EXHIBIT A SCOPE OF WORK AND PRICING 68915 PLD System.pdf

Pulse Laser Deposition (PLD) System Description

INVITATION FOR BIDS UTA25-68915 PLD SYSTEM

Unit Price – Extended Price

1. PLD Vacuum

Chamber

• Stainless steel high vacuum chamber with multiport compatibility for PLD. The Chamber is equipped with various ports for target carousel flange, oxygen resistance/compatible 2.2- inch dia substrate heater, process observation windows, pressure gauges, gas injection and venting.

All port flanges are fitted with copper (OHFC) gaskets and a few with Viton gaskets for easy chamber opening and easy laser window cleaning. Vacuum levels in the final configured system to a level better than 8 x10-7 Torr.

• All unused ports will be blanked off. System will have optical view ports for optical diagnosis. All view ports are high-vacuum compatible toughened glass windows.

• The ports are positioned such that deposition and growth process can be monitored visually.

• Metal frame with castor wheels is used for mounting the chamber with 19” rack mount panels.

• Fused silica UV grade optical window for laser entry.

• Substrate heater and PLD target carousel both are on horizontal plane. In coming laser beam needs to be horizonal plane. The height of the center point of the PLD laser entry port from the ground level will be sent to customer/end user during facility preparation.

2. Vacuum Pumping and Measurement

• Variable speed turbomolecular pump (60-100% of the full speed) will be supplied.

• Manual gate valve will be supplied between the chamber and turbo pump.

• Process pressure inside the chamber can be controlled in combination with gas flow, turbo speed and gate valve.

• A dry mechanical pump will be provided for rough vacuum.

• Includes all applicable hardware, vacuum plumbing, and valves for pumping and venting operations.

3. Vacuum Measurement

• One full range cold cathode and Pirani combination gauge (range 1E-8 – 760 Torr (1 atm.) with display on turbo pump control panel will be provided.

4. Target Carousel

• PLD target carousel is 8" OD (CF) Mounted with rotation feedthrough and stepper motor.

• The target holder flange can hold six 1” or three 2” OD targets (max. ¼” thickness).

• PLD targets can be mounted with or without silver paste.

• Removable mechanical clip target holders (1” dia x quantity 6 and 2” dia x quantity 3) will be supplied.

• A contamination shield allowing only one target to be exposed to the laser at one time is included.

• A motorized high vacuum rotary feedthrough allows continuous target rotation of 10 rpm and a stepper motor allows for pre- programmed selection of targets.

• All bearings are oil free ceramic composite bearings to withstand oxidizing and PLD plasma conditions for long period of operations.

Preferably Electronics Include:

1. Easy Manual press button for PLD target selection,

2. Easy Manual button for precise correction of the PLD target position,

3. Easy Manual target rotation press button, and

4. Easy Manual button for target rastering.

5. Substrate Heating stage

• The substrate heating stage is equipped with 2.2-inch diameter Inconel substrate heater with embedded thermocouple, electrical feedthrough and substrate (pre-ablation) shutter.

• Substrate heater can reach 850 ˚C in high vacuum and in reactive atmosphere (O2) up to 100 Torr. Standard PLD deposition runs are carried between 10-6Torr through 200mTorr O2 background partial pressure. Substrate heater is compatible with O2, NH3, N2, and Ar gases.

Substrate heater assembly is also designed for thermal annealing of thin films.

• The substrate heater is closed loop and temperature non-uniformity across the wafer is within 10-15%. An integrated inbuilt K-type thermocouple mounted from the heater’s backside approaches near the surface of the hot surface allowing for accurate temperature measurement. The heater element is sealed against exposure to reactive gases and high- density laser ablation plasma processes.

• A stainless-steel shield/collar with 6x4-40 tapped holes is provided for sample clamping.

Substrates can be attached to the heater block with silver paint or ink in order to equilibrate the temperature of the substrate in proximity of the block temperature and to minimize temperature gradient within the substrate. Substrate holder also allows mechanical clamping of substrate to avoid contamination from silver paint.

• Pre-ablation shutter is also included so that target can be cleaned prior to deposition on loaded substrates.

• Sample to target distance can be changed from 4 cm to 8 cm manually.

• Easy to replace for cleaning and maintenance, and replacement.

6. Substrate Temperature Controller

• Heater Power supply (PS1000) includes a standard Eurotherm 2416 temperature controller for precise heater temperature control.

• It has a PID programmable 8 segment profile including: ramp, dwell, ramp, end, stop, etc.

• It features easy control for substrate heating with manual as well as auto modes.

• Cables, connectors included.

• The temperature controller also operates with a SSR with phase angled firing.

• The substrate temperature control loop is closed. Thermocouple and PID controller loop control parameters can be memorized, set up during the process and loaded into any phase of the process; temperature can be programmed with several segments

• Precision temperature control-Control sample temperature with precision thermocouple built into the substrate heater.

• Rated for single phase 120V/10 Amp.

7. Mass flow controller and Pressure Control

• One mass flow meter with digital display for O2 gas calibration to supply process gas at flow rates from 0 to 1000 SCCM.

• The process pressure in the chamber during PLD can be controlled by adjusting the combination of turbo pumping speed, gate valve % opening, and gas flow. Process pressure can be easily achieved from 10-6 Torr to 200 mTorr.

8. Manual Booklet

Products come with manual describing a complete function, operating procedures, and maintenance instructions of the PLD system.

9. Installation & Training

Supplier shall provide one-time training to max 2 users either at Supplier facility or at customer facility during installation, if installation option is selected.

10. Warranty Product warranty One year.

11. System and Lab requirements

Supplier shall send a list of lab requirements after PO.

Receptacles (lab preparation document will be sent to customer/end user for lab preparation before system shipment and installation).

Subtotal $

Freight Fees $

Grand Total $