Final_ Laser Ablation System Technical Requirements.doc

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193 nm ArF Excimer Laser Ablation System
Solicitation number
6-S176-Q-00355-00
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This is a technical requirements document for a 193 nm ArF Excimer Laser Ablation System solicitation issued by Argonne National Laboratory (ANL), a Department of Energy Office of Science facility. The solicitation (6-S176-Q-00355-00) seeks offers for one complete laser ablation system including delivery, installation, calibration, supervision, and on-site operator training to be delivered FOB destination to Lemont, Illinois 60439. The procurement will be evaluated on a Lowest Price, Technically Acceptable (LPTA) basis, requiring offerors to demonstrate compliance with minimum technical specifications outlined in the solicitation documents.

Offerors must submit a complete quotation package including the completed ANL-70 Request for Quotation form, signed ANL-70B Pre-Award Information and Representations and Certifications, the LPTA Addendum to Supplier Quote, technical documentation proving compliance with stated requirements, country of origin certification, and lead time information from purchase order receipt to final delivery and installation. Country of Origin must comply with Buy American requirements under FAR 52.225-1, requiring domestic content of at least 60 percent (65 percent for 2024-2028 deliveries, 75 percent for 2029 and beyond). Offerors must clearly identify any exceptions taken to the stated requirements with specific references to applicable documentation articles.

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Purchase Req G6-182057

Lowest Price Technically Acceptable – Procurement Strategy

Dated 7/17/2026 – Addendum to Supplier Quote

(TO BE FILLED OUT BY ALL OFFEROR’S – areas in red below) PROCUREMENT DESCRIPTION: This procurement is to purchase a Laser Ablation System, including installation, calibration, supervision, and on-site operator training.

1. Delivery at ANL is required by September 10, 2026, due to fiscal year end funding requirements. Supplier to provide its best schedule including delivery and installation.

a. ___________________(Manufacturing Company Name) will provide all items no later than ______________. If not met, Argonne reserves the right to cancel this order in its entirety with no additional charges or penalties.

2. Laser Ablation Wavelength: 193 nm (Longer wavelengths are not acceptable as they will generate less reproducible ablation.)

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

3. The sample chamber must deliver single pulse response times suitable for fast mapping or isotopic / bulk concentration work (<5 to 2500 ms) without the need to change the inner aerosol extraction cup.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

4. Helium entry and extraction points on the sample chamber must be the same for all sample cell configurations and must be inlet/outlet reversible for left- or right-hand ICP-MS introduction.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

5. The sample chamber’s aerosol extraction cup must be mounted on a Z-stage independent of video microscope focus with at least 2 mm movement and dynamic topography compensation.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

6. Must include a software-integrated energy meter at the sample plane plus an integrated energy meter with the laser source.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

7. Sample chamber must include a demountable frame-based sample holder supporting 1 inch rounds, 30 mm rounds, ½ inch rounds, sections, microscope slides, and open trays.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

8. Must use ArF premix gas with [F] < 0.2% and be supplied with regulator, safety rupture disk, and halogen filter.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

9. 193 nm laser source must operate at 500 Hz continuous duty cycle.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

10. Must have dual energy attenuators enabling fluence control 0.01–15 J/cm2 in 0.01 steps.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

11. Must have rotating optical homogenizer to average beam energy inhomogeneity.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

12. Aperture device must offer >60 spot selections from <1 micron to >150 microns.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

13. Optimized helium carrier gas consumption must be <0.8 L/min.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

14. Must have user-changeable multi-position mirrors in high-fluence areas for 5× extended lifetime.

a. ___________________(Manufacturing Company Name) takes the following exceptions to the technical requirements: List each exception (if there are no exceptions, please state the corresponding technical specification the offered unit provides).

Please sign and date:

Approval ____________________________

Manufacturing Company Rep

Date

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