

· General operation

3.6.4 Calibration Training. Calibration training shall consist the following:

a. Component location and function

b. Setup for calibration

c. Adjustment

d. Calibration procedure

4.0 Preventative Maintenance (PM) and Emergency Repair (ER) Services:

3.0 4.0

4.1 The Contractor shall provide on-site PM, inspection and ER Services on the new FESEM and related ancillary components. Government requests to contract periods of performance (POP) consisting of a Base Year, effective 24 months after date of contract award for one year, and two subsequent one-year option periods. The exercise of Option Years is a unilateral right of the Government. The inclusion of option year contract line items in any resultant contract does not constitute any guarantee by the Government to the Contractor.

Base Year: TBD Option Year 1: TBD Option Year 2: TBD

4.2 The Contractor is required to have full technical knowledge of the referenced equipment, and must be able to perform all work in compliance with the Original Manufacturer’s (OEM) technical specifications.

Factory trained service engineers are required to be furnished that have full knowledge of the equipment to be serviced. The Contractor shall have OEM spare parts that are immediately ore reasonably available for any and all necessary maintenance and repairs compliant with current commercial practices and in accordance with this SOW. Maintenance costs shall include all travel, labor hours, labor costs, test equipment and consumable parts.

4.3 Telephone/Email Technical Support:

The Government requires the contractor to provide telephone/email technical support to be available to the FRCSW end-user of the equipment within four (4) hours of notification, on Monday through Friday, during the hours of 0700-1400, excluding all federal holidays.

The FRCSW end-user is authorized to obtain telephone/email assistance. The date and time will be noted in a government log reflecting all maintenance calls, and any exceptions as stipulated therein by the TPOC.

In the event FRCSW determines that the equipment is not functioning properly or has failed to operate, the Contractor will be contacted via telephone and/or email for technical support. If the issue(s) cannot be resolved via telephone/email, the Contractor is required to have a technical representative on-site to effect repairs within seventy-two (72) hours (see 3.10.5).

4.0 3.9.0 3.9.1 3.9.2

4.4 Preventative Maintenance (PM):

The Contractor is required to perform one (1) PM and provide one emitter tip change for each twelve (12) month contract period. The Contractor is required to provide all necessary equipment to perform the PM including, but not limited to: Emitter tip, tools, diagnostic and alignment devices, meters, hardware, reference standards, and software. The PM scheduling shall be determined by mutual agreement between the TPOC and the Contractor.

PM services are to be performed in accordance with the OEM’s technical specifications.

PM and Cathode Change labor, material, and services are to include all labor and travel costs associated with the PM service.

In the event that the TPOC does not call to set up the PM, the Contractor is required to contact the end user to ensure the PM is accomplished within the last four months of the contract period.

The TPOC and the end user are the only Government representatives authorized to place service calls for PM’s.

The resultant purchase order will contain Contract Line Items (CLIN) for the PM and emitter change-out services.

4.5 Repair Services (RS):

If operation of the equipment cannot be restored as a result of the telephone/email assist, a contractor field technician is required to be on-site of the FRCSW facility within seventy-two (72) hours following the initial call after the failure of the telephone assist.

Repair services, labor, and travel costs associated with any repair service visit are to be included in the cost.

Parts: This contract contains a CLIN for parts in the event that they are required as a result of an approved repair service. Parts required for an RS shall be reviewed and approved by the FRCSW TPOC. The Contractor shall not order parts without discussion and approval from the FRCSW TPOC. Replacement parts shall be new.

Parts Pricing: The Government requires that prices charged for any and all authorized parts will be the Contractor’s current standard commercial pricing. The Government reserves the right to request from the contractor documentation that confirms the validity of commercial pricing.

4.6 Maintenance Service Report (MSR):

Following each PM inspection or Emergency Repair (ER) visit, the Contractor is required to provide the Government with a detailed MSR. The report shall include, but not limited to, date and time notified of required service, date and time of service technician arrival, Technician Name, Type/Model/Serial Number of equipment serviced, time spent on service/repair, description and cause any malfunction, parts replacement list, time requires to acquire necessary parts, general procedure to attain equipment functionality, and date and time of the system/equipment returned to full operational functionality. Any discrepancies should be noted along with a list of parts and/or services suggested to return or keep the equipment fully operational. Additionally, the Contractor is required to affix a tag on equipment upon completion of a PM inspection. The tag may either be a “sticker” or “hang tag.” At a minimum, the tag shall contain the name of the contractor, technician performing inspection, and date of inspection printed legibly.

