SOW_14-4H8_Programmable_Furnace_System.doc

STATEMENT OF WORK (SOW)

DMEA 14-4H8

26 June 2014

1.0 SCOPE:

1.1 TITLE: Programmable Vacuum / Pressure Furnace System

1.2 APPLICABILITY: DMEA Package Assembly Substrate (PAS) Lab

1.3 BACKGROUND: The furnace in the Package Assembly Substrate (PAS) lab is over 15 years old and has reached its end of life support by the manufacturer. Replacement parts for this furnace are no longer being manufactured and have become obsolete and/or unavailable. If the furnace fails and no replacement components are available, there is a high risk of not meeting production requirements. A new furnace will allow the PAS Lab to assure its mission capabilities are maintained by fulfilling its customers’ requirements.

1.4 PURPOSE: Purpose of this effort is to purchase a Programmable Vacuum / Pressure Furnace System.

NOTE: The information described within paragraphs 1.0 through 1.4 above is given for information only and has no contractual effect.

2.0 REFERENCED DOCUMENTS:

2.1 GOVERNMENT FURNISHED FACILITIES/ACCESS:

3.0 REQUIREMENTS:

3.1 GENERAL REQUIREMENTS:

3.1.1 The contractor shall report ALL labor hours (including subcontractor labor hours) required for performance of services provided under this contract for the Defense Microelectronics Activity (Other DoD) via a secure data collection site. The contractor is required to completely fill in all required data fields using the following web address: http://www.ecmra.mil.

Reporting inputs shall be for the labor executed during the period of performance during each Government fiscal year (FY), which runs October 1 through September 30. While inputs may be reported any time during the FY, all data shall be reported no later than October 31 of each calendar year, beginning with 2014. Contractors may direct questions to the help desk at http://www.ecmra.mil.

3.2. TASK REQUIREMENTS: Requirement for this task is to purchase a Programmable Vacuum / Pressure Furnace System.

3.3.1 Requirement:

The contractor shall provide a Programmable Vacuum Furnace that meet the following requirements:

System Performance Specifications:

Temperature range:

Room temp to 500ºC

Thermal Work Zone:

35 in2 maximum

Temperature Control Resolution:

1 ºC

Thermal Deviation in work zone:

5-20 ºC

Heating Method:

Removeable resistive graphite fixture

Forced cooling:

Water jacket cooling and N2 purge

Minimum vacuum level:

<50 millitorr

Internal Vacuum Pump:

Two-stage, rotary vane, 13 CFM @ 60 Hz

Process Chamber:

Water-cooled 304 SS with aluminum lid, 12 inch inside diameter, 10 inch deep.

Control System Specifiations:

Computer System:

IBM Compatible PC

Operating System:

Microsoft Windows

Operator Interface:

15-inch color LCD touch-screen

Programmer Interface:

Full PC keyboard with trackball

Security and user logon:

Windows-based security access

Time-based profiling:

1 second increments to 100 hours

Temperature and pressure:

Set level and ramp rate automatic control, multiple

Ramps and dwells

Process profile display:

Digital plus real-time graphing on LCD

Data logging:

Automatic real-time file logging

Profile creation:

Windows text editor

Profile storage:

Unlimited number and windows directory based

Maintenance mode:

Manual access for tuning and troubleshooting

Error sensing:

Water flow, gas inlet pressure, thermal limits, vacuum

Level, lid open, profile faults, thermocouple out, and

Chamber pressure

Utilities:

Electrical:

208-240 V, 60 Hz, single phase, 60 Amps, 13.2 kW

Peak, 5 kW average

Process Gas:

Dry N2 @ 75 psig, 3/8 inch minimum inside diameter

Line

Chamber exhaust:

15 CFM average

Vacuum pump exhaust:

5 CFM average

Cooling water:

2 GPM @ 30 psig, 20-25 ºC with gravity drain

3.3.1.1 Accessories:

The contractor shall also provide the following accessories and services:

Cooling water chiller and pump with the following characteristics:

Cooling capacity:

12 kW @ 60 Hz

Dry vacuum pumping system with the following characteristics:

Dry primary pump:

Multi-stage roots primary pump, 8.2 CFM @ 60Hz

Multiple zone temperature recording with the following characteristics:

Provide real-time graphical display and logging of the four sheathed thermocouples with each profile. System must permit monitoring of component temperatures and heater plate temperature.

