Atch 1 - SOW - Apogee Spin Coater and Spin Developer 19Dec24.pdf

Statement of Work for

Apogee Spin Coater and Apogee Spin Developer 19 December 2024

I. Background:

The Air Force Institute of Technology (AFIT) requires an Apogee Spin Coater and an Apogee Spin Developer for the Electrical & Computer Engineering Department (ENG) Cleanroom. The AFIT ENG Cleanroom processes silicon wafers for production of Microelectromechanical (MEMS) and Nano electronic circuits for Cleanroom courses and student research projects for thesis presentation in the graduate school of Engineering. The first process to fabricate integrated MEMS circuitry is the wafer photoresist process.

a. Apogee Spin Coater - The spinners are required to coat the silicon wafers with a thin layer photoresist chemical for the lithography process. This is done by using a spin coater that rotates at a high-speed allowing small amounts of photoresist chemicals to spread to an even thickness. The speed and duration of spin may change and depends on the type of photoresist chemical being used (recipes) depending on the type of MEMS circuitry being fabricated. The spinner has the capability to write preset recipes to match the photoresist chemical being used per recipe needs. The spinner comes with various items for full capability of use.

b. Apogee Spin Developer - The spinners are required to coat the silicon wafers with a thin layer developer chemical for the developing process. This is done by using a spin coater that rotates at a high-speed allowing small amounts of developer chemicals to spread to an even thickness. The speed and duration of spin may change and depends on the type of developer being used (recipes) depending on the type of MEMS circuitry being fabricated. The spinner has the capability to write preset recipes to match the developer chemical being used per recipe needs. The spinner comes with various items for full capability of use.

II. Minimum Technical Requirements:

a. The following specification lists the minimum requirements for the Apogee Spin Coater.

1. Apogee® Spin Coater (Flange-mount, DataStream™, HDPE Spin Bowl, 12,000 rpm, 110V) – Quantity 1.

2. N2 Purge Lid - Automated - (Apogee™ Spin Coater) – Quantity 1.

3. Apogee 200mm Bowl Liners (Polyethylene - Raised Lip - No Drain) – Quantity 1.

4. Apogee 200mm Bowl Liners (Polyethylene - Standard Drain Opening )– Quantity 1.

5. DELRIN® Spin Chuck Set (Includes 1/8", 5/16", 1/2", 3/4", 1.50", 2.25", 4.0" Spin Chucks, Recommended for Substrate Sizes 3MM - 200MM, .0125" - 8.0") – Quantity 1.

6. 2" Handheld Centering Device (For use with 1" or 1.5" Spin Chuck)(Apogee™) – Quantity 1.

7. 3" Handheld Centering Device (For use with 2.25" Spin Chuck) – Quantity 1.

8. 100mm Handheld Centering Device (For use with 2.25" Spin Chuck) – Quantity 1.

9. 4" X 4" Custom Recessed Spin Chuck (DELRIN®) 4" x 4" x 0.060" – Quantity 1.

10. Cartridge Dispense-12 oz-1/8" Lines/Valve-Luer tip for materials up to 100cps – Quantity 1.

11. Cartridge Dispense-12 oz-1/4" Lines/Valve-Luer tip for materials ~100cps 3,000cps – Quantity 1.

12. Pressure Can Empty Sensor-1 Gallon-Edge Bead Removal – Quantity 1.

13. Pressure Can Empty Sensor-1 Gallon-Back Side Rinse – Quantity 1.

14. 4-Position Dispense Control Box (Apogee™ Series) (Required for Auto- Dispense, N2 Purge, etc.) – Quantity 2.

15. Dispense Splitter (Apogee >4 Dispense or Pumps or Specific Accessories (Drain Separator, Auto-N2 Purge Hood, etc.)) – Quantity 1.

16. OptiFlow™ Exhaust Control System – Quantity 1.

17. 2.5-Gallon Drain Bottle Assembly w/ Full Sensor (Apogee™) – Quantity 1.

18. Vacuum Pump (110V) – Quantity 1.

19. One (1) Year Full Warranty - Parts & Labor – Quantity 1.

b. The following specification lists the minimum requirements for the Apogee Spin Developer.

1. Apogee® Spin Developer (Flange-mount, DataStream™, Chimney Hood w/ Cover, HDPE Spin Bowl, 12,000 rpm, 110V) – Quantity 1.