4.7 Periodic Maintenance Checklist (PMC):

Upon completion of a PM inspection or ER service, the Contractor is required to provide a “checklist” detailing verification of system operability. The checklist verifies condition and operation of the system. Relevant performance measurements shall be noted in the checklist and discussed with the end user.

4.8 Electronic Reports:

Electronic copies of the MSR and PMC reports are required to be provided to the TPOC via email within seven (7) days of completion of the service. The TPOC will fully inspect these reports and submit for invoice and payment processing.

4.9 Other Requirements:

There shall be no additional charges, other than those specified per the CLINs, regardless of when the maintenance is performed, the time spent by maintenance personnel after arrival on-site (or lodging while awaiting the arrival of additional maintenance personnel, equipment or delivery of parts), or for transportation to, or from, other sites. Overtime work, or work performed outside of above-specified business hours (see 3.10.3), are not authorized under the contract. The Contractor is cautioned not to exceed the amount specified herein, without a contract modification or written authorization from the Commander Fleet Readiness Center (COMFRC) Procurement Group Procurement Contracting Officer (PCO).

The Contractor shall ensure that all personnel involved with the scope of these PMs and ERs are aware of the monetary limitations of the FFP order. In the event the Contractor is confronted with uncertainty related to performance, or this procurement, they are instructed to immediately notify the PCO and TPOC, who shall contact the end user.

5.0 Deliverables:

5.1 Hardware: Contract shall provide FRCSW FESEM with all necessary components in section 3

5.2. Software: Contract shall provide the firm ware and software are installed into the computer. It includes the executive files of application software program and backup image disk

5.3 Data and documents in section 3.5

6.0 QUALITY ASSURANCE:

6.1 Validation of Equipment: Contractor shall calibrate, align, test, perform consistency, heat, duration, stress, integrity tests and any other tests required to ensure system is working properly and meeting all guidelines and requirements at the sites, provide certificates for the tasks such as calibration certification (CDRL A005).

6.2 Responsibility for Inspection. The contractor shall be responsible for the performance of all inspection requirements specified herein. Except as otherwise specified in the contract or purchase order, the contractor may use their own facility for the performance of the inspection requirements specified herein, unless disapproved by the Government. The Government reserves the right to witness any inspections set forth in the purchase description where such inspections are deemed necessary to assure supplies and services conform to prescribed requirements.

6.2.1 Responsibility for Compliance. All items must meet all requirements of sections SOW.

6.2.2 Classification of Inspections. The inspection requirements specified herein are classified as follows:

6.2.3 Contract quality assurance inspection (Origin) (see 4.5).

6.2.4 Final Inspection/Acceptance test (Destination) (see 4.6).

6.3 Inspection Conditions. All inspections, tests, and examinations shall be performed in an indoor facility with ambient temperature conditions in the range of fifty-five degrees Fahrenheit (55° F) to one-hundred degrees Fahrenheit (100° F) and ten percent (10%) to ninety-five percent (95%) relative humidity.

6.4 Contract Quality Assurance Inspection. Contract quality assurance inspection shall be applied at the contractor’s facility prior to being offered for acceptance under the contract. The system and all peripheral equipment added to the machine shall be fully assembled and perform all functions in accordance with this specification. Quality conformance inspection shall consist of the examination in 4.7 and the tests in 4.8. The machine shall pass the examination, all tests, and contract quality assurance inspection to be acceptable for shipment.

6.5 Final Inspection/Acceptance Test (Destination). Final Inspection and acceptance test shall be performed on the system to ensure conformance with this purchase description. The acceptance test shall be performed only after the system is installed at its final location. The acceptance test shall consist of the examination in 4.7 and all tests in 4.8. The system shall pass the examination and all tests to be accepted.