Moisture level recording with the following characteristics:

System must include a moisture monitoring system for the process atmosphere.

Oxygen analyzer with the following characteristics:

An oxygen monitoring system consisting of long-life zirconia oxygen sensing unit for the process atmosphere. Oxygen levels should be displayed on a stand-alone portable control unit.

Measurement range:

10-20 ppm to 100% O2

Accuracy:

±1% of actual oxygen concentration

Measurement precision:

±0.5% of the reading

Response time:

1-4 seconds for a 90% step

Flux Trap with the following characteristics:

System must include a Flux trap to prevent flux from entering the piping system and vacuum pump where the trap is piped directly to the process chamber upstream of the vacuum and exhaust circuits. The containment vessel is to be a two-piece clamped body design and should contain a replaceable polyester felt particulate filter capable of trapping particles larger than 10 microns in size at an efficiency of 98%.

Locking Castors:

Four heavy-duty locking swivel castors for the furnace.

Equipment installation and training with the following characteristics:

The contractor shall install the system at a mutually agreed upon time, providing all plumbing fittings and components to help facilitate the water and gas connections to the furnace. The contractor must ensure that all necessary connections, including gas, electrical and water if required to successfully operate the system have been properly installed by DMEA. The contractor shall make ready for use and certify the system ensuring that it meets all factory published standards and operating specifications. After installation, the contractor shall provide technical training to DMEA employees to be able to properly operate, process, and service the system. Training must be for at least 8 hours.

Consumable supply kit for one year operation with the following characteristics:

A kit that includes supplies required for one year of operation. It should include replacement thermocouples, o-rings, insulators, fuses, springs and instructions for installation.

8” Tooling Assembly:

The contractor shall work with DMEA personnel to design and provide variouscavity quantities to fit up to seven different DMEA ceramic packages for AUSN LID SEALING.

Non-Recurring Programming and Set Up:

In order to provide specific tooling, the contractor shall setup and program CNC machine to machine the tooling needed for DEMA.

Process Development:

The contractor will work with DMEA staff to transfer existing model MV-2200 Lid Seal Profiles to the new model using tooling listed above. Objectives include meeting exterior fillet requirements, minimizing voids, and to limit profile time. The contractor shall optimize tooling design according to DMEA input. DMEA shall provide existing MV-2200 profiles and all package materials for development testing. The contractor shall load developed profiles into the new model and provide a report with X-Ray results to DMEA.

3.2.2 Delivery: The contractor shall deliver the Furnace and related equipment to the following address within 10 weeks of award.

Defense Microelectronics Activity

DMEA/MEBC

4234 54th Street

McClellan Park, CA 95652.

Upon delivery, the Furnace will be visually inspected by DMEA for any physical product defects from shipping or otherwise. If any product defects are recognized during such inspection, these conditions will be noted, the shipment will be rejected, and the contractor will be notified of such for the purpose of product replacement.

3.2.3 Installation

The contractor shall provide installation for the Programmable Vacuum / Pressure Furnace identified above. The contractor shall provide complete installation of the Furnace to a fully-functional state-free of defects. The contractor shall provide Electronic and/or Hard Copy manuals for all equipment in English at the same time or following the installation within 4 weeks of item delivery.

3.2.4 Maintenance

The contractor shall provide preventative maintenance functions information at the time of setup. This includes inspection, setting and calibration of the machine, and any other tasks needed to properly maintain the machine.

3.2.5 Warranty: Commercially available warranty.

4.0 POINTS OF CONTACT:

DMEA / MEEC Contracting Division

Attn: Joseph Hetrick

Ph: 916-999-2745

Email: joseph.hetrick@dmea.osd.mil

5.0 Security: Contractor personnel requiring access to DMEA facility shall provide proof of citizenship in accordance with the DMEA visitor approval process in effect at the time the visit is requested. The on-site contractor personnel escorted by DMEA employees and will be issued a visitors badge each day while on site and shall return their badge to DMEA security personnel at the end of the day. Any contractor personnel showing up and requiring access without a pre-arranged badge request shall not be allowed to access the DMEA facility. The contractor is required to provide advance notification prior to conducting any on-site inspection, installation or maintenance. A twenty-four (24) hour minimum notice during normal business hours shall be given. All installation and maintenance work shall be performed by US citizens.