2. DELRIN® Spin Chuck Set (Includes 1/8", 5/16", 1/2", 3/4", 1.50", 2.25", 4.0" Spin Chucks, Recommended for Substrate Sizes 3MM - 200MM, .0125" - 8.0") – Quantity 1.

3. 2" Handheld Centering Device (For use with 1" or 1.5" Spin Chuck) (Apogee™) - Quantity 1.

4. 3" Handheld Centering Device (For use with 2.25" Spin Chuck) - Quantity 1.

5. 100mm Handheld Centering Device (For use with 2.25" Spin Chuck) - Quantity 1.

6. Captive Spin Chuck (4'" X 4") - Quantity 1.

7. Pressure Can Empty Sensor-1 Gallon-Direct Spray Nozzle - Quantity 4.

8. N2 Blowoff - Quantity 1.

9. Pressure Can Empty Sensor-1 Gallon-Back Side Rinse - Quantity 1.

10. 4-Position Dispense Control Box (Apogee™ Series) (Required for Auto- Dispense, N2 Purge, etc.) - Quantity 2.

11. Dispense Splitter (Apogee >4 Dispense or Pumps or Specific Accessories (Drain Separator, Auto-N2 Purge Hood, etc.) - Quantity 1.

12. Auto Drain Separator (3/4" Drain) - Quantity 1.

13. 5-Gallon Drain Bottle Assembly w/ Full Sensor - Quantity 2.

14. Vacuum Pump (110V) - Quantity 1.

15. One (1) Year Full Warranty - Parts & Labor - Quantity 1.

III. Training:

N/A

IV. Installation:

N/A

V. Delivery:

SHIP TO DoDAAC: F4F5AN POC: Mr. Michael Hill Sr. (POC) AFIT/ENG Bldg.640 Rm320 2950 Hobson Way Wright-Patterson AFB, OH

VI. Lead Time:

The contractor shall deliver ordered systems within 90 days after contract approval.

VII. Delivery Procedures – Commercial Vehicles:

a. The company shall properly ship the system to the Air Force Institute of Technology at WPAFB, OH. All shipping costs to include insurance will be included in contractor’s proposal. Great care using standard, approved packaging methods shall be taken.

b. All vehicles larger than a large pick-up truck are required to be inspected by the Wright- Patterson Air Force Base Commercial Vehicle Delivery Gate (CVDG) prior to entering the installation. Vehicles to be inspected include, but are not limited to, the following:

1. Step van/panel truck

2. Tractor/trailer, box and flatbed containing cargo

3. Tanker trucks

4. Box trucks

5. Tour buses

6. Garbage/recycled waste trucks

7. Concrete trucks/mixers, dump trucks

8. Cranes, recreational vehicles, petroleum tanker

This inspection will be conducted at Gate 26A located off State Route 235.

c. The following are exemptions to vehicles utilizing the CVDG:

1. If the vehicle has the product inside (concrete and asphalt trucks) and timely delivery is necessary due to product deterioration it does not need to enter the CVDG. To bypass the CVDG, the contractor shall submit a list containing drivers’ names, social security numbers and the state in which the driver's license is held for those drivers who will be entering the base. This shall be accomplished 24 hours prior to requested entry time. If entry is requested on Monday, this list must be submitted by Friday at 1630 hours. All lists shall be submitted to the 88th ABW/CE Directorate contract inspector. The only gates that may be used under this exemption shall be 15A, 26A, 38A, and gate 1B. If the driver's name is not on the list, he/she will not be allowed access to the installation through these gates and the base will not assume liability for denied access.

2. If a delivery vehicle must exit, and then re-enter the base to complete its route, the vehicle shall be resealed upon exiting the base. After initially passing through the commercial vehicle delivery gate, trucks shall be resealed at Gates 15A, 38A and 22B. The resealing of the trucks will allow them to continue to any other area of the installation (Areas A, B, or Kittyhawk) without reprocessing through the CVDG. To receive resealing assistance, the drivers shall physically stop at one of the three authorized gates and request the installation entry controller to reseal their truck and provide the next location of their delivery. The controller will reseal the truck and give the delivery driver a pre-clearance form. The driver shall present the pre-clearance form to the entry controller at the next point of installation entry. This reentry can be through any base gate.

d. Vehicles may be subject to an inspection at any of installation entry control points during a directed random antiterrorism measure (RAM.) Any commercial vehicle, regardless of size, can be directed to the CVDG at the discretion of the installation entry controller.