6.6 Examination. The system shall be examined for design, dimensions, set up, materials, components, electrical equipment and workmanship to determine compliance with the requirements of this specification.

6.7 Tests. Unless otherwise specified all programs, instruments, materials, and tools required to perform and evaluate the tests shall be furnished by the contractor and shall be calibrated and meet the following requirements:

6.7.1 Operational Test. The FESEM system shall be operated in the standby mode not less than two (2) hours. Proper operation of all controls, probe current, accelerating voltage, chamber and column pressure at high vacuum and low vacuum, stage movement and calibration, adjusting mechanisms. During operational testing the control functions and machine response to commands for slide motions, magnification and resolution functions shall be checked. The machine shall be run in each mode of operation to test the machine’s response to command data. Three (3) failures in a row to complete the run test may be cause for rejection of the entire system. After successful completion of the operational test, over-travel limits (programmed stops and hard stops), emergency stop devices, and accessories shall be verified during the trial period. The safety limit stops shall be checked by attempting to exceed the limits of travel of each moving axis.

6.7.2 Detection Test. Each detector in section 3.3.12 shall respond properly to software functions in section 3.4 and meet requirements in section 3.3.15

6.7.3 Scanning test. Each scanning mode in section 3.3.16 shall work properly to software functions in section 3.4 and requirements in section 3.3.15

6.7.4 Performance Test. Five demonstration test shall be run and meet all requirements in section 3.

7.0 POST AWARD CONFERENCE: The contractor shall conduct a post award meeting with the TPOC and Contracting Officer to provide a Plan of Action and Milestones (POA&M) report (CDRL A001) to identify dates for contractor performance of all major events, from the time of contract award to final completion of all the contractual requirements. The report must be reviewed and approved by the Contracting Officer. The milestones shall be prepared using a recognized project management technique (preferably Microsoft Project). The TPOC shall be notified prior to any changes being made to the POA&M (CDRL A001). The TPOC and Contracting Officer shall approve all changes prior to the changes being made. Contract shall not exceed one (3) years, warranty plus two option years. The plan review shall consist of the following:

5.

6.

7.

7.1 Milestones(CDRL A001): Contractor to provide a weekly update to the TPOC in regards to progress of installation, tests, problems, issues, and scheduling milestones at the project site, in building

7.2 Program Scheduling (CDRL A001): The Contract shall prepare and submit a project plan or schedule chart that delineates itemizing project tasks from contract award to install completion, to include engineering, design, manufacturing, delivery, training, and acceptance.

7.3 Program Review (CDRL A001): The Contractor shall be responsible to prepare and submit a program review to the TPOC for approval. The program review shall consist of:

7.3.1 Engineering Documentation

7.3.2 System Documentation (CDRLs).

a. Validation Report (CDRL A004)

b. System User’s Manuals (CDRL A002)

c. Calibration Procedures (CDLR A005)

d. Maintenance / Corrective Maintenance Manuals (CDRL A002)

e. Provisioning Technical Documentation (CDRL A002)

f. Schematics/Drawings (if required) of the Electrical and Mechanical (CDRL A003)

7.3.3 Validation Plan and Procedure (CDRL A001): To include the necessary fixtures and tools to be used during the validation procedure (validation to be done at the factory and at FRCSW). Any and all tools/fixtures/parts utilized to perform the validation of the system shall be included as part of the system or package of this contract and given to the TPOC upon completion of the project at no additional cost to Government.

8.0 SECURITY AND BASE ACCESS: Upon award, the Contractor shall request from the TPOC all documentation to request site clearance for all contractor personnel. This documentation shall be required within five (5) days following receipt of the Notice to Proceed, by the Contractor. The Contractor shall send the clearance request to the TPOC, at FRCSW. (SEE BELOW). Contractor to verify with TPOC at the time of award for the latest security rules and guidelines. Any and all costs incurred to secure entrance on to the base are at no cost to the government and the contractor’s responsibility.

6.5 7.5 8.5

8.1 Vetting: Vetting will necessitate advance planning and the timely exchange of the cited and/or required information, with the TPOC. For clarification, the procedure requires a minimum of fifteen (15) business days following receipt of the Personally Identifiable Information (PII) and may be subject to heightened requirements, without advance notice. Contractor shall contact TPOC for the latest forms required. It is the responsibility of the contractors to pass the vetting process.

8.2 Check-In: All personnel will be required to “check-in” at the Visitor Control Center (Bldg., 680), which is located at the Main Gate point-of-entry to Naval Base Coronado (NBC), at NAS North Island, San Diego, CA, between the hours of 0630-1430. Following receipt of a clearance, personnel will then be required to coordinate with their sponsor (e.g. TPOC) and obtain daily badges through the FRCSW Quarterdeck, located in Building 94, green daily badges are to be returned to the Quarterdeck at the end of business day before leaving the base.

8.3 All personnel with no exceptions, whether they are internally vetted, or represent the KO, shall report to the FRCSW, Building 94, and Quarter Deck every day, present their ID and/or dBids card and retrieve their daily green badge. Personnel found within FRCSW not wearing the green badge and their dBids card shall be requested to leave the job site at no expense to the Government and not return until they have procured their Green Badge and dBids card. The Green Badge has to be picked up every morning and dropped off at end of work-shift every day, no exceptions. Failure to return or lost green badge or dBids card, can result on blocked access to the military base.

8.4 Technical Point of Contact (TPOC): Project Manager; Thanhlan Nguyen; PH: (619) 545-7707; thanhlan.h.nguyen.civ@us.navy.mil Equipment Engineer; Vu Dao; PH: (619) 545- 3974; vu.t.dao.civ@us.navy.mil Fleet Readiness Center Southwest, Bldg. 90-2, Code 6.3.1., PO Box 357058, NAS North Island, San Diego, CA 92135-7058.

9.0 WARRANTY: A warranty shall be provided for a minimum of twelve (12) months (e.g. 365 Days) that follows “start-up, system(s) testing, and acceptance/recognition of project completion,” by the Government and final payment acceptance by the contractor. The warranty shall cover all parts/labor of the identified and accepted system and equipment. This means, parts will be defect free for one-year under normal operating conditions from the date of acceptance, not the manufacturing or installation date. Replacement of said parts shall be at no additional cost to the Government. This shall include: shipping, handling, and any removal or set up involved in the replacement of said parts. Additionally, the warranty shall name FRCSW as the owner of the system and/or related structures.

9.1.2 Availability: The Contractor’s technical staff must be available to provide support either in-person, or via telephone at no additional charge and/or cost, to the Government. Additionally, it is incumbent upon the Contract that support of specific issues and/or general inquiries must be provided within twenty-four (24) hours, following notification by the Government.

10.0 ASSUMPTIONS, ISSUES AND LIABILITIES: The Contractor shall be expected to provide “supplies and services” in such a manner, that minimizes the likelihood and/or potential for disruption of production activities, at the Government facility. Work schedules that are influenced by either a federal holiday or shutdown period will be initiated or resumed on the next regularly scheduled workday of the Government.

10.1 Shipment and Storage: The Contractor shall be responsible for the shipment and storage of all tools, material, and supplies needed to complete all requirements that are specified in the subject order’s SOW. When required and/or identified as a component of Contractor performance, the TPOC will be responsible for providing a “lay-down” area. However, any and/or all related security measures and the associated costs are the sole responsibility of Contractor.

10.2 Additional Costs: FRCSW shall not be responsible for any additional costs associated with an option or addition that is not formally identified through the issuance of an amendment or modification, by the applicable Government contracting activity.

10.3 Monetary Limitations: The Contractor will insure that all personnel involved in the scope of this work order are aware of the monetary limitations.

INSTALLATION RESPONSIBILITIES

Government Contractor

() (XX) a. Furnish labor and material handling equipment for off-loading and placing item on foundation.

() (XX) b. Provide the installation hardware (anchor bolts, nuts, etc)

() (XX) c. Set and rough level the machine on its foundation.

() (XX) d. Level and align machine.

() (XX) e. Provide all necessary materials required to connect machine to the provided utilities and perform hookups.

() (XX) f. Provide all necessary materials, tools,…